公开(公告)号：US20080007376A1

公开(公告)日：2008-01-10

申请号：US11711057

申请日：2007-02-27

申请人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul KO ,  Hyun-ku Jeong

发明人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul KO ,  Hyun-ku Jeong

IPC分类号： H01F7/08 ,  G01R27/26

CPC分类号： G02B26/085 ,  H01F7/066 ,  H01F2007/068

摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

摘要翻译： 提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。 因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

公开(公告)号：US07750767B2

公开(公告)日：2010-07-06

申请号：US11711057

申请日：2007-02-27

申请人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul Ko ,  Hyun-ku Jeong

发明人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul Ko ,  Hyun-ku Jeong

IPC分类号： H01H51/22

CPC分类号： G02B26/085 ,  H01F7/066 ,  H01F2007/068

摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

摘要翻译： 提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。 因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

公开(公告)号：US20080090372A1

公开(公告)日：2008-04-17

申请号：US11785146

申请日：2007-04-16

申请人： Hyun-ku Jeong ,  Seok-jin Kang ,  Seok-whan Chung

发明人： Hyun-ku Jeong ,  Seok-jin Kang ,  Seok-whan Chung

IPC分类号： H01L21/20

CPC分类号： H01L28/10 ,  H01L23/5227 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of manufacturing a coil for a micro-actuator. The method of manufacturing a coil for a micro-actuator includes preparing a substrate, forming a plurality of trenches for forming a coil on the substrate, covering portions on the substrate with a masking layer except for the plurality of trenches, electroplating the plurality of trenches with a conductive material, and forming a passivation layer on the substrate. Consistent with the method, variations in sections of a coil can be reduced by minimizing bending and warping of a wafer, and therefore a driving current applied to a coil and power consumption can be reduced.

摘要翻译： 一种制造用于微致动器的线圈的方法。 制造微致动器用线圈的方法包括：准备基板，在基板上形成多个用于形成线圈的沟槽，用除了多个沟槽之外的掩模层覆盖基板上的部分，对多个沟槽进行电镀 具有导电材料，并在基底上形成钝化层。 与该方法一致，可以通过使晶片的弯曲和翘曲最小化来减小线圈的截面的变化，因此可以降低施加到线圈的驱动电流和功率消耗。

公开(公告)号：US20070284964A1

公开(公告)日：2007-12-13

申请号：US11754414

申请日：2007-05-29

申请人： Seok-whan Chung ,  Seok-jin Kang ,  Hyung Choi ,  Hyun-ku Jeong

发明人： Seok-whan Chung ,  Seok-jin Kang ,  Hyung Choi ,  Hyun-ku Jeong

IPC分类号： H01G9/00 ,  H02N1/00

CPC分类号： G02B26/0841 ,  B81B3/0086 ,  B81B2203/0136 ,  B81C1/00698

摘要： A micro-electro mechanical system (MEMS) device and a method of forming comb electrodes of the MEMS device are provided. The method includes forming a plurality of parallel trenches at regular intervals in one side of a first silicon substrate so as to define alternating first and second regions at different heights on the one side of the first silicon substrate, oxidizing the first silicon substrate in order to form an oxide layer in the first and second regions having different heights, forming a polysilicon layer on the oxide layer to at least fill up the trenches so as to level the oxide layer having different heights, bonding a second silicon substrate directly to a top surface of the polysilicon layer, selectively etching the second silicon substrate and the polysilicon layer using a first mask so as to form upper comb electrodes vertically aligned with the first regions, selectively etching the first silicon substrate using a second mask so as to form lower comb electrodes vertically aligned with the second regions, and removing the oxide layer interposed between the upper comb electrodes and the lower comb electrodes.

摘要翻译： 提供了微电子机械系统（MEMS）装置和形成MEMS装置的梳状电极的方法。 该方法包括在第一硅衬底的一侧中以规则的间隔形成多个平行的沟槽，以便在第一硅衬底的一侧上限定不同高度的交替的第一和第二区域，氧化第一硅衬底，以便 在具有不同高度的第一和第二区域中形成氧化物层，在氧化物层上形成多晶硅层以至少填充沟槽，以使具有不同高度的氧化物层平坦化，将第二硅衬底直接接合到顶表面 使用第一掩模选择性地蚀刻第二硅衬底和多晶硅层，以形成与第一区域垂直对准的上梳状电极，使用第二掩模选择性地蚀刻第一硅衬底，从而形成下梳状电极 与第二区域垂直对准，以及去除介于上梳状电极和上梳状电极之间的氧化物层 下梳电极。

公开(公告)号：US07043987B2

公开(公告)日：2006-05-16

申请号：US10793331

申请日：2004-03-05

申请人： Hee-moon Jeong ,  In-seob Song ,  Seok-jin Kang

发明人： Hee-moon Jeong ,  In-seob Song ,  Seok-jin Kang

IPC分类号： G01P9/04

CPC分类号： G01C19/5642 ,  G01C19/02

摘要： A rotary gyroscope includes a base plate, an intermediate structure, including a driven element floating over the base plate and supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is normal to a center plane thereof, a driving electrode driving the driven element, and a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is normal to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis, and a cover covering the intermediate structure and having a sensing electrode to detect the sensing motion of the sensing element.

摘要翻译： 旋转陀螺仪包括基板，中间结构，其包括浮动在基板上并被由其径向延伸的驱动支撑件支撑的从动元件，所述从动元件相对于第一轴执行振荡运动，该第一轴垂直于 驱动驱动元件的驱动电极，以及设置在从动元件中并通过感测连接器与被驱动元件连接的传感元件，与驱动元件一起摆动，并且同时执行相对于第三驱动元件的感测运动 轴，其平行于中心平面垂直于第一轴线和任何第二轴线，由于当从第二轴线输入角速度时的科里奥利力，以及覆盖中间结构并具有感测电极的盖子 以检测感测元件的感测运动。

公开(公告)号：US06628183B2

公开(公告)日：2003-09-30

申请号：US10141920

申请日：2002-05-10

申请人： Seok-jin Kang ,  Jin-woo Cho

发明人： Seok-jin Kang ,  Jin-woo Cho

IPC分类号： H01P110

CPC分类号： H01H59/0009 ,  H01H1/20

摘要： A micro-electro mechanical system (MEMS) switch having a single anchor is provided. The MEMS switch includes a substrate; grounding lines installed on the substrate to be distant away from each other; signal transmission lines positioned at predetermined intervals between the grounding lines; an anchor placed between the signal transmission lines; a driving electrode that encircles the anchor while not being in contact with the anchor, the signal transmission lines and the grounding lines; and a moving plate that is positioned on the driving electrode to be overlapped with portions of the signal transmission lines, and connected to the anchor elastically.

公开(公告)号：US20080013132A1

公开(公告)日：2008-01-17

申请号：US11589226

申请日：2006-10-30

申请人： Seok-jin Kang

发明人： Seok-jin Kang

IPC分类号： H04N1/46

CPC分类号： G02B26/0841

摘要： A two-axis scanner includes: a base; a stage disposed on the base on an auxiliary frame; and a stage actuator between the base and the stage. The stage actuator includes: a first stationary part; a horizontally movable frame surrounded by the auxiliary frame; a first horizontal deformable torsion spring disposed between the first stationary part and the horizontally movable frame; and a horizontal driver actuating the horizontally movable frame. A first vertical deformable torsion spring is disposed between the horizontally movable frame and the auxiliary frame; a vertically movable frame surrounds the auxiliary frame, a second horizontal deformable torsion spring is disposed between the auxiliary frame and the vertically movable frame; wherein a second vertical deformable torsion spring is between the vertically movable frame and a second stationary part at sides of the vertically movable frame; and a vertical driver actuates the vertically movable frame.

摘要翻译： 一个双轴扫描仪包括：一个基座; 在辅助框架上设置在基座上的台阶; 以及在基座和台架之间的平台致动器。 舞台致动器包括：第一静止部分; 由辅助框架包围的水平移动框架; 设置在所述第一静止部分和所述水平移动框架之间的第一水平可变形扭转弹簧; 以及驱动水平移动框架的水平驾驶员。 第一垂直可变形扭转弹簧设置在水平移动框架和辅助框架之间; 一个可垂直移动的框架围绕辅助框架，第二水平可变形扭转弹簧设置在辅助框架和可垂直移动的框架之间; 其中第二垂直可变形扭转弹簧在所述可垂直移动的框架和位于所述可垂直移动的框架的侧面处的第二固定部分之间; 并且垂直驱动器致动可垂直移动的框架。

公开(公告)号：US07084073B2

公开(公告)日：2006-08-01

申请号：US10681217

申请日：2003-10-09

申请人： Moon-chul Lee ,  Hyung Choi ,  Kyu-dong Jung ,  Mi Jang ,  Seog-woo Hong ,  Seok-whan Chung ,  Chan-bong Jun ,  Seok-jin Kang

发明人： Moon-chul Lee ,  Hyung Choi ,  Kyu-dong Jung ,  Mi Jang ,  Seog-woo Hong ,  Seok-whan Chung ,  Chan-bong Jun ,  Seok-jin Kang

IPC分类号： H01L21/302

CPC分类号： B81C1/00087 ,  H01L21/486 ,  H01L23/13 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of forming a via hole through a glass wafer includes depositing a material layer on an outer surface of the glass wafer, the material layer having a selection ratio higher than that of the glass wafer, forming a via-patterned portion on one side of the material layer, performing a first etching in which the via-patterned portion is etched to form a preliminary via hole, eliminating any remaining patterning material used in the formation of the via-patterned portion, performing a second etching in which the preliminary via hole is etched to form a via hole having a smooth surface and extending through the glass wafer, and eliminating the material layer. The method according to the present invention is able to form a via hole through a glass wafer without allowing formation of an undercut or minute cracks, thereby increasing the yield and reliability of MEMS elements.

摘要翻译： 通过玻璃晶片形成通孔的方法包括在玻璃晶片的外表面上沉积材料层，该材料层的选择比率高于玻璃晶片的选择比，在玻璃晶片的一侧上形成通孔图案部分 所述材料层进行蚀刻所述通路图案部分以形成预备通孔的第一蚀刻，消除在形成所述通路图案部分中使用的剩余图案材料，进行第二蚀刻，其中所述预通孔 被蚀刻以形成具有光滑表面并延伸穿过玻璃晶片的通孔，并且消除材料层。 根据本发明的方法能够通过玻璃晶片形成通孔，而不会形成底切或微小的裂缝，从而提高MEMS元件的成品率和可靠性。

公开(公告)号：US20060183332A1

公开(公告)日：2006-08-17

申请号：US11341613

申请日：2006-01-30

申请人： Seok-jin Kang

发明人： Seok-jin Kang

IPC分类号： H01L21/302

CPC分类号： B81C1/0015 ,  B81C2201/019

摘要： A method of manufacturing a floating structure capable of providing increased device yield. The method includes: a) forming an insulation film, a predetermined area of which is removed, between a first substrate and a second substrate; and b) forming a floating structure in the removed predetermined area.

摘要翻译： 制造能够提高器件产量的浮动结构的方法。 该方法包括：a）在第一基板和第二基板之间形成预定区域被除去的绝缘膜; 以及b）在去除的预定区域中形成浮动结构。

公开(公告)号：US20050132798A1

公开(公告)日：2005-06-23

申请号：US11002241

申请日：2004-12-03

申请人： Moon-chul Lee ,  Hyung Choi ,  Seok-jin Kang

发明人： Moon-chul Lee ,  Hyung Choi ,  Seok-jin Kang

IPC分类号： G01C19/56 ,  B81B3/00 ,  B81C1/00 ,  G01C19/5783 ,  H01R13/52 ,  G01P15/14

CPC分类号： G01C19/5769 ,  B81B3/0035 ,  B81B2201/0242 ,  B81C1/00579 ,  B81C1/0092 ,  B81C1/00936 ,  H01R13/52 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4902 ,  Y10T74/12 ,  Y10T74/1229

摘要： Method for fabricating a gyroscope including: fabricating a SMS wafer where a first wafer, a metal film, and a second wafer are sequentially stacked; forming a cantilever or a bridge shaped-structure on the relevant portion of the first wafer through the photolithography process; attaching to the surface of the first wafer, a first cap made of glass and having a predetermined space for sealing the movable structure in a vacuum state; separating and removing the metal film and the second wafer from the first wafer; and attaching to the backside of the first wafer, the second cap which is structurally and materially symmetric to the first cap. The SMS wafer is fabricated by depositing the metal film on the second wafer and bonding the first wafer on the metal film using metal paste or material of polymer series. With lower material costs, improvements in performance and characteristics can be achieved.

摘要翻译： 制造陀螺仪的方法，包括：制造顺序堆叠第一晶片，金属膜和第二晶片的SMS晶片; 通过光刻工艺在第一晶片的相关部分上形成悬臂或桥形结构; 附接到第一晶片的表面，由玻璃制成的第一盖，并且具有用于在真空状态下密封可移动结构的预定空间; 从第一晶片分离和去除金属膜和第二晶片; 并且附接到所述第一晶片的所述背面，所述第二盖在所述第一盖结构和物理上对称。 通过在第二晶片上沉积金属膜并使用金属浆料或聚合物系列材料将第一晶片接合在金属膜上来制造SMS晶片。 随着材料成本的降低，可以实现性能和特性的提高。