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1.发明授权Method for manufacturing a magnetic read sensor with narrow track width using amorphous carbon as a hard mask and localized CMP 有权使用无定形碳作为硬掩模和局部化CMP制造具有窄轨道宽度的磁读取传感器的方法公开(公告)号：US08617408B2
公开(公告)日：2013-12-31
申请号：US13275728
申请日：2011-10-18
申请人： Hamid Balamane , Patrick M. Braganca , Jordan A. Katine , Jui-Lung Li , Yang Li , Kanaiyalal C. Patel , Neil L. Robertson , Samuel W. Yuan
发明人： Hamid Balamane , Patrick M. Braganca , Jordan A. Katine , Jui-Lung Li , Yang Li , Kanaiyalal C. Patel , Neil L. Robertson , Samuel W. Yuan
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G01R33/093 , G11B5/3169 , G11B5/398
摘要： A method for manufacturing a magnetic read sensor at very narrow track widths. The method uses an amorphous carbon mask layer to pattern the sensor by ion milling, rather than a mask constructed of a material such as photoresist or DURIMIDE® which can bend over during ion milling at very narrow track widths. By using the amorphous carbon layer as the masking layer, the trackwidth can be very small, while avoiding this bending over of the mask that has been experienced with prior art methods. In addition, the track-width can be further reduced by using a reactive ion etching to further reduce the width of the amorphous carbon mask prior to patterning the sensor. The method also allows extraneous portions of the side insulation layer and hard bias layer to be removed above the sensor by a light CMP process.
摘要翻译： 一种以非常窄的轨道宽度制造磁读取传感器的方法。 该方法使用无定形碳掩模层通过离子研磨对传感器进行图案化，而不是由诸如光致抗蚀剂或DURIMIDE的材料构成的掩模，其可以在非常窄的轨道宽度的离子铣削过程中弯曲。 通过使用无定形碳层作为掩蔽层，轨道宽度可以非常小，同时避免了现有技术方法经历的掩模的弯曲。 此外，通过使用反应离子蚀刻，在图案化传感器之前进一步减小无定形碳掩模的宽度，可以进一步减小轨道宽度。 该方法还允许通过光CMP工艺在传感器上方去除侧绝缘层和硬偏置层的外部部分。
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2.发明申请METHOD FOR MANUFACTURING A MAGNETIC READ SENSOR WITH NARROW TRACK WIDTH USING AMORPHOUS CARBON AS A HARD MASK AND LOCALIZED CMP 有权使用非晶碳作为硬掩模和本地化CMP制造具有窄轨迹宽度的磁性读数传感器的方法公开(公告)号：US20130092654A1
公开(公告)日：2013-04-18
申请号：US13275728
申请日：2011-10-18
申请人： Hamid Balamane , Patrick M. Braganca , Jordan A. Katine , Jui-Lung Li , Yang Li , Kanaiyalal C. Patel , Neil L. Robertson , Samuel W. Yuan
发明人： Hamid Balamane , Patrick M. Braganca , Jordan A. Katine , Jui-Lung Li , Yang Li , Kanaiyalal C. Patel , Neil L. Robertson , Samuel W. Yuan
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G01R33/093 , G11B5/3169 , G11B5/398
摘要： A method for manufacturing a magnetic read sensor at very narrow track widths. The method uses an amorphous carbon mask layer to pattern the sensor by ion milling, rather than a mask constructed of a material such as photoresist or DURIMIDE® which can bend over during ion milling at very narrow track widths. By using the amorphous carbon layer as the masking layer, the trackwidth can be very small, while avoiding this bending over of the mask that has been experienced with prior art methods. In addition, the track-width can be further reduced by using a reactive ion etching to further reduce the width of the amorphous carbon mask prior to patterning the sensor. The method also allows extraneous portions of the side insulation layer and hard bias layer to be removed above the sensor by a light CMP process.
摘要翻译： 一种以非常窄的轨道宽度制造磁读取传感器的方法。 该方法使用无定形碳掩模层通过离子研磨对传感器进行图案化，而不是由诸如光致抗蚀剂或DURIMIDE的材料构成的掩模，其可以在非常窄的轨道宽度的离子铣削过程中弯曲。 通过使用无定形碳层作为掩蔽层，轨道宽度可以非常小，同时避免了现有技术方法经历的掩模的弯曲。 此外，通过使用反应离子蚀刻，在图案化传感器之前进一步减小无定形碳掩模的宽度，可以进一步减小轨道宽度。 该方法还允许通过光CMP工艺在传感器上方去除侧绝缘层和硬偏置层的外部部分。
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公开(公告)号：US08432644B2
公开(公告)日：2013-04-30
申请号：US12884080
申请日：2010-09-16
IPC分类号： G11B5/39
CPC分类号： G11B5/3903 , G01R33/098 , G01R33/1284 , H01L43/08
摘要： A spin torque oscillator device having a magnetic free layer with a magnetic anisotropy that has a component that is oriented perpendicular to a direction of an applied magnetic field. The spin torque oscillator device includes a magnetic reference layer, a magnetic free layer and a non-magnetic layer sandwiched there-between. A component of the magnetic anisotropy of the free layer can be oriented perpendicular to a magnetization of the reference layer, and this orientation relative to the magnetization of the reference layer can be either in lieu of or in addition to its orientation relative to the applied magnetic field. The magnetic anisotropy cants the magnetization of the free layer which would otherwise be oriented antiparallel with the magnetization of the reference layer. The magnetic anisotropy in the free layer improves performance of the spin torque sensor by reducing noise.
摘要翻译： 具有具有磁各向异性的磁性自由层的自旋扭矩振荡器装置，其具有垂直于施加的磁场方向取向的分量。 自旋扭矩振荡器装置包括磁性参考层，无磁性层和夹在其间的非磁性层。 自由层的磁各向异性的分量可以垂直于参考层的磁化取向，并且相对于参考层的磁化的这种取向可以代替或除了其相对于所施加的磁性的取向 领域。 磁各向异性可以使自由层的磁化强度反而与参考层的磁化反平行。 自由层中的磁各向异性通过降低噪声提高了自旋转矩传感器的性能。
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公开(公告)号：US20110007431A1
公开(公告)日：2011-01-13
申请号：US12884080
申请日：2010-09-16
IPC分类号： G11B5/127
CPC分类号： G11B5/3903 , G01R33/098 , G01R33/1284 , H01L43/08
摘要： A spin torque oscillator device having a magnetic free layer with a magnetic anisotropy that has a component that is oriented perpendicular to a direction of an applied magnetic field. The spin torque oscillator device includes a magnetic reference layer, a magnetic free layer and a non-magnetic layer sandwiched there-between. A component of the magnetic anisotropy of the free layer can be oriented perpendicular to a magnetization of the reference layer, and this orientation relative to the magnetization of the reference layer can be either in lieu of or in addition to its orientation relative to the applied magnetic field. The magnetic anisotropy cants the magnetization of the free layer which would otherwise be oriented antiparallel with the magnetization of the reference layer. The magnetic anisotropy in the free layer improves performance of the spin torque sensor by reducing noise.
摘要翻译： 具有具有磁各向异性的磁性自由层的自旋扭矩振荡器装置，其具有垂直于施加的磁场方向取向的分量。 自旋扭矩振荡器装置包括磁性参考层，无磁性层和夹在其间的非磁性层。 自由层的磁各向异性的分量可以垂直于参考层的磁化取向，并且相对于参考层的磁化的该取向可以代替或除了其相对于所施加的磁性的取向 领域。 磁各向异性可以使自由层的磁化强度反而与参考层的磁化反平行。 自由层中的磁各向异性通过降低噪声提高了自旋转矩传感器的性能。
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5.发明授权Spin torque oscillator sensor employing antiparallel coupled oscilation layers 有权采用反平行耦合振荡层的旋转扭矩振荡器传感器公开(公告)号：US08164861B2
公开(公告)日：2012-04-24
申请号：US12636108
申请日：2009-12-11
IPC分类号： G11B5/39
CPC分类号： G11B5/3903 , B82Y25/00 , G01R33/1284 , G11B5/332 , H01F10/3254 , H01F10/3272 , H01F10/329 , H01L43/08
摘要： A spin torque magnetoresistive sensor having a very small gap thickness. The sensor operates by measuring the change in frequency of a spin torque induced magnetic oscillation in magnetic layers of the sensor to detect the presence of a magnetic field. The sensor includes a pair of free magnetic layers that are antiparallel coupled by a thin non-magnetic coupling layer there-between. The sensor does not include a pinned layer structure nor an associated AFM pinning layer, which allows the sensor to be constructed much thinner than prior art sensors.
摘要翻译： 具有非常小间隙厚度的自旋扭矩磁阻传感器。 传感器通过测量传感器的磁层中的自旋转矩感应磁振荡的频率变化来检测磁场的存在来进行操作。 传感器包括一对自由磁性层，它们之间由薄的非磁性耦合层反平行耦合。 传感器不包括钉扎层结构和相关联的AFM钉扎层，这允许传感器构造得比现有技术传感器薄得多。
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6.发明申请SPIN TORQUE OSCILLATOR SENSOR EMPLOYING ANTIPARALLEL COUPLED OSCILATION LAYERS 有权旋转扭矩振荡器传感器采用反极化耦合振荡层公开(公告)号：US20110141629A1
公开(公告)日：2011-06-16
申请号：US12636108
申请日：2009-12-11
IPC分类号： G11B5/33
CPC分类号： G11B5/3903 , B82Y25/00 , G01R33/1284 , G11B5/332 , H01F10/3254 , H01F10/3272 , H01F10/329 , H01L43/08
摘要： A spin torque magnetoresistive sensor having a very small gap thickness. The sensor operates by measuring the change in frequency of a spin torque induced magnetic oscillation in magnetic layers of the sensor to detect the presence of a magnetic field. The sensor includes a pair of free magnetic layers that are antiparallel coupled by a thin non-magnetic coupling layer there-between. The sensor does not include a pinned layer structure nor an associated AFM pinning layer, which allows the sensor to be constructed much thinner than prior art sensors.
摘要翻译： 具有非常小间隙厚度的自旋扭矩磁阻传感器。 传感器通过测量传感器的磁层中的自旋转矩感应磁振荡的频率变化来检测磁场的存在来进行操作。 传感器包括一对自由磁性层，它们之间由薄的非磁性耦合层反平行耦合。 传感器不包括钉扎层结构和相关联的AFM钉扎层，这允许传感器构造得比现有技术传感器薄得多。
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