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公开(公告)号:US20190035597A1
公开(公告)日:2019-01-31
申请号:US16043958
申请日:2018-07-24
申请人: HITACHI, LTD.
CPC分类号: H01J37/222 , G06K9/0014 , G06K9/3233 , G06K9/4661 , H01J37/20 , H01J37/244 , H01J37/28 , H01J2237/20207 , H01J2237/20214 , H01J2237/20235 , H01J2237/2804 , H01J2237/2806 , H01J2237/2813 , H01J2237/282
摘要: In this invention, information of material composition, process conditions and candidates of crystal structure either known or imported from material database is used to determine sample stage tilt angle and working distance (WD). Under these determined tilt angle and WD, the intensity of the electrons emitted at different angles and with different energies is measured using a scanning electron microscope (SEM) system comprising: a use of materials database containing materials composition, formation process, crystal structure and its electron yield; a sample stage that is able to move, rotate and tilt; an processing section for calculating optimum working distance for an observation from material database and measurement condition; means for acquiring an image of crystal information of a desired area of a sample based on an image obtained from SEM observation.
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公开(公告)号:US20240066759A1
公开(公告)日:2024-02-29
申请号:US18203093
申请日:2023-05-30
申请人: Hitachi, Ltd.
发明人: Sayaka KURATA , Hiroyuki SUZUKI , Shunsuke MORI
CPC分类号: B29B17/0005 , G06Q10/30 , B29K2105/26
摘要: Even in a case of a waste plastic whose use history is unknown, blending of an additive for recycling into a recycled plastic having a desired physical property can be estimated with high accuracy. A plastic recycling supporting apparatus 100 that supports plastic recycling in which a plastic is blended with an additive and is recycled into a recycled plastic having a desired physical property includes: a physical property and deterioration estimator 140 configured to estimate, using a physical property and deterioration estimation model, a physical property and a deterioration degree of the plastic based on a texture structural feature extracted from surface analysis data of the plastic; and a blending estimator 150 configured to estimate a physical property of the recycled plastic based on the physical property and the deterioration degree of the plastic and a blending condition of the additive using a physical property recovery model.
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公开(公告)号:US20240346818A1
公开(公告)日:2024-10-17
申请号:US18292978
申请日:2022-09-21
申请人: HITACHI, LTD.
发明人: Takafumi MIWA , Sayaka KURATA , Shinichi MATSUBARA , Yuta IMAI
CPC分类号: G06V10/993 , G06T7/0014 , G06V10/25 , G06V10/88 , G06T2207/10061
摘要: The purpose of the present invention is to provide an inspection device that can determine the reliability of an image feature value in a target region of an observation image of a sample. This inspection device extracts a first feature value from a target region including an inspection target in an observation image of a sample, extracts a second feature value from a reference region other than the target region in the observation image, and compares the first feature value and the second feature value, thereby calculating the reliability of the first feature value (see FIG. 1).
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公开(公告)号:US20230034382A1
公开(公告)日:2023-02-02
申请号:US17863759
申请日:2022-07-13
申请人: Hitachi, Ltd.
发明人: Sayaka KURATA , Hailin WANG
IPC分类号: G06V10/774 , G06V10/54 , G06V10/776 , G06V10/70 , G06V20/69
摘要: This invention makes it possible to build an image identification model having high accuracy of identification using divided training images into which training images are divided. An image identification system includes: an image dividing unit which divides training images of a first training data set and assigns a label assigned to a training image from which dividing occurs to the divided training images as tentative labels; a texture index computing unit which computes texture indexes for each of the divided training images; a tentative label prediction model building unit which builds a tentative label prediction model to predict tentative labels assigned to the divided training images based on the texture indexes; and a label comparison unit which compares first tentative labels assigned to the divided training images with second tentative labels predicted with respect to the divided training images by the tentative label prediction model and extracts divided training images for which there is discrepancy between the first and second tentative labels as those images for which it is highly necessary to modify tentative labels.
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公开(公告)号:US20210407763A1
公开(公告)日:2021-12-30
申请号:US17279039
申请日:2019-08-09
申请人: Hitachi, Ltd.
发明人: Takafumi MIWA , Hirokazu TAMAKI , Momoyo ENYAMA , Makoto SAKAKIBARA , Sayaka KURATA , Atsuko SHINTANI , Takashi DOBASHI , Kotoko URANO , Akiko KAGATSUME , Minseok PARK , Yasuhiro SHIRASAKI , Thantip KRASIENAPIBAL
摘要: A measurement system comprising: a measurement apparatus observing a sample based on an observation condition including parameters; and an observation condition database storing data in which a search key related to the sample and the observation condition, a control unit calculating information on an observation condition of a sample is configured to: receive an observation condition search request including a search key related to a target sample; refer the observation condition database to search for the first data matching or similar to the search key related to the target sample included in the observation condition search request, calculate, based on the searched first data, a candidate observation condition of the measurement apparatus for observing the target sample, and output display data for presenting the candidate observation condition.
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公开(公告)号:US20210019568A1
公开(公告)日:2021-01-21
申请号:US16928591
申请日:2020-07-14
申请人: HITACHI, LTD.
发明人: Sayaka KURATA , Naomi INADA
摘要: Image analysis using machine learning technology utilizes a texture structure which is analyzed while a manufacturing process is changed for a purpose of searching for an optimum condition or the like. One aspect is an information processing system including: an identifier configured to output an identification result with an image as input; an automatically identifiable range storage unit configured to store an identifiable range of the identifier defined by numerical values in n (n is an integer of 1 or more) dimensions; an acquisition unit configured to acquire the numerical values corresponding to the image; a control unit configured to compare the numerical values acquired by the acquisition unit and the identifiable range; and an alert output unit configured to output an alert when the control unit determines that the numerical values acquired by the acquisition unit deviate from the identifiable range.
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公开(公告)号:US20200257937A1
公开(公告)日:2020-08-13
申请号:US16712568
申请日:2019-12-12
申请人: HITACHI, LTD.
摘要: An information processing system creates a teacher database configured to train an analysis model from an observation image and labeling information corresponding to the observation image using an information processor. This system includes a storage unit, an image processing unit, and a teacher database creating unit. The storage unit stores image processing data formed of information showing a relationship between an observation condition and a parameter relating to the observation image. Further stores a first observation image, a first observation condition, and first labeling information. The image processing unit accepts the first observation image and the first observation condition as inputs, performs image processing corresponding to the parameter to the first observation image based on the image processing data, and creates a second observation image corresponding to a second observation condition. The teacher database creating unit creates the teacher database from the second observation image and the first labeling information.
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