FLUID OPERATION CELL WITH ON-CHIP ELECTRICAL FLUID OPERATION COMPONENTS

    公开(公告)号:US20200018773A1

    公开(公告)日:2020-01-16

    申请号:US16335738

    申请日:2016-10-10

    Abstract: In one example in accordance with the present disclosure, a fluid operation cell is described. The fluid operation cell includes a micro-electro-mechanical housing. The housing includes an inlet and an outlet through which fluid flows and electrodes disposed on an interior of the housing to couple to a controller. The fluid operation cell also includes a silicon-based substrate disposed inside, and electrically coupled to, the housing. The substrate includes an on-chip electrical fluid operation component formed thereon. The electrical fluid operation component uses an electrical signal to operate on bypassing fluid. The fluid operation cell includes a dedicated address to be individually activated by the controller.

Patent Agency Ranking