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公开(公告)号：US20190242818A1
公开(公告)日：2019-08-08
申请号：US16333265
申请日：2017-09-14
摘要： Obtained is an absorbance meter capable of, when measuring high-temperature sample gas, without increasing the distance from a light source part to a light receiving part, protecting the light source part and the light receiving part from the heat of the sample gas and keeping measurement accuracy high. A sample accommodation part including an accommodation space for accommodating the sample gas, the light source part for radiating light into the accommodation space, the light receiving part for receiving light exiting from inside the accommodation space, a first insulation part disposed adjacent to the light source part side of the sample accommodation part, a second insulation part disposed adjacent to the light receiving part side of the sample accommodation part, a first cooling part disposed adjacent to the first insulation part, and a second cooling part disposed adjacent to the second insulation part are provided.
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公开(公告)号：US20230417660A1
公开(公告)日：2023-12-28
申请号：US18039316
申请日：2021-11-22
IPC分类号： G01N21/3504 , G01N21/03 , G01N21/39
CPC分类号： G01N21/3504 , G01N21/0332 , G01N21/39 , G01N2201/127
摘要： The present invention is a gas analysis device that measures a concentration or partial pressure of a halide contained in a material gas used in semiconductor manufacturing process or a by-product gas generated in semiconductor manufacturing process with good accuracy, the device being for analyzing a concentration or partial pressure of a halide contained in a material gas used in a semiconductor manufacturing process or a by-product gas generated in a semiconductor manufacturing process, the device including a gas cell into which the material gas or the by-product gas is introduced, a laser light source that irradiates the gas cell with laser light whose wavelength is modulated, a light detector that detects the laser light transmitted through the gas cell, and a signal processing unit that calculates the concentration or partial pressure of the halide by using a light absorption signal obtained from an output signal of the light detector.
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3.发明申请公开(公告)号：US20200340918A1
公开(公告)日：2020-10-29
申请号：US16849381
申请日：2020-04-15
发明人： Toru SHIMIZU , Yuhei SAKAGUCHI , Masakazu MINAMI
IPC分类号： G01N21/61
摘要： In order to make it possible to conduct a zero calibration even though an interference gas exists in a measurement area of a detector, a light absorbance analysis apparatus includes a detector that detects an intensity of light that transmits a gas, a total pressure sensor that measures a total pressure of the gas, an absorbance calculating part that calculates an absorbance based on an output value of the detector and a previously set zero reference value, a partial pressure—absorbance relation storing part that stores a partial pressure—absorbance relational data that indicates a relationship between a partial pressure of an interference gas that exists in a measurement area of the detector and an absorbance calculated by the absorbance calculating part, and a partial pressure calculating part that calculates an interference gas partial pressure as a partial pressure of the interference gas.
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公开(公告)号：US20190161863A1
公开(公告)日：2019-05-30
申请号：US16323119
申请日：2017-07-26
IPC分类号： C23C16/52 , C23C16/448 , H01L21/67 , G05D7/06
摘要： The present invention provides a gas control system which introduces carrier gas into a tank containing a material and leads out material gas generated by vaporization of the material from the tank together with the carrier gas, the gas control system being provided with: a flow rate control unit that is configure to control the flow rate of the material gas led out from the tank by adjusting the flow rate of the carrier gas introduced into the tank; and a control limit detection unit that is configured to detect a control limit state and output detection of the control limit state, the control limit state is a state that the adjustment of the flow rate of the carrier gas performed by the flow rate control unit cannot secure the flow rate control of the material gas at a predetermined performance level.
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公开(公告)号：US20170052115A1
公开(公告)日：2017-02-23
申请号：US15240235
申请日：2016-08-18
CPC分类号： G01N21/05 , G01N21/3504 , G01N2021/0389
摘要： The present invention intends to provide a Cp2Mg concentration measuring device capable of accurately measuring the concentration of Cp2Mg to be supplied to a process chamber without being affected by spontaneous decomposition, and is adapted to measure light intensity in a predetermined wavelength band around 12.8 μm and on the basis of the light intensity, calculate the concentration of Cp2Mg in a material gas.
摘要翻译： 本发明旨在提供一种Cp2Mg浓度测定装置，能够精确地测定供给到处理室的Cp2Mg的浓度，而不受自发分解的影响，适用于测定12.8μm左右的规定波长带的光强度， 光强度的基础，计算材料气体中Cp2Mg的浓度。
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6.发明公开公开(公告)号：US20230228679A1
公开(公告)日：2023-07-20
申请号：US18087006
申请日：2022-12-22
CPC分类号： G01N21/61 , G01N33/0027 , G01N33/007
摘要： In order to prevent cracking of a window material in manufacturing an optical measurement cell that satisfies various performances required for airtightness, heat resistance, and the like by atomic diffusion bonding, an optical measurement cell into which a sample is introduced includes a light transmission window through which light is transmitted, and includes a window material forming the light transmission window, and a flange member to which the window material is bonded via a metal thin film, and a ratio of a thermal expansion coefficient of the flange member to a thermal expansion coefficient of the window material is 0.5 times or more and 1.5 times or less.
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公开(公告)号：US20230228677A1
公开(公告)日：2023-07-20
申请号：US18095204
申请日：2023-01-10
发明人： Motonobu TAKAHASHI , Sotaro KISHIDA , Akira KUWAHARA , Takeshi AKAMATSU , Yuhei SAKAGUCHI , Masakazu MINAMI
IPC分类号： G01N21/3504 , G01N33/00 , G01D11/24 , G01D21/02
CPC分类号： G01N21/3504 , G01N33/0027 , G01D11/245 , G01D21/02
摘要： Provided are a gas cell into which a gas is introduced, a temperature control block configured to control a temperature of the gas cell, and a pressure sensor configured to measure a pressure inside the gas cell. The pressure sensor is built into the temperature control block and/or the gas cell.
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公开(公告)号：US20220307977A1
公开(公告)日：2022-09-29
申请号：US17695167
申请日：2022-03-15
IPC分类号： G01N21/3518
摘要： In order to provide an absorbance analysis apparatus for DCR gas that can measure a concentration of a DCR gas by separating absorbance of the DCR gas alone even in a mixed gas consisting of the DCR gas and CO gas whose absorption spectrum overlaps each other, the absorbance analysis apparatus for DCR gas comprises a DCR filter 31 that is configured to transmit a light in a first wavenumber domain including an absorbance peak of the DCR gas, a CO filter 32 that is configured to transmit a light in a second wavenumber domain that is different from the first wavenumber domain, and a DCR gas volume calculator 4 that is configured to calculate volume of the DCR gas based on a first absorbance measured by the light transmitted through the DCR filter 31 and a second absorbance measured by the light transmitted through the CO filter 32.
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