公开(公告)号：US20080007376A1

公开(公告)日：2008-01-10

申请号：US11711057

申请日：2007-02-27

申请人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul KO ,  Hyun-ku Jeong

发明人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul KO ,  Hyun-ku Jeong

IPC分类号： H01F7/08 ,  G01R27/26

CPC分类号： G02B26/085 ,  H01F7/066 ,  H01F2007/068

摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

摘要翻译： 提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。 因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

公开(公告)号：US07750767B2

公开(公告)日：2010-07-06

申请号：US11711057

申请日：2007-02-27

申请人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul Ko ,  Hyun-ku Jeong

发明人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul Ko ,  Hyun-ku Jeong

IPC分类号： H01H51/22

CPC分类号： G02B26/085 ,  H01F7/066 ,  H01F2007/068

摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

摘要翻译： 提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。 因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

公开(公告)号：US20060082250A1

公开(公告)日：2006-04-20

申请号：US11248169

申请日：2005-10-13

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： H02N1/008 ,  G02B26/0841

摘要： Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.

摘要翻译： 提供双轴致动器及其制造方法。 双轴致动器包括：在第一方向上跷跷板的台架单元; 支撑舞台单元的第一支撑单元; 舞台单元驱动单元，包括从第一方向上的舞台单元的相对侧向外延伸的第一驱动梳状电极和从第一支撑单元延伸到第一驱动梳状电极的第一固定梳状电极，使得第一驱动和固定梳状电极 互相交替; 第二支撑单元，其支撑所述第一支撑单元，使得所述第一支撑单元在垂直于所述第一方向的第二方向上跷跷板; 以及第一支撑单元驱动单元，包括安装在第一支撑单元处的第二驱动梳状电极和与第二驱动梳状电极相对应的第二固定梳状电极，其中第一和第二驱动梳状电极和平台单元形成在第一级 并且第一和第二固定梳电极形成在比第一电平低的第二电平处，使得第一和第二固定梳电极在垂直平面处不与第一和第二驱动梳电极重叠。

公开(公告)号：US20060023994A1

公开(公告)日：2006-02-02

申请号：US11136392

申请日：2005-05-25

申请人： Young-chul Ko ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： G02B6/26

CPC分类号： G02B6/357 ,  G02B6/3518 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841

摘要： A dual comb electrode structure with spacing for increasing a driving angle of a micro mirror provided by MEMS (Micro-Electro-Mechanical system) structure and a microscanner adopting the same are provided. The dual comb electrode structure includes: a mirror unit for reflecting light; a plurality of movable comb electrodes protruded in both sides of the mirror unit; and a plurality of upper and lower static comb electrodes formed above and below the movable comb electrode so as to be alternated with the plurality of movable comb electrodes formed in both sides of the mirror unit, wherein a spacing between the upper static comb electrode and the movable comb electrode is different from a spacing between the lower static comb electrode and the movable comb electrode.

摘要翻译： 提供了一种具有用于增加由MEMS（微机电系统）结构提供的微反射镜的驱动角度的间隔的双梳电极结构和采用其的微机。 双梳电极结构包括：用于反射光的反射镜单元; 在所述反射镜单元的两侧突出的多个可动梳状电极; 以及形成在可动梳状电极上方和下方的多个上部和下部静态梳状电极，以便与形成在反射镜单元两侧的多个可动梳状电极交替，其中上部静态梳状电极和 活动梳状电极与下部静态梳状电极和可动梳状电极之间的间隔不同。

公开(公告)号：US20060268383A1

公开(公告)日：2006-11-30

申请号：US11387958

申请日：2006-03-24

申请人： Jin-woo Cho ,  Young-chul Ko ,  Jin-ho Lee ,  Hyun-ku Jeong

发明人： Jin-woo Cho ,  Young-chul Ko ,  Jin-ho Lee ,  Hyun-ku Jeong

IPC分类号： G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： G02B26/0841 ,  H02N1/008

摘要： Optical scanners having a multi-layered comb electrode structure and methods to increase driving force and angle are provided. The optical scanner includes: a stage which performs a seesaw motion in a first direction; a support unit which supports the seesaw motion of the stage; and a stage driving unit including driving comb electrodes extending outward from opposite sides of the stage in the first direction and fixed comb electrodes extending from the support unit facing the driving comb electrodes such that the driving comb electrodes and the fixed comb electrodes alternate with each other. Each of the stage, the support unit, and the stage driving unit is made of a plurality of conductive layers and insulation layers between the conductive layers.

摘要翻译： 提供具有多层梳状电极结构的光学扫描器和增加驱动力和角度的方法。 光学扫描器包括：在第一方向上执行跷跷板运动的平台; 支撑台架的跷跷板运动的支撑单元; 以及舞台驱动单元，其包括从第一方向的舞台的相对侧向外延伸的驱动梳状电极和从支撑单元向着驱动梳状电极延伸的固定梳状电极，使得驱动梳状电极和固定梳状电极彼此交替 。 舞台，支撑单元和舞台驱动单元中的每一个由导电层之间的多个导电层和绝缘层制成。

公开(公告)号：US07508111B2

公开(公告)日：2009-03-24

申请号：US11248169

申请日：2005-10-13

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： H02N1/00 ,  G02B26/08

CPC分类号： H02N1/008 ,  G02B26/0841

摘要： Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.

摘要翻译： 提供双轴致动器及其制造方法。 双轴致动器包括：在第一方向上跷跷板的平台单元; 支撑舞台单元的第一支撑单元; 舞台单元驱动单元，包括从第一方向上的舞台单元的相对侧向外延伸的第一驱动梳状电极和从第一支撑单元延伸到第一驱动梳状电极的第一固定梳状电极，使得第一驱动和固定梳状电极 互相交替; 第二支撑单元，其支撑所述第一支撑单元，使得所述第一支撑单元在垂直于所述第一方向的第二方向上跷跷板; 以及第一支撑单元驱动单元，包括安装在第一支撑单元处的第二驱动梳状电极和与第二驱动梳状电极相对应的第二固定梳状电极，其中第一和第二驱动梳状电极和平台单元形成在第一级 并且第一和第二固定梳电极形成在比第一电平低的第二电平处，使得第一和第二固定梳电极在垂直平面处不与第一和第二驱动梳电极重叠。

公开(公告)号：US07257286B2

公开(公告)日：2007-08-14

申请号：US11136392

申请日：2005-05-25

申请人： Young-chul Ko ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： G02B6/35 ,  G02B26/10

CPC分类号： G02B6/357 ,  G02B6/3518 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841

摘要： A dual comb electrode structure with spacing for increasing a driving angle of a micro mirror provided by MEMS (Micro-Electro-Mechanical system) structure and a microscanner adopting the same are provided. The dual comb electrode structure includes: a mirror unit for reflecting light; a plurality of movable comb electrodes protruded in both sides of the mirror unit; and a plurality of upper and lower static comb electrodes formed above and below the movable comb electrode so as to be alternated with the plurality of movable comb electrodes formed in both sides of the mirror unit, wherein a spacing between the upper static comb electrode and the movable comb electrode is different from a spacing between the lower static comb electrode and the movable comb electrode.

摘要翻译： 提供了一种具有用于增加由MEMS（微机电系统）结构提供的微反射镜的驱动角度的间隔的双梳电极结构和采用其的微机。 双梳电极结构包括：用于反射光的反射镜单元; 在所述反射镜单元的两侧突出的多个可动梳状电极; 以及形成在可动梳状电极上方和下方的多个上部和下部静态梳状电极，以便与形成在反射镜单元两侧的多个可动梳状电极交替，其中上部静态梳状电极和 活动梳状电极与下部静态梳状电极和可动梳状电极之间的间隔不同。

公开(公告)号：US07724411B2

公开(公告)日：2010-05-25

申请号：US12045722

申请日：2008-03-11

申请人： Young-chul Ko ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

发明人： Young-chul Ko ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

IPC分类号： G02B26/08

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.

摘要翻译： 提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。 电磁扫描器包括：能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元，其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。 在电磁扫描器中，通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

公开(公告)号：US20090080049A1

公开(公告)日：2009-03-26

申请号：US12045722

申请日：2008-03-11

申请人： Young-chul KO ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

发明人： Young-chul KO ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

IPC分类号： G02B26/08

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.

摘要翻译： 提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。 电磁扫描器包括：能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元，其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。 在电磁扫描器中，通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

公开(公告)号：US07616365B2

公开(公告)日：2009-11-10

申请号：US11710432

申请日：2007-02-26

申请人： Young-chul Ko ,  Jin-woo Cho ,  Hee-moon Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Hee-moon Jeong

IPC分类号： G02B26/10 ,  B81B3/00 ,  B81B1/00

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

摘要翻译： 微型致动器和微型致动器的制造方法。 微型致动器包括基架，第一可移动部件，第二可动部件，至少一对永磁体，线圈部件和变形抑制部分。 第一可移动部分可旋转地连接到基架。 第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。 线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。 变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。 变形抑制部抑制向线圈部施加电流时发生的热变形，以减少第一和第二可动部的变形。