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公开(公告)号：US20210343517A1
公开(公告)日：2021-11-04
申请号：US17241224
申请日：2021-04-27
发明人： Hiroshi KOBAYASHI , Junichi KONDO
摘要： An ion detector includes a first dynode, a second dynode, a scintillator, a conductive layer, and a photomultiplier tube. The first dynode is configured to emit a charged particle in response to the incidence of the ion. The second dynode is configured to be given a negative potential and emit a secondary electron in response to incidence of the charged particle from the first dynode. The scintillator includes an electron incident surface arranged to receive the secondary electron from the second dynode, and is configured to convert the secondary electron into light. The conductive layer is disposed on the electron incident surface. The photomultiplier tube is configured to detect the light from the scintillator.
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公开(公告)号：US20200312645A1
公开(公告)日：2020-10-01
申请号：US16834097
申请日：2020-03-30
摘要： To provide an ion detector having an electron lens structure that enables expansion of an effective region of an MCP for capturing ions.The ion detector comprises an MCP unit including an MCP and a first focus electrode, a signal output device including an electron detector surface, and a reset unit disposed between the MCP unit and the signal output device. The reset unit includes a reset element and a second focus electrode. The reset element includes a second input surface and a second output surface opposing each other. On the second output surface, the reset element resets variations in incident angle and velocity of electrons on the second input surface.
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公开(公告)号：US20200135439A1
公开(公告)日：2020-04-30
申请号：US16665065
申请日：2019-10-28
发明人： Takeshi ENDO , Hiroshi KOBAYASHI
摘要： According to an embodiment, in a CEM assembly and the like, it is possible to reduce a size of a voltage supply circuit configured to stabilize a voltage to be applied to a channel electron multiplier. The CEM assembly includes a CEM and a voltage supply circuit. The CEM includes an input electrode, a multiplication channel, and an output electrode. The voltage supply circuit includes a power source unit and a constant voltage generation unit. A potential of an input electrode A is set by an electromotive force generated by the power source unit. The constant voltage generation unit includes a constant voltage supply unit configured to cause voltage drop. A target potential set at an output-side reference node is maintained by the voltage drop of the constant voltage supply unit.
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公开(公告)号：US20200058477A1
公开(公告)日：2020-02-20
申请号：US16661184
申请日：2019-10-23
发明人： Hiroshi KOBAYASHI , Ginji SUGIURA
摘要： An electron multiplier production method including a main body portion, and a channel provided in the main body portion to open at one end surface and the other end surface of the main body portion and emits secondary electrons includes a first step of preparing a main body member including the one end surface and the other end surface, a communicating hole for the channel through which the one end surface and the other end surface communicate being provided in the main body member, a second step of forming the channel by forming a deposition layer including at least a resistive layer on an outer surface of the main body member and an inner surface of the communicating hole using an atomic layer deposition method, and a third step of forming the main body portion by removing the deposition layer formed on the outer surface of the main body member.
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公开(公告)号：US20180174810A1
公开(公告)日：2018-06-21
申请号：US15740164
申请日：2016-06-30
CPC分类号： H01J49/025 , G01T1/241 , G01T1/28 , H01J43/24 , H01J49/06 , H01J49/067
摘要： A charged particle detector according to the embodiment is provided with an MCP and a PD arranged with a focus electrode interposed therebetween in order to improve a response characteristic as compared to a conventional one in a configuration in which the MCP having a bias angle and the PD are combined. The MCP includes a plurality of through holes each inclined by a bias angle θ and the PD is eccentrically arranged such that a center of an electron incident surface deviates by a predetermined distance in a bias angle direction S3 with respect to a central axis AX1 of the MCP.
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公开(公告)号：US20130187057A1
公开(公告)日：2013-07-25
申请号：US13744863
申请日：2013-01-18
IPC分类号： G01T1/28
CPC分类号： G01T1/28
摘要： An ion detector 1A for detecting positive ions is provided with a chamber 2 having an ion entrance 3 which allows positive ions to enter, a conversion dynode 9 which is disposed in the chamber 2 and to which a negative potential is applied, and an avalanche photodiode 30 that is disposed in the chamber 2 and has an electron incident surface 30a which is opposed to the conversion dynode 9 and also into which secondary electrons emitted from the conversion dynode 9 are made incident. The electron incident surface 30a is located closer to the conversion dynode 9 than a positioning part 14 which supports the avalanche photodiode 30 in the grounded chamber 2.
摘要翻译： 用于检测正离子的离子检测器1A设置有具有允许正离子进入的离子入口3的室2，设置在室2中并且施加负电位的转换倍增极9和雪崩光电二极管 30，其设置在室2中，并且具有与转换倍增极9相对的电子入射表面30a，并且入射从转换倍增极9发射的二次电子。 电子入射表面30a比在接地室2中支撑雪崩光电二极管30的定位部分14更靠近转换倍增极9。
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公开(公告)号：US20220165890A1
公开(公告)日：2022-05-26
申请号：US17445969
申请日：2021-08-26
IPC分类号： H01L31/02 , H01L31/0224 , H01L31/107
摘要： An embodiment of the present disclosure relates to a detector that includes an AD and detects charged particles or light, and enables speeding up of response of the detector without changing a structure of the AD that limits the response of the detector. A drive circuit of the AD includes a first capacitor and a first resistor. Both the first capacitor and the first resistor are connected in series to the AD in a state where both terminals are set to have the same potential. This configuration reduces the apparent capacitance of the AD and speeds up the response of the entire detector including the drive circuit.
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公开(公告)号：US20190259594A1
公开(公告)日：2019-08-22
申请号：US16281398
申请日：2019-02-21
摘要： The present embodiment relates to an ion detector provided with a structure for suppressing degradation over time in an electron multiplication mechanism in a multi-mode ion detector. The ion detector includes a dynode unit, a first electron detection portion including a semiconductor detector having an electron multiplication function, a second electron detection portion including an electrode, and a gate part. The first and second electron detection portions are capable of ion detection at different multiplication factors. The gate part includes at least a final-stage dynode as a gate electrode, and controls switching between passage and interruption of secondary electrons which are directed toward the first electron detection portion by adjusting a set potential of the gate electrode.
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9.发明申请公开(公告)号：US20180144914A1
公开(公告)日：2018-05-24
申请号：US15858600
申请日：2017-12-29
CPC分类号： H01J43/10 , B32B3/00 , B32B9/005 , B32B9/04 , B32B2457/20 , C23C14/00 , C23C16/45555 , H01J9/125 , H01J43/16 , H01J43/24
摘要： A method of manufacturing an electron multiplier body, the method includes a step of preparing a first plate-like member having a surface and a back surface and a pair of second plate-like members, a step of forming, in the first plate-like member, a hole portion reaching from the front surface to the back surface, a step of constituting a laminated body by laminating the first and second plate-like members on each other so that the first plate-like member is interposed between the pair of second plate-like members to form a channel defined by the hole portion in the laminated body, a step of integrating the laminated body, a step of constituting a main body portion by cutting the integrated laminated body so that the channel is open, and a step of forming a resistive layer and a secondary electron multiplication layer on an inner surface of the channel.
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公开(公告)号：US20160260593A1
公开(公告)日：2016-09-08
申请号：US15058199
申请日：2016-03-02
IPC分类号： H01J43/16
摘要： An electron multiplier body including a main body portion, an electron incidence portion, and a channel, in which the channel includes a first inner surface and a second inner surface facing each other, the first inner surface includes a convex first bent portion and a concave second bent portion, and a plurality of first inclined surfaces, the second inner surface includes a convex third bent portion and a concave fourth bent portion, and a plurality of second inclined surfaces, and an interval between a tip of the first bent portion and a tip of the third bent portion, a distance between the first inclined surface and the second inclined surfaces facing each other, an angle between a pair of first inclined surfaces defining the first bent portion, and a length of the channel satisfy predetermined expressions.
摘要翻译： 一种电子倍增器体，包括主体部分，电子入射部分和沟道，其中沟道包括彼此面对的第一内表面和第二内表面，第一内表面包括凸起的第一弯曲部分和凹部 第二弯曲部分和多个第一倾斜表面，所述第二内表面包括凸起的第三弯曲部分和凹入的第四弯曲部分，以及多个第二倾斜表面，并且所述第一弯曲部分的尖端和 所述第三弯曲部的前端，所述第一倾斜面与所述第二倾斜面之间的距离彼此相对，所述一对限定所述第一弯曲部的第一倾斜面与所述通道的长度之间的角度满足预定的表达。
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