摘要:
A method for converting a circuit design into a semiconductor device includes the following steps. A first set of deign information is provided for representing the circuit design. Priority design information, which represents a priority portion of the circuit design, is extracted from the first set of design information. The priority design information is processed for generating a second set of design information. The semiconductor device is fabricated based on the first and second sets of design information. The second set of design information contains enhanced fabrication conditions as opposed to those of the first set of design information for optimizing the conversion of the circuit design into the semiconductor device.
摘要:
Disclosed is a system and method for integrated circuit designs and post layout analysis. The integrated circuit design method includes providing a plurality of IC devices with various design dimensions; collecting electrical performance data of the IC devices; extracting equivalent dimensions of the IC devices; generating a shape related model to relate the equivalent dimensions to the electrical performance data of the IC devices; and creating a data refinement table using the equivalent dimensions and the electrical performance data.
摘要:
A method for converting a circuit design into a semiconductor device includes the following steps. A first set of deign information is provided for representing the circuit design. Priority design information, which represents a priority portion of the circuit design, is extracted from the first set of design information. The priority design information is processed for generating a second set of design information. The semiconductor device is fabricated based on the first and second sets of design information. The second set of design information contains enhanced fabrication conditions as opposed to those of the first set of design information for optimizing the conversion of the circuit design into the semiconductor device.
摘要:
Disclosed is a system and method for integrated circuit designs and post layout analysis. The integrated circuit design method includes providing a plurality of IC devices with various design dimensions; collecting electrical performance data of the IC devices; extracting equivalent dimensions of the IC devices; generating a shape related model to relate the equivalent dimensions to the electrical performance data of the IC devices; and creating a data refinement table using the equivalent dimensions and the electrical performance data.
摘要:
Disclosed is a system and method for integrated circuit designs and post layout analysis. The integrated circuit design method includes providing a plurality of IC devices with various design dimensions; collecting electrical performance data of the IC devices; extracting equivalent dimensions of the IC devices; generating a shape related model to relate the equivalent dimensions to the electrical performance data of the IC devices; and creating a data refinement table using the equivalent dimensions and the electrical performance data.
摘要:
The present disclosure provides an interconnect structure for a semiconductor device. The interconnect structure includes a first metal layer that contains a first metal line. The interconnect structure includes a dielectric layer located over the first metal layer. The dielectric layer contains a first sub-via electrically coupled to the first metal line and a second sub-via electrically coupled to the first sub-via. The second sub-via is different from the first sub-via. The interconnect structure includes a second metal layer located over the dielectric layer. The second metal layer contains a second metal line electrically coupled to the second sub-via. No other metal layer is located between the first metal layer and the second metal layer.
摘要:
The present disclosure is directed generally to a method and apparatus for monitoring mask process impact on lithography performance. A method including receiving a physical wafer pattern according to a mask, extracting a mask contour from the mask, and extracting a deconvolution pattern based on the mask contour. A lithography process is simulated to create a virtual wafer pattern based on the deconvolution pattern. The virtual wafer pattern is then compared to the physical wafer pattern.
摘要:
A system, method, and computer readable medium for generating a parameterized and characterized pattern library for use in extracting parasitics from an integrated circuit design is provided. In an embodiment, a layout of an interconnect pattern is provided. A process simulation may be performed on the interconnect pattern. In a further embodiment, the interconnect pattern is dissected into a plurality of segments taking into account OPC rules. A parasitic resistance and/or parasitic capacitance associated with the interconnect pattern may be determined by a physical model and/or field solver.
摘要:
Efficient and cost-effective systems and methods for detecting and correcting hot spots of semiconductor devices are disclosed. In one aspect, a method for creating a layout from a circuit design is described. The method includes applying a first set of hot spot conditions to a global route to produce a detailed route; applying a second set of hot spot conditions to the detailed route to produce a post-detailed route; and applying a third set of hot spot conditions to the post-detailed route to produce the layout. In another aspect, a method includes providing a circuit design; applying a first hot spot filter to a global routing of the circuit design to produce a detailed route; applying a less pessimistic, second hot spot filter to the detailed route to produce a post-detailed route; and performing a rip-up and reroute of the post-detailed route to produce a final layout.
摘要:
Methods and systems for providing processing parameters in a secure format are disclosed. In one aspect, a method for providing semiconductor fabrication processing parameters to a design facility is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a model from the set of processing parameters; converting the model into a corresponding set of kernels; converting the set of kernels into a corresponding set of matrices; and communicating the set of matrices to the design facility. In another aspect, a method for providing semiconductor fabrication processing parameters is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a processing model from the set of processing parameters; encrypting the processing model into a format for use with a plurality of EDA tools; and communicating the encrypted processing model format to a design facility.