CONFIGURABLE MICROMECHANICAL DIFFRACTIVE ELEMENT WITH ANTI STICTION BUMPS
    1.
    发明申请
    CONFIGURABLE MICROMECHANICAL DIFFRACTIVE ELEMENT WITH ANTI STICTION BUMPS 审中-公开
    具有反胶体的可配置的微生物衍射元件

    公开(公告)号:US20120243095A1

    公开(公告)日:2012-09-27

    申请号:US13387473

    申请日:2010-08-13

    IPC分类号: G02B26/00 H01L21/311

    摘要: The invention relates to a micromechanical unit, in particular, an adjustable optical filter, and also a method to manufacture the unit. The unit comprises a first device layer and a second substrate layer at least partially fastened to each other, where the device layer comprises a number of reflecting elements divided between a number of non movable, fixed reflecting elements, where the fixed elements are connected with the substrate, and where a cavity is defined between the substrate and each movable element and each movable element is set up to produce a spring-loaded movement into the cavity, and where a number of dielectric spacer blocks are placed in the cavities between each movable element and the substrate to avoid electric contact between them.

    摘要翻译: 本发明涉及一种微机械单元,特别是涉及一种可调式滤光器,以及一种制造该单元的方法。 该单元包括至少部分地彼此紧固的第一器件层和第二衬底层,其中器件层包括分布在多个不可移动的固定反射元件之间的多个反射元件,其中固定元件与 衬底,并且其中在衬底和每个可移动元件之间限定空腔,并且每个可移动元件被设置成产生弹簧加载的运动到空腔中,并且其中多个介电隔离块被放置在每个可移动元件之间的空腔中 和基板,以避免它们之间的电接触。

    Optical displacement sensor element
    4.
    发明申请
    Optical displacement sensor element 有权
    光学位移传感器元件

    公开(公告)号:US20050018541A1

    公开(公告)日:2005-01-27

    申请号:US10495224

    申请日:2002-11-13

    IPC分类号: G01L9/00 H04R23/00 H04R1/00

    CPC分类号: G01L9/0077 H04R23/008

    摘要: The invention relates an optical displacement sensor element comprising two essentially flat surfaces (1,2) being separated by a cavity defined by a spacer (5) and the surfaces (1,2), the distance between the surfaces being variable, wherein a first of said surfaces (1) is positioned on an at least partially transparent carrier (3) and being provided with a reflective pattern, the pattern constituting a pattern being shaped as a diffractive lens, and said second surface (2) being a reflective surface.

    摘要翻译: 本发明涉及一种光学位移传感器元件,其包括两个基本平坦的表面(1,2),该表面由间隔件(5)和表面(1,2)限定的空腔分开,表面之间的距离是可变的,其中第一 的所述表面(1)位于至少部分透明的载体(3)上并且设置有反射图案,所述图案构成成形为衍射透镜的图案,并且所述第二表面(2)是反射表面。

    Interference Filter
    5.
    发明申请
    Interference Filter 有权
    干扰滤波器

    公开(公告)号:US20080273208A1

    公开(公告)日:2008-11-06

    申请号:US11911627

    申请日:2006-04-03

    IPC分类号: G01N21/35

    CPC分类号: G01N21/3504 G02B5/284

    摘要: This invention relates to an interference filter, especially for use in gas detection with infrared light within a chosen range, comprising at least two essentially parallel and partially reflective surfaces with a chosen distance between them thus defining a cavity delimited by the reflecting surfaces between which the light may oscillate, and wherein at least one of said surfaces is partially transparent for transmission of light to or from said cavity. The filter comprises a first transparent material having a high refractive index, e.g. silicon, positioned in at least a part of said cavity, and at least one of said reflective surfaces being divided into a three dimensional pattern with varying shift relative to its plane, thus to provide a position dependent resonance condition between them for separation of different wavelengths in the light.

    摘要翻译: 本发明涉及一种干涉滤波器,特别是用于在选定范围内的红外光的气体检测中,包括至少两个基本上平行和部分反射的表面,其间具有选定的距离,从而限定由反射表面限定的空腔, 光可以振荡,并且其中至少一个所述表面是部分透明的,用于将光传输到所述空腔或从所述空腔传播。 该过滤器包括具有高折射率的第一透明材料,例如。 硅定位在所述空腔的至少一部分中,并且所述反射表面中的至少一个被分成三维图案,其相对于其平面具有变化的移动,从而提供它们之间的位置相关共振条件,用于分离不同波长 在光中。

    Adjustable Interference Filter
    6.
    发明申请
    Adjustable Interference Filter 审中-公开
    可调干扰滤波器

    公开(公告)号:US20080186566A1

    公开(公告)日:2008-08-07

    申请号:US11911160

    申请日:2006-04-03

    IPC分类号: G02B5/20

    摘要: The present invention relates to an adjustable interference filter, especially for use in gas detection with infrared light within a chosen range, comprising at least two essentially parallel reflective surfaces separated by a chosen distance defining a cavity delimited by the reflective surfaces between which the light may oscillate, and at least one of said surfaces being semitransparent for transmission of light to or from the cavity. The filter comprises a transparent material with a chosen thickness and having a high refractive index positioned in the cavity, and adjustable separation means for adjusting the cavity length between the reflecting surfaces, so as to obtain a cavity constituted by the transparent, high refractive index material and a an adjustable part.

    摘要翻译: 本发明涉及可调干涉滤光器,特别是用于在选定范围内的具有红外光的气体检测中,包括至少两个基本上平行的反射表面,所述至少两个基本平行的反射表面以选定的距离分开,限定由反射表面限定的空腔, 振荡,并且至少一个所述表面是半透明的,用于将光传输到空腔或从空腔传播。 滤光器包括具有选定厚度并且具有位于空腔中的高折射率的透明材料,以及用于调节反射表面之间的空腔长度的可调分离装置,以便获得由透明高折射率材料构成的空腔 和一个可调部分。

    Detector system and method to detect or determine a specific gas within a gas mixture
    7.
    发明授权
    Detector system and method to detect or determine a specific gas within a gas mixture 有权
    用于检测或确定气体混合物中特定气体的检测器系统和方法

    公开(公告)号:US08373568B2

    公开(公告)日:2013-02-12

    申请号:US12668479

    申请日:2008-07-16

    IPC分类号: G08B17/10 G01N7/00

    摘要: To achieve gas detection in a precise and reliable way, but at the same time without consuming too much energy, a gas detection system is provided which generally comprises a pair of two different gas detectors. The first detector (DLP) is active continuously and sense substantially for an unspecific change in the local gas mixture. As a reaction upon the change, the second detector (DHP) of the pair is activated. This detector (DHP) performs the determination of the concentration of a specific gas or several specific gasses. The second detector (DHP) may be of a type which consumes more power, but will be active for a short period of time before returning to an inactive state where only the first detector (DLP) is active. The first detector (DLP) however is of a type using little power.

    摘要翻译: 为了以精确可靠的方式实现气体检测,同时不消耗太多的能量,提供了一种通常包括一对两种不同气体检测器的气体检测系统。 第一检测器(DLP)连续有效并且基本上感测到局部气体混合物中的非特异性变化。 作为变化的反应,该对的第二检测器(DHP)被激活。 该检测器(DHP)可以确定特定气体或几种特定气体的浓度。 第二检测器(DHP)可以是消耗更多功率的类型,但是在返回到只有第一检测器(DLP)有效的无效状态之前,它将在短时间段内被激活。 然而,第一检测器(DLP)是使用少量功率的类型。

    Detector System and Method to Detect or Determine a Specific Gas Within a Gas Mixture
    8.
    发明申请
    Detector System and Method to Detect or Determine a Specific Gas Within a Gas Mixture 有权
    检测器系统和检测或确定气体混合物中特定气体的方法

    公开(公告)号:US20100219960A1

    公开(公告)日:2010-09-02

    申请号:US12668479

    申请日:2008-07-16

    摘要: To achieve gas detection in a precise and reliable way, but at the same time without consuming too much energy, a gas detection system is provided which generally comprises a pair of two different gas detectors. The first detector (DLP) is active continuously and sense substantially for an unspecific change in the local gas mixture. As a reaction upon the change, the second detector (DHP) of the pair is activated. This detector (DHP) performs the determination of the concentration of a specific gas or several specific gasses. The second detector (DHP) may be of a type which consumes more power, but will be active for a short period of time before returning to an inactive state where only the first detector (DLP) is active. The first detector (DLP) however is of a type using little power.

    摘要翻译: 为了以精确可靠的方式实现气体检测,同时不消耗太多的能量,提供了一种通常包括一对两种不同气体检测器的气体检测系统。 第一检测器(DLP)连续有效并且基本上感测到局部气体混合物中的非特异性变化。 作为变化的反应,该对的第二检测器(DHP)被激活。 该检测器(DHP)可以确定特定气体或几种特定气体的浓度。 第二检测器(DHP)可以是消耗更多功率的类型,但是在返回到只有第一检测器(DLP)有效的无效状态之前,它将在短时间段内被激活。 然而,第一检测器(DLP)是使用少量功率的类型。