MEMS ACTUATOR, MEMS ACTUATOR DRIVE METHOD, AND MEMS ACTUATOR CONTROL PROGRAM

    公开(公告)号:US20230152573A1

    公开(公告)日:2023-05-18

    申请号:US17916821

    申请日:2021-01-27

    CPC classification number: G02B26/0841 B81B7/02 G02B26/10

    Abstract: A MEMS actuator includes: a drive circuit for applying a drive voltage having a time waveform, which periodically repeats rising and falling and includes a period to be a constant voltage after the rising and before the falling, between a fixed comb electrode and a movable comb electrode; and a timing detection circuit that generates a capacitance derivative signal indicating a derivative value of a capacitance between the fixed comb electrode and the movable comb electrode by converting a current signal, which is output from the fixed comb electrode or the movable comb electrode within the period due to a change in the capacitance, into a voltage signal and detects a timing when the capacitance derivative signal reaches a threshold value. The drive circuit controls a relationship between the timing detected by the timing detection circuit and a timing of the falling to be constant.

    DIFFERENTIAL AMPLIFIER, PIXEL CIRCUIT AND SOLID-STATE IMAGING DEVICE

    公开(公告)号:US20200280694A1

    公开(公告)日:2020-09-03

    申请号:US16754239

    申请日:2018-10-03

    Abstract: A pixel circuit includes a differential amplifier. The differential amplifier includes a non-inverting input terminal, an inverting input terminal, and an output terminal. The differential amplifier includes an input differential pair including first and second NMOS transistors, a current mirror pair including PMOS transistors, and a constant current source including a fifth NMOS transistor. A threshold voltage of each of the first and second NMOS transistors is higher than a threshold voltage of the fifth NMOS transistor. Further, the threshold voltage of each of the first and second NMOS transistors is higher than a threshold voltage of another NMOS transistor.

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