摘要:
An X-ray generation apparatus includes an electron gun emitting an electron beam having a circular cross-sectional shape, a magnetic focusing lens located downstream of the electron gun and focusing the electron beam while rotating the electron beam around an axis along a first direction, a magnetic quadrupole lens located downstream of the magnetic focusing lens and deforming the cross-sectional shape of the electron beam into an elliptical shape having a major axis along a second direction orthogonal to the first direction and a minor axis along a third direction orthogonal to the first direction and the second direction, and a target located downstream of the magnetic quadrupole lens and emitting an X-ray in response to incidence of the electron beam.
摘要:
To provide an ion detector having an electron lens structure that enables expansion of an effective region of an MCP for capturing ions.The ion detector comprises an MCP unit including an MCP and a first focus electrode, a signal output device including an electron detector surface, and a reset unit disposed between the MCP unit and the signal output device. The reset unit includes a reset element and a second focus electrode. The reset element includes a second input surface and a second output surface opposing each other. On the second output surface, the reset element resets variations in incident angle and velocity of electrons on the second input surface.
摘要:
A charged particle detector according to the embodiment is provided with an MCP and a PD arranged with a focus electrode interposed therebetween in order to improve a response characteristic as compared to a conventional one in a configuration in which the MCP having a bias angle and the PD are combined. The MCP includes a plurality of through holes each inclined by a bias angle θ and the PD is eccentrically arranged such that a center of an electron incident surface deviates by a predetermined distance in a bias angle direction S3 with respect to a central axis AX1 of the MCP.
摘要:
A method of manufacturing an electron multiplier body, the method includes a step of preparing a first plate-like member having a surface and a back surface and a pair of second plate-like members, a step of forming, in the first plate-like member, a hole portion reaching from the front surface to the back surface, a step of constituting a laminated body by laminating the first and second plate-like members on each other so that the first plate-like member is interposed between the pair of second plate-like members to form a channel defined by the hole portion in the laminated body, a step of integrating the laminated body, a step of constituting a main body portion by cutting the integrated laminated body so that the channel is open, and a step of forming a resistive layer and a secondary electron multiplication layer on an inner surface of the channel.
摘要:
An electron multiplier body including a main body portion, an electron incidence portion, and a channel, in which the channel includes a first inner surface and a second inner surface facing each other, the first inner surface includes a convex first bent portion and a concave second bent portion, and a plurality of first inclined surfaces, the second inner surface includes a convex third bent portion and a concave fourth bent portion, and a plurality of second inclined surfaces, and an interval between a tip of the first bent portion and a tip of the third bent portion, a distance between the first inclined surface and the second inclined surfaces facing each other, an angle between a pair of first inclined surfaces defining the first bent portion, and a length of the channel satisfy predetermined expressions.
摘要:
A main body portion includes a first plate-shaped member and a second plate-shaped member that are stacked on each other in a second direction to form a first channel and a second channel, the first plate-shaped member includes a first front surface, a first back surface, a first hole portion area, and a first solid area, the second plate-shaped member includes a second front surface, a second back surface, a second hole portion area, and a second solid area, the first hole portion area faces the second solid area, the second hole portion area faces the first solid area.
摘要:
A method of manufacturing an electron multiplier body, the method includes a step of preparing a first plate-like member having a surface and a back surface and a pair of second plate-like members, a step of forming, in the first plate-like member, a hole portion reaching from the front surface to the back surface, a step of constituting a laminated body by laminating the first and second plate-like members on each other so that the first plate-like member is interposed between the pair of second plate-like members to form a channel defined by the hole portion in the laminated body, a step of integrating the laminated body, a step of constituting a main body portion by cutting the integrated laminated body so that the channel is open, and a step of forming a resistive layer and a secondary electron multiplication layer on an inner surface of the channel.