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公开(公告)号：US20240346818A1
公开(公告)日：2024-10-17
申请号：US18292978
申请日：2022-09-21
申请人： HITACHI, LTD.
发明人： Takafumi MIWA , Sayaka KURATA , Shinichi MATSUBARA , Yuta IMAI
CPC分类号： G06V10/993 , G06T7/0014 , G06V10/25 , G06V10/88 , G06T2207/10061
摘要： The purpose of the present invention is to provide an inspection device that can determine the reliability of an image feature value in a target region of an observation image of a sample. This inspection device extracts a first feature value from a target region including an inspection target in an observation image of a sample, extracts a second feature value from a reference region other than the target region in the observation image, and compares the first feature value and the second feature value, thereby calculating the reliability of the first feature value (see FIG. 1).
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2.发明申请公开(公告)号：US20210407763A1
公开(公告)日：2021-12-30
申请号：US17279039
申请日：2019-08-09
申请人： Hitachi, Ltd.
发明人： Takafumi MIWA , Hirokazu TAMAKI , Momoyo ENYAMA , Makoto SAKAKIBARA , Sayaka KURATA , Atsuko SHINTANI , Takashi DOBASHI , Kotoko URANO , Akiko KAGATSUME , Minseok PARK , Yasuhiro SHIRASAKI , Thantip KRASIENAPIBAL
摘要： A measurement system comprising: a measurement apparatus observing a sample based on an observation condition including parameters; and an observation condition database storing data in which a search key related to the sample and the observation condition, a control unit calculating information on an observation condition of a sample is configured to: receive an observation condition search request including a search key related to a target sample; refer the observation condition database to search for the first data matching or similar to the search key related to the target sample included in the observation condition search request, calculate, based on the searched first data, a candidate observation condition of the measurement apparatus for observing the target sample, and output display data for presenting the candidate observation condition.
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