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公开(公告)号：US20200312645A1
公开(公告)日：2020-10-01
申请号：US16834097
申请日：2020-03-30
摘要： To provide an ion detector having an electron lens structure that enables expansion of an effective region of an MCP for capturing ions.The ion detector comprises an MCP unit including an MCP and a first focus electrode, a signal output device including an electron detector surface, and a reset unit disposed between the MCP unit and the signal output device. The reset unit includes a reset element and a second focus electrode. The reset element includes a second input surface and a second output surface opposing each other. On the second output surface, the reset element resets variations in incident angle and velocity of electrons on the second input surface.
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公开(公告)号：US20220165890A1
公开(公告)日：2022-05-26
申请号：US17445969
申请日：2021-08-26
IPC分类号： H01L31/02 , H01L31/0224 , H01L31/107
摘要： An embodiment of the present disclosure relates to a detector that includes an AD and detects charged particles or light, and enables speeding up of response of the detector without changing a structure of the AD that limits the response of the detector. A drive circuit of the AD includes a first capacitor and a first resistor. Both the first capacitor and the first resistor are connected in series to the AD in a state where both terminals are set to have the same potential. This configuration reduces the apparent capacitance of the AD and speeds up the response of the entire detector including the drive circuit.
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公开(公告)号：US20210391159A1
公开(公告)日：2021-12-16
申请号：US17342746
申请日：2021-06-09
摘要： An ion detector includes a microchannel plate configured to generate secondary electrons upon reception of ions incident thereon and multiply and output the generated secondary electrons; a plurality of electron impact-type diodes configured to have effective regions narrower than an effective region of the microchannel plate on an electron incident surface facing the microchannel plate side, receive the incident secondary electrons output from the microchannel plate, and multiply and detect the incident secondary electrons; and a focus electrode configured to be disposed between the microchannel plate and the electron impact-type diodes and focus the secondary electrons toward the electron impact-type diode.
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公开(公告)号：US20210391162A1
公开(公告)日：2021-12-16
申请号：US17333129
申请日：2021-05-28
IPC分类号： H01J49/02
摘要： An ion detector includes a microchannel plate configured to generate secondary electrons upon reception of ions incident thereon and multiply and output the generated secondary electrons; a plurality of electron impact-type diodes configured to have effective regions narrower than an effective region of the microchannel plate, receive the incident secondary electrons output from the microchannel plate, and multiply and detect the incident secondary electrons; a focus electrode configured to be disposed between the microchannel plate and the electron impact-type diodes and focus the secondary electrons toward the electron impact-type diodes; and a voltage supply part configured to apply a drive voltage to each of the plurality of electron impact-type diodes.
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公开(公告)号：US20200373136A1
公开(公告)日：2020-11-26
申请号：US16878179
申请日：2020-05-19
摘要： An ion detector according to this embodiment has a structure for reducing influences of signal reflection or the like on an output signal. The ion detector comprises an electron multiplier, a signal output unit, a signal output terminal, and an AC coupler. The AC coupler is disposed on a signal line between the signal output unit and the signal output terminal, including a resin sheet and a pair of conductive sections facing each other with the resin sheet interposed therebetween. One conductive section is electrically connected to an output terminal of the signal output unit, and the other conductive section is electrically connected to the signal output terminal.
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