SENSOR ASSEMBLY
    2.
    发明申请
    SENSOR ASSEMBLY 有权
    传感器总成

    公开(公告)号:US20130315036A1

    公开(公告)日:2013-11-28

    申请号:US13479099

    申请日:2012-05-23

    IPC分类号: G01V1/20

    摘要: A multiple axis sensor assembly includes an enclosure and encapsulated microelectromechanical system (MEMS) sensors. The encapsulated sensors are disposed inside the enclosure and are mounted in different orientations, which correspond to different axes of the sensor assembly. A controller of the sensor assembly is disposed in the enclosure and electrically coupled to the MEMS sensors.

    摘要翻译: 多轴传感器组件包括外壳和封装的微机电系统(MEMS)传感器。 封装的传感器设置在外壳内并且以不同的方向安装,其对应于传感器组件的不同轴线。 传感器组件的控制器设置在外壳中并电耦合到MEMS传感器。

    Method and apparatus to test an accelerometer
    4.
    发明授权
    Method and apparatus to test an accelerometer 有权
    测试加速度计的方法和装置

    公开(公告)号:US09010170B2

    公开(公告)日:2015-04-21

    申请号:US13166618

    申请日:2011-06-22

    摘要: A technique includes using an accelerometer to provide an output signal indicative of an acceleration experienced by a movable mass of a sensor of the accelerometer. The technique includes testing the accelerometer, and the testing includes using a closed loop including the sensor to provide the output signal of the accelerometer; injecting a test signal into the loop between an output terminal of the sensor and an output terminal of the accelerometer; and indicating a performance of the accelerometer based on a response of the accelerometer to the injection of the test signal.

    摘要翻译: 一种技术包括使用加速度计来提供指示加速度计的传感器的可移动质量所经历的加速度的输出信号。 该技术包括测试加速度计,并且测试包括使用包括传感器的闭环来提供加速度计的输出信号; 将测试信号注入到传感器的输出端和加速度计的输出端之间的环路中; 并且基于加速度计对测试信号的注入的响应来指示加速度计的性能。

    MEMS-based capacitive sensor
    6.
    发明授权
    MEMS-based capacitive sensor 有权
    基于MEMS的电容式传感器

    公开(公告)号:US08104346B2

    公开(公告)日:2012-01-31

    申请号:US12268064

    申请日:2008-11-10

    申请人: Hans Paulson

    发明人: Hans Paulson

    IPC分类号: G01P15/125

    摘要: An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically connected to the proof mass to provide a second signal. The first signal, which is regulated by the controller, controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal. The charge amplifier provides a third signal, which is indicative of a position of the proof mass. The charge amplifier has an input terminal to continuously receive the second signal during a time in which the first signal controls the equilibrium restoring force and causes the sensor to provide the second signal.

    摘要翻译: 一种装置包括包括加速度计的地震采集系统。 加速度计包括基于电容的MEMS传感器,控制器和电荷放大器。 该传感器包括一个检测质量块; 输入端子接收第一信号; 以及输出端子,其电连接到所述检验质量块以提供第二信号。 由控制器调节的第一个信号控制传感器的平衡恢复力,并使传感器提供第二个信号。 电荷放大器提供第三信号,其表示证明质量的位置。 电荷放大器具有输入端子,以在第一信号控制平衡恢复力并使传感器提供第二信号的时间期间连续接收第二信号。

    MEMS-BASED CAPACITIVE SENSOR FOR USE IN A SEISMIC ACQUISITION SYSTEM
    7.
    发明申请
    MEMS-BASED CAPACITIVE SENSOR FOR USE IN A SEISMIC ACQUISITION SYSTEM 有权
    基于MEMS的电容式传感器,用于地震采集系统

    公开(公告)号:US20100116054A1

    公开(公告)日:2010-05-13

    申请号:US12268064

    申请日:2008-11-10

    申请人: Hans Paulson

    发明人: Hans Paulson

    IPC分类号: G01P15/125 H03M3/02

    摘要: An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically connected to the proof mass to provide a second signal. The first signal, which is regulated by the controller, controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal. The charge amplifier provides a third signal, which is indicative of a position of the proof mass. The charge amplifier has an input terminal to continuously receive the second signal during a time in which the first signal controls the equilibrium restoring force and causes the sensor to provide the second signal

    摘要翻译: 一种装置包括包括加速度计的地震采集系统。 加速度计包括基于电容的MEMS传感器,控制器和电荷放大器。 该传感器包括一个检测质量块; 输入端子接收第一信号; 以及输出端子,其电连接到所述检验质量块以提供第二信号。 由控制器调节的第一个信号控制传感器的平衡恢复力,并使传感器提供第二个信号。 电荷放大器提供第三信号,其表示证明质量的位置。 电荷放大器具有输入端子,用于在第一信号控制平衡恢复力的时间期间连续接收第二信号,并使传感器提供第二信号