公开(公告)号：US20190035597A1

公开(公告)日：2019-01-31

申请号：US16043958

申请日：2018-07-24

申请人： HITACHI, LTD.

发明人： Thantip KRASIENAPIBAL ,  Yasuhiro SHIRASAKI ,  Momoyo ENYAMA ,  Sayaka KURATA

IPC分类号： H01J37/22 ,  G06K9/32 ,  G06K9/46 ,  H01J37/20 ,  H01J37/28 ,  H01J37/244

CPC分类号： H01J37/222 ,  G06K9/0014 ,  G06K9/3233 ,  G06K9/4661 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20235 ,  H01J2237/2804 ,  H01J2237/2806 ,  H01J2237/2813 ,  H01J2237/282

摘要： In this invention, information of material composition, process conditions and candidates of crystal structure either known or imported from material database is used to determine sample stage tilt angle and working distance (WD). Under these determined tilt angle and WD, the intensity of the electrons emitted at different angles and with different energies is measured using a scanning electron microscope (SEM) system comprising: a use of materials database containing materials composition, formation process, crystal structure and its electron yield; a sample stage that is able to move, rotate and tilt; an processing section for calculating optimum working distance for an observation from material database and measurement condition; means for acquiring an image of crystal information of a desired area of a sample based on an image obtained from SEM observation.

公开(公告)号：US20210407763A1

公开(公告)日：2021-12-30

申请号：US17279039

申请日：2019-08-09

申请人： Hitachi, Ltd.

发明人： Takafumi MIWA ,  Hirokazu TAMAKI ,  Momoyo ENYAMA ,  Makoto SAKAKIBARA ,  Sayaka KURATA ,  Atsuko SHINTANI ,  Takashi DOBASHI ,  Kotoko URANO ,  Akiko KAGATSUME ,  Minseok PARK ,  Yasuhiro SHIRASAKI ,  Thantip KRASIENAPIBAL

IPC分类号： H01J37/26 ,  H01J37/28 ,  H01J37/22

摘要： A measurement system comprising: a measurement apparatus observing a sample based on an observation condition including parameters; and an observation condition database storing data in which a search key related to the sample and the observation condition, a control unit calculating information on an observation condition of a sample is configured to: receive an observation condition search request including a search key related to a target sample; refer the observation condition database to search for the first data matching or similar to the search key related to the target sample included in the observation condition search request, calculate, based on the searched first data, a candidate observation condition of the measurement apparatus for observing the target sample, and output display data for presenting the candidate observation condition.

公开(公告)号：US20200257937A1

公开(公告)日：2020-08-13

申请号：US16712568

申请日：2019-12-12

申请人： HITACHI, LTD.

发明人： Thantip KRASIENAPIBAL ,  Sayaka KURATA ,  Momoyo ENYAMA ,  Yasuhiro SHIRASAKI

IPC分类号： G06K9/62 ,  G06K9/44 ,  G06N20/00

摘要： An information processing system creates a teacher database configured to train an analysis model from an observation image and labeling information corresponding to the observation image using an information processor. This system includes a storage unit, an image processing unit, and a teacher database creating unit. The storage unit stores image processing data formed of information showing a relationship between an observation condition and a parameter relating to the observation image. Further stores a first observation image, a first observation condition, and first labeling information. The image processing unit accepts the first observation image and the first observation condition as inputs, performs image processing corresponding to the parameter to the first observation image based on the image processing data, and creates a second observation image corresponding to a second observation condition. The teacher database creating unit creates the teacher database from the second observation image and the first labeling information.