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公开(公告)号：US20160154030A1
公开(公告)日：2016-06-02
申请号：US14953113
申请日：2015-11-27
发明人： Sotaro KISHIDA , Ryota NAKAYAMA
CPC分类号： G01R17/02 , G01L1/142 , G01L1/144 , G01L9/0072 , G01L9/12
摘要： The present invention includes a detecting capacitor of which the capacitance is changed depending on pressure; a fixed capacitor having reference capacitance; an initial voltage application part that applies an initial voltage having a predetermined frequency to the detecting capacitor and the fixed capacitor; a first operational amplifier that outputs an output voltage based on a partial voltage applied to at least the detecting capacitor; a reference voltage generation part that generates a reference voltage that serves as a reference for a change in the output voltage of the first operational amplifier and has the same frequency as that of the initial voltage; a second operational amplifier that outputs an output voltage based on the difference between the output voltage of the first operational amplifier and the reference voltage; and a pressure operation part that operates a pressure from the amplitude of the output voltage of the second operational amplifier.
摘要翻译： 本发明包括电容根据压力而变化的检测电容器; 具有参考电容的固定电容器; 初始电压施加部，其向所述检测电容器和所述固定电容器施加具有预定频率的初始电压; 第一运算放大器，其基于施加到至少所述检测电容器的部分电压输出输出电压; 参考电压生成部，其生成用作第一运算放大器的输出电压变化的基准的基准电压，并具有与初始电压相同的频率; 第二运算放大器，其基于所述第一运算放大器的输出电压与所述参考电压之间的差输出输出电压; 以及压力操作部，其操作来自第二运算放大器的输出电压的振幅的压力。
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公开(公告)号：US20160169759A1
公开(公告)日：2016-06-16
申请号：US14892355
申请日：2014-11-25
发明人： Sotaro KISHIDA , Takehisa HATAITA , Akira KUWAHARA
IPC分类号： G01L9/00
CPC分类号： G01L9/0072 , G01L19/0084 , G01L19/04 , G01L19/147
摘要： Provided is a capacitive pressure sensor that prevents the position of an electrode face in the direction parallel to a diaphragm from deviating from the position of the diaphragm, and accurately measures pressure. The capacitive pressure sensor includes: the diaphragm that deforms under pressure; an electrode member having the electrode face opposed to the diaphragm with a gap between the diaphragm and the electrode face; a body having one end to which the diaphragm is joined, and accommodating at least a portion of the electrode member; an insulating positioning member that is provided in the body and positions at least the portion of the electrode member in the body; and a pressing mechanism that holds and presses the insulating positioning member or the electrode member in the direction parallel to the diaphragm.
摘要翻译： 提供了一种电容式压力传感器，其防止电极面在与隔膜平行的方向上的位置偏离隔膜的位置，并且精确地测量压力。 电容式压力传感器包括：压力变形的隔膜; 电极构件，其具有与所述隔膜相对的所述电极面，所述电极面在所述隔膜和所述电极面之间具有间隙; 具有所述隔膜的一端的主体，并且容纳所述电极构件的至少一部分; 绝缘定位构件，其设置在所述主体中并且至少位于所述主体中的所述电极构件的所述部分; 以及按照与隔膜平行的方向保持绝缘定位构件或电极构件的按压机构。
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公开(公告)号：US20160103030A1
公开(公告)日：2016-04-14
申请号：US14894094
申请日：2014-11-25
发明人： Sotaro KISHIDA , Takehisa HATAITA , Akira KUWAHARA
IPC分类号： G01L9/00
CPC分类号： G01L9/0072 , G01L9/0042 , G01L19/0084 , G01L19/04 , G01L19/069
摘要： Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.
摘要翻译： 提供一种电容式压力传感器，其不仅防止温度的变化，而且防止空气中的电磁噪声影响压力的测量值。 在所述电容式压力传感器中，电极构件包括：测量电极，固定到绝缘定位构件并具有电极面; 信号提取电极，固定有密封另一端的绝缘密封件; 以及用于电连接测量电极和信号电极的柔性连接构件。 此外，柔性连接构件容纳在形成在测量电极或信号提取电极中的容纳凹部中。
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公开(公告)号：US20230228677A1
公开(公告)日：2023-07-20
申请号：US18095204
申请日：2023-01-10
发明人： Motonobu TAKAHASHI , Sotaro KISHIDA , Akira KUWAHARA , Takeshi AKAMATSU , Yuhei SAKAGUCHI , Masakazu MINAMI
IPC分类号： G01N21/3504 , G01N33/00 , G01D11/24 , G01D21/02
CPC分类号： G01N21/3504 , G01N33/0027 , G01D11/245 , G01D21/02
摘要： Provided are a gas cell into which a gas is introduced, a temperature control block configured to control a temperature of the gas cell, and a pressure sensor configured to measure a pressure inside the gas cell. The pressure sensor is built into the temperature control block and/or the gas cell.
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公开(公告)号：US20210278303A1
公开(公告)日：2021-09-09
申请号：US17178621
申请日：2021-02-18
发明人： Junya NAKAI , Sotaro KISHIDA
摘要： In a vacuum gauge that controls a temperature of a sensor section to a high temperature, a circuit board can be sufficiently cooled without applying air to the vacuum gauge from outside. The vacuum gauge includes a sensor section that communicates with a measurement space via a connection port and outputs an output signal according to a pressure in the measurement space, a heater provided around the sensor section to heat the sensor section, a circuit board arranged on a side opposite to the connection port with respect to the sensor section, a first inner case that accommodates the sensor section and the heater, a second inner case that accommodates the circuit board, and an outer case that surrounds the first inner case and the second inner case and forms a flow path, through which outside air flows, together with the first inner case and the second inner case.
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