公开(公告)号：US20180202947A1

公开(公告)日：2018-07-19

申请号：US15744223

申请日：2016-05-13

申请人： HITACHI HIGH-TECH SCIENCE CORPORATION

发明人： Yuta URANO ,  Kaifeng ZHANG ,  Yoshiki MATOBA ,  Akihiro TAKEDA

IPC分类号： G01N23/04 ,  G01N23/10 ,  G01N23/18

CPC分类号： G01N23/04 ,  G01N23/10 ,  G01N23/18 ,  G01N2223/60

摘要： Detection can be performed even for a thick inspection target object through time delay integration without degradation of spatial resolution. There is provided an X-ray inspection device configured to include: an X-ray source that generates X-rays; a transport unit that performs transporting a sample; a detecting unit that has a time delay integration type detector which detects X-rays generated by the X-ray source and transmitted through the sample transported by the transport unit; and a defect determining unit that processes a signal obtained by detecting the X-rays transmitted through the sample by the time delay integration type detector of the detecting unit and determines a defect in the sample. The transport unit performs transporting the sample while causing the sample to rotate in synchronization with the transporting when the sample passes in front of the time delay integration type detector of the detecting unit.