公开(公告)号：US20080007376A1

公开(公告)日：2008-01-10

申请号：US11711057

申请日：2007-02-27

申请人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul KO ,  Hyun-ku Jeong

发明人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul KO ,  Hyun-ku Jeong

IPC分类号： H01F7/08 ,  G01R27/26

CPC分类号： G02B26/085 ,  H01F7/066 ,  H01F2007/068

摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

摘要翻译： 提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。 因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

公开(公告)号：US07750767B2

公开(公告)日：2010-07-06

申请号：US11711057

申请日：2007-02-27

申请人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul Ko ,  Hyun-ku Jeong

发明人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul Ko ,  Hyun-ku Jeong

IPC分类号： H01H51/22

CPC分类号： G02B26/085 ,  H01F7/066 ,  H01F2007/068

摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

摘要翻译： 提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。 因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

公开(公告)号：US20060023994A1

公开(公告)日：2006-02-02

申请号：US11136392

申请日：2005-05-25

申请人： Young-chul Ko ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： G02B6/26

CPC分类号： G02B6/357 ,  G02B6/3518 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841

摘要： A dual comb electrode structure with spacing for increasing a driving angle of a micro mirror provided by MEMS (Micro-Electro-Mechanical system) structure and a microscanner adopting the same are provided. The dual comb electrode structure includes: a mirror unit for reflecting light; a plurality of movable comb electrodes protruded in both sides of the mirror unit; and a plurality of upper and lower static comb electrodes formed above and below the movable comb electrode so as to be alternated with the plurality of movable comb electrodes formed in both sides of the mirror unit, wherein a spacing between the upper static comb electrode and the movable comb electrode is different from a spacing between the lower static comb electrode and the movable comb electrode.

摘要翻译： 提供了一种具有用于增加由MEMS（微机电系统）结构提供的微反射镜的驱动角度的间隔的双梳电极结构和采用其的微机。 双梳电极结构包括：用于反射光的反射镜单元; 在所述反射镜单元的两侧突出的多个可动梳状电极; 以及形成在可动梳状电极上方和下方的多个上部和下部静态梳状电极，以便与形成在反射镜单元两侧的多个可动梳状电极交替，其中上部静态梳状电极和 活动梳状电极与下部静态梳状电极和可动梳状电极之间的间隔不同。

公开(公告)号：US20060268383A1

公开(公告)日：2006-11-30

申请号：US11387958

申请日：2006-03-24

申请人： Jin-woo Cho ,  Young-chul Ko ,  Jin-ho Lee ,  Hyun-ku Jeong

发明人： Jin-woo Cho ,  Young-chul Ko ,  Jin-ho Lee ,  Hyun-ku Jeong

IPC分类号： G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： G02B26/0841 ,  H02N1/008

摘要： Optical scanners having a multi-layered comb electrode structure and methods to increase driving force and angle are provided. The optical scanner includes: a stage which performs a seesaw motion in a first direction; a support unit which supports the seesaw motion of the stage; and a stage driving unit including driving comb electrodes extending outward from opposite sides of the stage in the first direction and fixed comb electrodes extending from the support unit facing the driving comb electrodes such that the driving comb electrodes and the fixed comb electrodes alternate with each other. Each of the stage, the support unit, and the stage driving unit is made of a plurality of conductive layers and insulation layers between the conductive layers.

摘要翻译： 提供具有多层梳状电极结构的光学扫描器和增加驱动力和角度的方法。 光学扫描器包括：在第一方向上执行跷跷板运动的平台; 支撑台架的跷跷板运动的支撑单元; 以及舞台驱动单元，其包括从第一方向的舞台的相对侧向外延伸的驱动梳状电极和从支撑单元向着驱动梳状电极延伸的固定梳状电极，使得驱动梳状电极和固定梳状电极彼此交替 。 舞台，支撑单元和舞台驱动单元中的每一个由导电层之间的多个导电层和绝缘层制成。

公开(公告)号：US20060082250A1

公开(公告)日：2006-04-20

申请号：US11248169

申请日：2005-10-13

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： H02N1/008 ,  G02B26/0841

摘要： Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.

摘要翻译： 提供双轴致动器及其制造方法。 双轴致动器包括：在第一方向上跷跷板的台架单元; 支撑舞台单元的第一支撑单元; 舞台单元驱动单元，包括从第一方向上的舞台单元的相对侧向外延伸的第一驱动梳状电极和从第一支撑单元延伸到第一驱动梳状电极的第一固定梳状电极，使得第一驱动和固定梳状电极 互相交替; 第二支撑单元，其支撑所述第一支撑单元，使得所述第一支撑单元在垂直于所述第一方向的第二方向上跷跷板; 以及第一支撑单元驱动单元，包括安装在第一支撑单元处的第二驱动梳状电极和与第二驱动梳状电极相对应的第二固定梳状电极，其中第一和第二驱动梳状电极和平台单元形成在第一级 并且第一和第二固定梳电极形成在比第一电平低的第二电平处，使得第一和第二固定梳电极在垂直平面处不与第一和第二驱动梳电极重叠。

公开(公告)号：US07508111B2

公开(公告)日：2009-03-24

申请号：US11248169

申请日：2005-10-13

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： H02N1/00 ,  G02B26/08

CPC分类号： H02N1/008 ,  G02B26/0841

摘要： Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.

摘要翻译： 提供双轴致动器及其制造方法。 双轴致动器包括：在第一方向上跷跷板的平台单元; 支撑舞台单元的第一支撑单元; 舞台单元驱动单元，包括从第一方向上的舞台单元的相对侧向外延伸的第一驱动梳状电极和从第一支撑单元延伸到第一驱动梳状电极的第一固定梳状电极，使得第一驱动和固定梳状电极 互相交替; 第二支撑单元，其支撑所述第一支撑单元，使得所述第一支撑单元在垂直于所述第一方向的第二方向上跷跷板; 以及第一支撑单元驱动单元，包括安装在第一支撑单元处的第二驱动梳状电极和与第二驱动梳状电极相对应的第二固定梳状电极，其中第一和第二驱动梳状电极和平台单元形成在第一级 并且第一和第二固定梳电极形成在比第一电平低的第二电平处，使得第一和第二固定梳电极在垂直平面处不与第一和第二驱动梳电极重叠。

公开(公告)号：US07257286B2

公开(公告)日：2007-08-14

申请号：US11136392

申请日：2005-05-25

申请人： Young-chul Ko ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： G02B6/35 ,  G02B26/10

CPC分类号： G02B6/357 ,  G02B6/3518 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841

摘要： A dual comb electrode structure with spacing for increasing a driving angle of a micro mirror provided by MEMS (Micro-Electro-Mechanical system) structure and a microscanner adopting the same are provided. The dual comb electrode structure includes: a mirror unit for reflecting light; a plurality of movable comb electrodes protruded in both sides of the mirror unit; and a plurality of upper and lower static comb electrodes formed above and below the movable comb electrode so as to be alternated with the plurality of movable comb electrodes formed in both sides of the mirror unit, wherein a spacing between the upper static comb electrode and the movable comb electrode is different from a spacing between the lower static comb electrode and the movable comb electrode.

摘要翻译： 提供了一种具有用于增加由MEMS（微机电系统）结构提供的微反射镜的驱动角度的间隔的双梳电极结构和采用其的微机。 双梳电极结构包括：用于反射光的反射镜单元; 在所述反射镜单元的两侧突出的多个可动梳状电极; 以及形成在可动梳状电极上方和下方的多个上部和下部静态梳状电极，以便与形成在反射镜单元两侧的多个可动梳状电极交替，其中上部静态梳状电极和 活动梳状电极与下部静态梳状电极和可动梳状电极之间的间隔不同。

公开(公告)号：US07369298B2

公开(公告)日：2008-05-06

申请号：US11147344

申请日：2005-06-08

申请人： Jin-ho Lee ,  Young-chul Ko ,  Hyun-ku Jeong

发明人： Jin-ho Lee ,  Young-chul Ko ,  Hyun-ku Jeong

IPC分类号： A61B26/00 ,  A61B26/08

CPC分类号： G02B26/105 ,  G02B26/0841 ,  H04N9/3129

摘要： Provided are an optical scanner including a micro-mirror having an improved a driving angle by using a micro-electro-mechanical system (MEMS) technique and a laser image projector using the same are provided. The optical scanner includes: a substrate; a mirror unit suspended over the substrate and spaced apart from the substrate by a predetermined distance; a supporter situated on the substrate and supporting both ends of the mirror unit so that the mirror unit is suspended over the substrate; a supporting axis connected between both ends of the mirror unit and the supporter so that the mirror unit can be rotatably supported by the supporter; a plurality of movable comb electrodes vertically formed on both sides of the mirror unit; and a plurality of static comb electrodes vertically formed on the substrate in such a way that the static comb electrodes alternate with the movable comb electrodes, wherein the static comb electrode is a two-layer structured electrode.

摘要翻译： 提供了一种包括通过使用微机电系统（MEMS）技术具有改进的驱动角度的微反射镜的光学扫描器，并且提供了使用其的激光图像投影仪。 光学扫描器包括：基板; 镜子单元悬挂在基板上并与基板隔开预定距离; 支撑体，其位于所述基板上并且支撑所述反射镜单元的两端，使得所述反射镜单元悬挂在所述基板上; 连接在反射镜单元的两端和支撑体之间的支撑轴，使得反射镜单元能够被支撑件可旋转地支撑; 多个可动梳状电极，垂直地形成在反射镜单元的两侧; 以及多个静电梳电极，其以所述静电梳电极与所述可动梳电极交替的方式垂直地形成在所述基板上，其中所述静电梳电极为双层结构电极。

公开(公告)号：US07348535B2

公开(公告)日：2008-03-25

申请号：US11354014

申请日：2006-02-15

申请人： Hyun-ku Jeong ,  Won-joo Kim ,  Young-chul Ko

发明人： Hyun-ku Jeong ,  Won-joo Kim ,  Young-chul Ko

IPC分类号： H01J40/14 ,  H01L21/30

CPC分类号： G02B26/0841

摘要： A metal line structure of an optical scanner and a method of fabricating the same are provided. The metal line structure of the optical scanner includes: a glass substrate having a metal line region etched to a predetermined depth; a metal line formed in the metal line region; a diffusion barrier layer that is formed on the glass substrate and covers the metal line; and an optical scanner structure combined with the glass substrate.

摘要翻译： 提供了一种光学扫描仪的金属线结构及其制造方法。 光学扫描器的金属线结构包括：具有蚀刻到预定深度的金属线区域的玻璃基板; 形成在金属线区域中的金属线; 扩散阻挡层，其形成在所述玻璃基板上并覆盖所述金属线; 以及与玻璃基板结合的光学扫描器结构。

公开(公告)号：US20070128824A1

公开(公告)日：2007-06-07

申请号：US11528619

申请日：2006-09-28

申请人： Young-chul Ko ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Hyun-ku Jeong

IPC分类号： H01L21/76 ,  H01L21/302

CPC分类号： B81C1/00547 ,  B81B2201/033

摘要： A double-sided etching method using an embedded alignment mark includes: preparing a substrate having first and second alignment marks embedded in an intermediate portion thereof; etching an upper portion of the substrate so as to expose the first alignment mark from a first surface of the substrate; etching the upper portion of the substrate using the exposed first alignment mark; etching a lower portion of the substrate so as to expose the second alignment mark from a second surface of the substrate; and etching the lower portion of the substrate using the exposed second alignment mark.

摘要翻译： 使用嵌入对准标记的双面蚀刻方法包括：准备具有嵌入其中间部分中的第一和第二对准标记的基板; 蚀刻所述基板的上部以便从所述基板的第一表面露出所述第一对准标记; 使用暴露的第一对准标记蚀刻衬底的上部; 蚀刻所述基板的下部以便从所述基板的第二表面露出所述第二对准标记; 并使用暴露的第二对准标记蚀刻衬底的下部。