公开(公告)号：US20180080868A1

公开(公告)日：2018-03-22

申请号：US15553176

申请日：2015-03-13

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Nobuhiro SHIRAMIZU ,  Hideharu MIKAMI ,  Koichi WATANABE

IPC: G01N21/3581

CPC classification number: G01N21/3581 ,  G01N2201/061

Abstract: Provided is a terahertz wave measuring device that can provide means for improving sensitivity, removing unnecessary light, and phase difference detection. The terahertz wave measuring device comprises a pulsed laser light generation unit 1 that generates pump light 3, a seed light generation unit 2 that generates seed light, a terahertz wave generator 5 on which the pump light and the seed light are incident and that generates terahertz waves, a terahertz wave detector 8 on which the terahertz waves that are generated from the terahertz wave generator and that have interacted with a measurement object 7 and the pump light are incident and that generates terahertz wave detection light 9, an interference optical system 11 that multiplexes the terahertz wave detection light and reference light 14 of the same wavelength as the terahertz wave detection light to generate a plurality of interfering light beams 12 having phase relationships different from one another, a plurality of light detectors 13 that detect the interfering light beams, and a signal processing unit 16 that outputs an intensity signal and/or a phase signal of the terahertz waves that have interacted with the measurement object by performing arithmetic operations on the outputs of the plurality of light detectors.

公开(公告)号：US20170010162A1

公开(公告)日：2017-01-12

申请号：US15116331

申请日：2014-09-22

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Nobuhiro SHIRAMIZU

IPC: G01J9/02 ,  G01B9/02

CPC classification number: G01J9/02 ,  G01B9/02041 ,  G01B11/0675 ,  G01N21/3581

Abstract: In order to provide a high-sensitivity terahertz wave phase difference measurement system having a high S/N ratio, terahertz interference waves are observed using a half mirror and a movable reference mirror, and the phase difference is calculated, by a terahertz wave generation/detection device that obtains a high S/N ratio by employing a terahertz wave generator for irradiating a non-linear optical crystal with angular phase-matched pump light and seed light, and a terahertz wave detector for irradiating a non-linear optical crystal with angular phase-matched pump light and terahertz waves. In order to match the optical path length of the pump light and the terahertz waves irrespective of the position of the movable reference mirror and the position of a measured object, a first optical delay device, and a second optical delay device that operates in conjunction with movement of a movable reference mirror of a Michelson interferometer, are introduced on the optical path of the pump light.

Abstract translation: 为了提供具有高S / N比的高灵敏度的太赫兹波相位差测量系统，使用半反射镜和可移动参考反射镜观察太赫兹干涉波，并且通过太赫兹波产生/ 通过采用太赫兹波发生器照射具有角相位匹配泵浦光和种子光的非线性光学晶体获得高S / N比的检测装置，以及用于照射具有角度的非线性光学晶体的太赫兹波检测器 相位匹配的泵浦光和太赫兹波。 为了匹配泵浦光的光路长度和太赫兹波，无论可移动参考反射镜的位置和测量对象的位置如何，第一光学延迟装置和第二光学延迟装置与第 迈克尔逊干涉仪的可移动参考镜的移动被引入泵浦光的光路上。