公开(公告)号：US20160133433A1

公开(公告)日：2016-05-12

申请号：US14893669

申请日：2014-03-19

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Masashi FUJITA ,  Masahiro TSUNODA ,  Katsunori ONUKI ,  Katsuya AIBARA ,  Seiichi SHINDO ,  Takaaki NISHIMORI

IPC: H01J37/16 ,  H01J37/18

CPC classification number: H01J37/165 ,  H01J37/09 ,  H01J37/18 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/0266 ,  H01J2237/26 ,  H01L21/6719 ,  H01L21/67201

Abstract: An object of the present invention is to provide a charged particle beam device that suppresses the influence of an external electromagnetic wave, even when a shielding member, such as a vacuum valve, is in the open state. To achieve the above object, a charged particle beam device including a vacuum chamber (111) having an opening (104) that surrounds a sample delivery path is proposed. The charged particle beam device includes a conductive material (118) surrounding the opening (104) for conduction between the vacuum chamber (111) and a conductive member (106) disposed on the atmosphere side. According to an embodiment of the present invention, it is possible to restrict an electromagnetic wave (117) from reaching the sample chamber via the delivery path.

Abstract translation: 本发明的目的是提供一种抑制外部电磁波的影响的带电粒子束装置，即使在诸如真空阀的屏蔽构件处于打开状态时也是如此。 为了实现上述目的，提出了一种包括具有围绕样品传送路径的开口（104）的真空室（111）的带电粒子束装置。 带电粒子束装置包括围绕开口（104）的导电材料（118），用于在真空室（111）和设置在大气侧的导电构件（106）之间传导。 根据本发明的实施例，可以限制电磁波（117）经由输送路径到达样品室。