公开(公告)号：US20180240643A1

公开(公告)日：2018-08-23

申请号：US15554812

申请日：2015-03-25

Applicant: Hitachi High-Technologies Corporation

Inventor： Satoshi TAKADA ,  Naomasa SUZUKI ,  Kazuo AOKI ,  Takehiko KONNO ,  Takayuki HOSHINO

IPC: H01J37/244 ,  H01J37/14 ,  H01J37/28 ,  G01N23/2252

CPC classification number: H01J37/244 ,  G01N23/2252 ,  G01N2223/076 ,  G01N2223/079 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/2445 ,  H01J2237/24485

Abstract: The objective of the present invention is to simultaneously achieve image observations at a high resolution using an electron microscope, and X-ray analysis at a high energy-resolution using a microcalorimeter. An X-ray detector is disposed at a position where the intensity of the magnetic field from an objective lens is weaker than the critical magnetic field of a material used in a thermal insulation shield for a superconducting transition-edge sensor or a microcalorimeter. In addition, an optical system for transmitting X-rays to the detector is inserted between a sample and the detector. Alternatively, a magnetic field shield for shielding the X-ray detector is used.

公开(公告)号：US20150357158A1

公开(公告)日：2015-12-10

申请号：US14760322

申请日：2014-01-22

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Makoto SUZUKI ,  Satoru YAMAGUCHI ,  Kei SAKAI ,  Miki ISAWA ,  Satoshi TAKADA ,  Kazuhisa HASUMI ,  Masami IKOTA

IPC: H01J37/30 ,  H01J37/28

CPC classification number: H01J37/30 ,  H01J37/28 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01J2237/3175

Abstract: An object of the present invention is to provide a method for pattern measurement and a charged particle radiation device in which a pattern formed by using a DSA technique can be very precisely measured and inspected. According to an aspect for achieving the object, a method for pattern measurement or a charged particle radiation device for realizing the measurement is proposed as follows. A charged particle is radiated to a polymer compound used for a self-organization lithography technique, and a specific polymer is considerably contracted as compared to the other polymer among multiple polymers forming the polymer compound. Thereafter, dimensions between multiple edges of the other polymer are measured, based on a signal obtained by scanning a region including the other polymer with the charged particle beam.

Abstract translation: 本发明的目的是提供一种用于图案测量的方法和带电粒子辐射装置，其中可以非常精确地测量和检查使用DSA技术形成的图案。 根据实现该目的的方面，提出了用于图案测量的方法或用于实现测量的带电粒子辐射装置如下。 将带电粒子照射到用于自组织光刻技术的聚合物化合物中，与形成高分子化合物的多种聚合物中的其它聚合物相比，特定聚合物显着收缩。 此后，基于通过用带电粒子束扫描包括其它聚合物的区域而获得的信号来测量另一聚合物的多个边缘之间的尺寸。