公开(公告)号：US20040207291A1

公开(公告)日：2004-10-21

申请号：US10826493

申请日：2004-04-16

Applicant: HRL LABORATORIES, LLC.

Inventor： Sarabjit Mehta

IPC: H01L041/08

CPC classification number: H03H9/174 ,  H03H9/176 ,  H03H2009/02196

Abstract: A method for switching a bulk acoustic device is disclosed. The bulk acoustic device has a substrate, a first electrode, a second electrode, and a piezoelectric film between the first and the second electrode. Switching is obtained by controlling the polarization of the piezoelectric. film, through application of a DC voltage difference to the first and second electrodes. Therefore, no additional switches are needed to direct and control the RF signals passing through the device.

Abstract translation: 公开了一种用于切换体声装置的方法。 体音响装置在第一和第二电极之间具有基板，第一电极，第二电极和压电膜。 通过控制压电体的极化来获得切换。 通过向第一和第二电极施加直流电压差而形成薄膜。 因此，不需要额外的开关来引导和控制通过设备的RF信号。

公开(公告)号：US20040075366A1

公开(公告)日：2004-04-22

申请号：US10421327

申请日：2003-04-22

Applicant: HRL LABORATORIES, LLC

Inventor： Sarabjit Mehta

IPC: H02N002/00

CPC classification number: H01H57/00 ,  H01G5/18 ,  H01G5/40 ,  H01H1/0036 ,  H01H59/0009 ,  H01H2057/006 ,  H01L41/094 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/332 ,  Y10T29/42 ,  Y10T29/49105 ,  Y10T29/49107

Abstract: A piezoelectric switch for tunable electronic components comprises piezoelectric layers, metal electrodes alternated with the layers and contact pads. Cross voltages are applied to the electrodes, in order to obtain an S-shaped deformation of the switch and allow contact between the contact pads. Additionally, a further electrode can be provided on a substrate where the switch is fabricated, to allow an additional electrostatic effect during movement of the piezoelectric layers to obtain contact between the contact pads. The overall dimensions of the switch are very small and the required actuation voltage is very low, when compared to existing switches.

Abstract translation: 用于可调谐电子部件的压电开关包括压电层，与层交替的金属电极和接触垫。 交叉电压施加到电极，以便获得开关的S形变形并允许接触焊盘之间的接触。 此外，可以在制造开关的基板上设置另一电极，以在压电层移动期间允许额外的静电效应以获得接触焊盘之间的接触。 与现有开关相比，开关的总体尺寸非常小，所需的致动电压非常低。

公开(公告)号：US20040197526A1

公开(公告)日：2004-10-07

申请号：US10786824

申请日：2004-02-24

Applicant: HRL LABORATORIES, LLC

Inventor： Sarabjit Mehta

IPC: B32B003/00

CPC classification number: B81C1/00158 ,  B81C2201/014 ,  Y10T428/24479 ,  Y10T428/2462

Abstract: A process for fabricating monolithic membrane structures having air gaps is disclosed, comprising the steps of: providing a wafer; depositing and patterning a protective layer on the wafer; providing a trench in the wafer; depositing and patterning a metal in the trench; depositing and patterning a sacrificial layer on the metal; depositing and patterning a membrane pad on the sacrificial layer; providing a polymeric film on the protective layer and sacrificial layer, wherein part of the polymeric film has a tensile stress; and releasing part of the polymeric film from the protective layer and sacrificial layer, wherein the tensile stress of a portion of the polymeric film releases the portion of the polymeric film from the wafer and generates the air gap.

Abstract translation: 公开了一种用于制造具有气隙的整体膜结构的方法，包括以下步骤：提供晶片; 在晶片上沉积和图案化保护层; 在晶片中提供沟槽; 在沟槽中沉积和图案化金属; 在金属上沉积和图案化牺牲层; 在牺牲层上沉积和图案化膜垫; 在保护层和牺牲层上提供聚合物膜，其中聚合物膜的一部分具有拉伸应力; 以及从所述保护层和牺牲层释放所述聚合物膜的一部分，其中所述聚合物膜的一部分的拉伸应力从所述晶片释放所述聚合物膜的所述部分并产生所述气隙。

公开(公告)号：US20040075967A1

公开(公告)日：2004-04-22

申请号：US10421302

申请日：2003-04-22

Applicant: HRL LABORATORIES, LLC

Inventor： Jonathan J. Lynch ,  Sarabjit Mehta ,  John Pasiecznik ,  Peter Petre

IPC: H01G005/00

CPC classification number: H01G5/18 ,  H01G5/015 ,  H01G5/16 ,  H01P5/04 ,  H03J3/20 ,  H03J2200/39

Abstract: A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.

Abstract translation: 公开了一种用于改变电子电路的电容的装置。 该装置包括位于电子电路上方的柔性膜，连接到柔性膜的金属层和位于膜上方的偏置电路。 电子电路的电容的变化是通过利用偏置电路向上拉膜来获得的。 所公开的器件提供相当大的电容变化和高Q因子，导致总体上低的滤波器插入损耗。 也获得了在宽工作带宽上几乎恒定的组延迟。

公开(公告)号：US20040075364A1

公开(公告)日：2004-04-22

申请号：US10421303

申请日：2003-04-22

Applicant: HRL LABORATORIES, LLC

Inventor： Sarabjit Mehta

IPC: H01L041/08

CPC classification number: H01G5/18 ,  H01L41/0933 ,  H01L41/25 ,  H01L41/313 ,  Y10T29/42

Abstract: An actuating assembly for tuning a circuit and a process for forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators are disclosed. The actuating assembly comprises a membrane overlying a circuit to be tuned, a conductive element connected with the membrane, and a piezoelectric arrangement. Changes in shape of the piezoelectric arrangement allow a deflection of the membrane and a corresponding controllable upward or downward movement of the conductive element. In the process, a membrane and a piezoelectric structure are formed on a substrate.

Abstract translation: 公开了一种用于调谐电路的致动组件和用于形成包含膜，导电层和压电致动器的载体衬底的工艺。 致动组件包括覆盖要调谐的电路的膜，与膜连接的导电元件和压电装置。 压电装置的形状变化允许膜的偏转和导电元件的相应可控的向上或向下运动。 在该过程中，在基板上形成膜和压电结构。