Optoelectronic method of measuring the extent of a movement and
optoelectronic measuring instrument for carrying out the method
    1.
    发明授权
    Optoelectronic method of measuring the extent of a movement and optoelectronic measuring instrument for carrying out the method 失效
    测量运动程度的光电方法和光电测量仪器的实施方法

    公开(公告)号:US4636079A

    公开(公告)日:1987-01-13

    申请号:US672575

    申请日:1984-11-16

    IPC分类号: G01D5/36 G01B11/14

    CPC分类号: G01D5/36

    摘要: A scanning unit comprises offset scanning gratings and light receivers disposed behind respective gratings. The scanning unit is moved past an incremental scale and the receivers are illuminated through the scale and the gratings. Carrier frequency signals which are displaced in phase and are amplitude-modulated in dependence on the pitch of the scale are generated in response to the scanning movement. The phase displacement of the modulation of the carrier signal is evaluated to determine the instantaneously scanned fraction of a scale increment in that a proportional number of clock pulses are counted by a counter. The use of a simple and reliable circuit arrangement and a reliable evaluation are permitted in that the illumination is modulated at the carrier frequency so that the light receivers constitute means for effecting an amplitude modulation of the carrier frequency signal. The amplitude-modulated signal is then processed further. The modulating signals corresponding to full scale increments may be separately detected and may be used to detect the direction of the scanning movement and to measure the full scale increments which have been scanned.

    摘要翻译: 扫描单元包括位于相应光栅之后的偏移扫描光栅和光接收器。 扫描单元移动超过增量刻度,接收器通过刻度和光栅照亮。 响应于扫描运动而产生相位移位并根据刻度的音调进行幅度调制的载波频率信号。 评估载波信号的调制的相位位移以确定刻度增量的瞬时扫描分数,其中通过计数器对比例数量的时钟脉冲进行计数。 允许使用简单可靠的电路布置和可靠的评估,因为以载波频率调制照明,使得光接收器构成用于实现载波频率信号的幅度调制的装置。 然后进一步处理幅度调制信号。 可以单独检测对应于全刻度增量的调制信号,并且可以用于检测扫描运动的方向并测量已经被扫描的满量程增量。

    Length measuring system
    2.
    发明授权
    Length measuring system 失效
    长度测量系统

    公开(公告)号:US5279043A

    公开(公告)日:1994-01-18

    申请号:US855218

    申请日:1992-03-20

    IPC分类号: G01B5/00 G01D5/26 G01B21/02

    CPC分类号: G01B5/0011 Y10S33/19

    摘要: A length measuring system comprises an elongate scale member adapted to be scanned for generating measured-length signals, a tubular scale member carrier defining an internal cavity housing the scale member and including a mounting wall, a connection of the scale member to the scale member carrier, the connection permitting a longitudinal movement of the scale member relative to the scale member carrier, and end blocks rigidly connected to the scale member carrier at both ends thereof, the end blocks defining recesses and having opposite sides. Devices are provided in the recesses of the end blocks for fastening the scale member carrier to an object and for compensating for length differences resulting from a differential thermal expansion of the scale member carrier and the object, the devices including an intermediate part having two ends and defining a through hole between the ends for receiving a fastening element for fastening the end blocks to the object, and webs having one end connected to the ends of the intermediate part and extending transversely to the longitudinal direction, the webs defining at least along a major portion of their length a clearance with the fastening element and adjacent surfaces of the recess, and an opposite end of the webs connected to the end blocks, the webs having a relatively small flexural stiffness in the longitudinal direction and a relatively high flexural stiffness in a direction extending transversely to the longitudinal direction.

    摘要翻译: 长度测量系统具有刻度(1)和扫描单元,该扫描单元可以相对于其长度被调整,刻度件安装在刻度支架(3)上,同时形成用于刻度和扫描的管状保护壳 所述标尺支撑件(3)设置有安装元件,所述安装元件产生分布在其长度上的多个附接点(9)和/或附接点,设置在端子盖块(6)中,用于连接到物体, 其中一个安装元件可以是定位轴承,并且在剩余的附接点(9)的区域中设置补偿装置,用于在物体的不同热膨胀,标尺(1)和标尺承载件(3)的情况下补偿长度 )。 所述补偿装置(9,17)各自具有中心部分(13,18),所述中心部分具有用于所述安装螺钉和所述安装螺钉的保持腹板(15,22)的引导开口(14,16),所述保持腹板在其两侧相邻, 附接在秤座支撑件(3)的容纳凹部(11,12,20,21)和/或标尺支撑件的端子盖块(6)相对于支撑件的纵向方向基本上横向,并且至少 在大部分长度上,从螺钉和凹陷壁的间隙开始,它们的端部作用在刻度支撑件(3)或端子盖块(6)上,并且具有相对低的弯曲强度 标尺支撑件(3)的纵向方向,但横向于纵向的相对较高的弯曲强度。

    Angle encoder with incremental and absolute tracks
    3.
    发明授权
    Angle encoder with incremental and absolute tracks 失效
    带增量和绝对轨迹的角度编码器

    公开(公告)号:US5332895A

    公开(公告)日:1994-07-26

    申请号:US16008

    申请日:1993-02-10

    IPC分类号: G01D5/245 G01D5/347 G01D5/34

    CPC分类号: G01D5/2455 G01D5/34792

    摘要: An angle encoder having bovine an incremental section and an absolute section and serving to detect angular positions of an encoder disk and the number of revolutions performed by said disk comprises an incremental measuring scale and an absolutely coded measuring scale provided on said disk and associated reading and evaluation means. In conjunction with a high angular resolution it is desired to determine any absolute position of the disk without a previous rotation of the disk. This is accomplished in that the encoder disk comprises in addition to an incremental scale an absolutely coded scale consisting of a serial bar code, from which multidigit code words are readable, which are associated with respective absolute angular positions of the disk. The absolutely coded measuring scale extends on a track that is radially offset from the incremental scale and comprises code bars having side edges which are radially aligned with the radial boundaries of the increments of the incremental scale. An associated reader consists of a multiline detector, which is adapted to detect a complete code word and has a pixel size that is adapted to the bar code. The evaluating unit determines an instantaneous position of the encoder disk in dependence on the signals generated in response to the scanning of both scales, and a counter is provided, which is independent of an external power source and serves to detect the number of revolutions which have been performed.

    摘要翻译: 具有牛增量部分和绝对部分并且用于检测编码器盘的角位置和由所述盘执行的转数的角度编码器包括增加的测量标尺和设置在所述盘上的绝对编码的测量标尺和相关联的读取和 评价手段。 结合高角度分辨率,期望在没有盘的先前旋转的情况下确定盘的任何绝对位置。 这是由于编码器盘除了增量刻度之外还包括一个绝对编码的比例,它由串行条形码组成,多个码字可以从该条形码被读取,它们与磁盘的相应绝对角位置相关联。 绝对编码的测量刻度尺在径向偏离增量刻度的轨道上延伸,并且包括具有与增量刻度的增量的径向对准的侧边缘的代码条。 相关联的读取器由多线检测器组成,其适于检测完整的码字并且具有适应于条形码的像素大小。 评估单元根据对两个刻度的扫描而产生的信号,确定编码器盘的瞬时位置,并且提供一个与外部电源无关的计数器,用于检测具有 已经执行

    Length measuring apparatus
    4.
    发明授权
    Length measuring apparatus 失效
    长度测量装置

    公开(公告)号:US5205049A

    公开(公告)日:1993-04-27

    申请号:US766635

    申请日:1991-09-26

    IPC分类号: G01D5/347

    CPC分类号: G01D5/347

    摘要: A length measuring apparatus comprises a measuring device for detecting the position of a marker along a measuring path. The measuring device and the marker are encapsulated in a hermetically sealed housing. A follow-up device is provided for moving the marker to a predetermined position of registration relative to a detectable point, which is disposed outside the housing and is movable along a path which is parallel to and laterally aligned with the measuring path. The follow-up device comprises a device for establishing a non-contacting link between the detectable point and the marker. To provide such an apparatus which has a relatively simple design and a low susceptibility to disturbance and can achieve a high accuracy of measurement. The apparatus comprises a strip that is trained around reversing end pulleys and has a course that extends along the measuring path. The marker is carried by the course. The strip is adapted to be driven by the follow-up device and is provided with a measuring scale and in the housing extends past a stationary reader for reading the measuring scale.

    摘要翻译: 长度测量装置包括用于检测标记沿着测量路径的位置的测量装置。 测量装置和标记被封装在密封的壳体中。 提供了一种跟随装置,用于将标记移动到相对于可检测点的预定定位位置,该可检测点设置在壳体外部并且可沿着与测量路径平行并横向对齐的路径移动。 后续装置包括用于在可检测点和标记之间建立非接触连接的装置。 为了提供具有相对简单的设计和对干扰的低敏感性并且可以实现高测量精度的这种装置。 该装置包括围绕反转端滑轮训练的条带,并具有沿着测量路径延伸的路线。 标记由课程承载。 该条适于由后续装置驱动并且设置有测量刻度,并且在外壳中延伸经过固定式读取器以读取测量刻度。

    Angle encoder
    5.
    发明授权
    Angle encoder 失效
    角度编码器

    公开(公告)号:US5152066A

    公开(公告)日:1992-10-06

    申请号:US799386

    申请日:1991-11-27

    IPC分类号: G01D5/347

    CPC分类号: G01D5/347

    摘要: The angle encoder comprises a transmitter disk, which is provided with two circular measuring scales, preferably incremental measuring scales. A scanning unit is associated with each of said measuring scales and during a rotation of said disk relative to said scanning head is adapted to scan said scale with reflected light and to optoelectronically generate measured-value signals, such as control signals in response to said scanning. To minimize the effect of a radial runout on the accuracy of the measurement and to permit a providing of the measuring scales on the transmitter disk by a copying process, the transmitter disk has at least one frustoconical outside surface, which is centered on the axis of rotation and is provided with the measuring scales. A process of manufacturing the transmitter disk is also described.

    摘要翻译: 角度编码器包括发射盘,其配备有两个圆形测量秤,优选地是增量测量秤。 扫描单元与每个所述测量刻度相关联,并且在所述盘相对于所述扫描头的旋转期间适于用反射光扫描所述刻度并且光电地产生测量值信号,例如响应于所述扫描的控制信号 。 为了最小化径向跳动对测量精度的影响,并允许通过复印过程在发射机盘上提供测量尺,发射器盘具有至少一个截头圆锥形的外表面,其以 旋转并配有测量秤。 还描述了制造发射器盘的过程。

    Incremental length measuring system
    6.
    发明授权
    Incremental length measuring system 失效
    增量长度测量系统

    公开(公告)号:US5115573A

    公开(公告)日:1992-05-26

    申请号:US766813

    申请日:1991-09-26

    IPC分类号: G01D5/245 H03M1/30

    CPC分类号: G01D5/2457 H03M1/308

    摘要: An incremental length measuring system comprises a scale member, which is provided with a measuring scale, a scanning unit having scanning elements for scanning the scale and for generating measured-value signals in response to the scanning of the scale, and an analyzing unit for analyzing the measured-value signals. The scale member comprises a reference track, which is parallel to the measuring scale and provided with a plurality of selectable reference marks associated with respective reference points. The scanning unit comprises a plurality of scanning elements associated with respective ones of the reference marks. A selector switch is provided, which is movable in unison with the scanning unit and is operable by permanent magnet devices, which are associated with any of the reference marks when it has been selected and are contained in a protective housing that contains the scale member and the scanning unit. The selector switch is operable to permit a generation or delivery of a reference pulse in response to the scanning of a reference mark by the scanning unit only when the reference mark has been selected. To facilitate the selection of a desired reference mark, a permanent magnet which is mounted within the protective housing is permanently associated with each selectable reference mark and each of the permanent magnets is selectively movable between an inactive position and an active position, in which the permanent magnet is arranged to actuate the selector switch.

    摘要翻译: 增量长度测量系统包括:刻度部件,其具有测量标尺;扫描单元,具有用于扫描刻度的扫描元件,并响应于刻度的扫描产生测量值信号;以及分析单元,用于分析 测量值信号。 标尺构件包括与测量刻度平行并具有与各个参考点相关联的多个可选参考标记的参考轨道。 扫描单元包括与相应的参考标记相关联的多个扫描元件。 提供了选择器开关,其可与扫描单元一致地移动并且可以由永磁体装置操作,永久磁铁装置在被选择时与任何参考标记相关联并且被包含在包含标尺构件的保护壳体中 扫描单元。 只有当已经选择了参考标记时,选择器开关可操作以响应于扫描单元对参考标记的扫描而产生或传送参考脉冲。 为了便于选择所需的参考标记,安装在保护壳内的永磁体与每个可选参考标记永久地相关联,并且每个永磁体可选择性地在非活动位置和活动位置之间移动,其中永久 磁体布置成致动选择器开关。

    Length measuring system
    7.
    发明授权
    Length measuring system 失效
    长度测量系统

    公开(公告)号:US4982507A

    公开(公告)日:1991-01-08

    申请号:US467944

    申请日:1990-01-22

    IPC分类号: G01B3/00 G01D5/347

    CPC分类号: G01D5/34753 G01B3/002

    摘要: The length measuring system comprises a scale member provided with a scale and a scanning unit, which is movable along the scale and is guided by the scale member or by separate tracks, which are parallel to the scale and is coupled to an actuating member by a backlashless coupling. The two coupling elements of the coupling cross each other and are in point contact with each other and having engaging surfaces which are centered on axes which are normal to the longitudinal direction of the scale member. A backlash of the coupling is prevented by a permanent magnetic biasing set, which comprises parts which are respectively connected to the actuating member and to the scanning unit and consist of two permanent magnets or of a permanent magnet and an armature.

    摘要翻译: 长度测量系统包括具有刻度尺和扫描单元的刻度部件,扫描单元可沿着标尺移动并且被标尺部件或与标尺平行的单独轨道引导,并通过一个致动部件 无间隙耦合 耦合的两个耦合元件彼此交叉并且彼此点接触并且具有以垂直于标尺构件的纵向的轴线为中心的接合表面。 通过永久磁偏置装置防止联接器的间隙,永磁偏置装置包括分别连接到致动构件和扫描单元并由两个永磁体或永磁体和电枢组成的部件。

    Optoelectronic incremental measuring system with adjustable LED
positioning
    8.
    发明授权
    Optoelectronic incremental measuring system with adjustable LED positioning 失效
    光电增量测量系统,可调节LED定位

    公开(公告)号:US4695720A

    公开(公告)日:1987-09-22

    申请号:US805850

    申请日:1985-12-05

    IPC分类号: G01D5/26 G01D5/347 G01D5/34

    CPC分类号: G01D5/34715 G01D5/26

    摘要: An optoelectronic incremental measuring system for measuring lengths or angles comprises a scale member provided with an incremental scale and a scanning unit, which is adjustable along the scale and comprises scanning grids, which are spaced apart by an integral multiple and a fractional part of a scale increment, a plurality of optoelectronic receivers associated with respective ones of such grids, and a plurality of light-emitting diodes, which are associated with the respective grids and adapted to illuminate the associated receiver via the scale and the associated scanning grid. In such a system a movement of the scanning unit and the scale relative to each other will cause the receivers to generate phase-displaced sine signals having periods in a number depending on the number of scale increments traversed by the scanning unit. The signals generated by the receivers can be adjusted relative to each other in amplitude and phase because the positions of the light-emitting diodes are individually adjustable.

    摘要翻译: 用于测量长度或角度的光电增量测量系统包括设置有增量刻度的刻度元件和扫描单元,扫描单元可沿着刻度调节,并且包括扫描网格,其间隔开整数倍和刻度的分数部分 多个与这些格栅相关联的光电接收器,以及多个发光二极管,其与相应的格栅相关联并且适于经由刻度尺和相关联的扫描网格照射相关的接收器。 在这种系统中,扫描单元和刻度尺相对于彼此的运动将使得接收器产生具有取决于扫描单元所经过的标尺增量的数量的周期的相位移位正弦信号。 由于发光二极管的位置可以单独调节,所以接收器产生的信号可以相对于振幅和相位相互调整。

    Instrument for measuring lengths
    9.
    发明授权
    Instrument for measuring lengths 失效
    仪器测量长度

    公开(公告)号:US4158509A

    公开(公告)日:1979-06-19

    申请号:US819568

    申请日:1977-07-27

    IPC分类号: G01D5/245 G01D5/36 G01B11/02

    CPC分类号: G01D5/363 G01D5/2457

    摘要: A scale assembly is provided with a scale which has a predetermined scale increment. The scale assembly consists of a plurality of scale sections, each of which is provided with a length portion of said scale and which are separated by joints having in the longitudinal direction of said scale a width that is smaller than a predetermined width. A measuring slide is movable along said scale and carries first and second photoelectric sensor means, which are spaced apart along said scale by a distance which exceeds said predetermined width. Each of said sensor means are adapted to be enabled and when enabled are adapted to photoelectrically scan said scale and to deliver a predetermined number of length signals in response to the movement of said slide along said scale to the extent of each of said increments. Integrating means are provided for integrating each of said length signals from each of said sensor means which are enabled. A change-over switch is shiftable between first and second states and arranged to enable said first and second sensor means in said first and second positions, respectively. Control means are carried by said slide and arranged to shift said change-over switch from either of said states to the other in response to the movement of said sensor means which are enabled at a time to one of said joints.

    摘要翻译: 刻度组件设置有具有预定刻度增量的刻度。 标尺组件由多个刻度部分组成,每个刻度部分设置有所述刻度尺的长度部分,并且由所述刻度板的纵向方向上分开的具有小于预定宽度的宽度的部分分开。 测量滑块可沿所述刻度尺移动,并承载第一和第二光电传感器装置,所述第一和第二光电传感器装置沿着所述刻度尺间隔开超过所述预定宽度的距离。 所述传感器装置中的每一个适于被启用,并且当使能时适于光电扫描所述刻度并且响应于所述滑块沿着所述刻度尺的移动而递送预定数量的长度信号到每个所述增量的程度。 提供积分装置用于对来自所有能够启用的所述传感器装置的每个所述长度信号进行积分。 切换开关可在第一状态和第二状态之间移动,并且被布置成使得所述第一和第二传感器装置分别在所述第一和第二位置。 控制装置由所述滑块承载并且被布置成响应于所述传感器装置的移动而将所述转换开关从所述状态中的任一状态移动到另一个状态,所述传感器装置可以一次启动到所述接头之一。

    System comprising a laser diode and means for stabilizing the wavelength
of light emitted by said laser diode, and laser interferometer
    10.
    发明授权
    System comprising a laser diode and means for stabilizing the wavelength of light emitted by said laser diode, and laser interferometer 失效
    包括激光二极管的系统和用于稳定由所述激光二极管发射的光的波长的装置和激光干涉仪

    公开(公告)号:US5305330A

    公开(公告)日:1994-04-19

    申请号:US39959

    申请日:1993-03-30

    IPC分类号: G01B9/02 H01S5/0687 H01S3/13

    CPC分类号: H01S5/0687

    摘要: In a system comprising a laser diode and means for stabilizing the wavelength of a primary beam of light emitted by said laser diode said means comprise a controller for controlling the current supplied to the laser diode under the control of sensor means, which are responsive to the instantaneous ambient conditions and operating parameters, a beam splitter, which is disposed in the path of said primary beam and arranged to divert from said primary beam a partial beam to measuring means, which comprise a diffraction grating and associated focusing optical means and are arranged to direct said partial beam onto photodetector means and to form on said photodetector means a light spot having a position and/or size depending on the instantaneous wavelength of said primary beam. The photodetector means serve to detect deviations of the light spot from a desired position, which is associated with the rated wavelength of said primary beam. The output signals of said photodetector means are optionally converted and are used as control signals for the controller. A laser interferometer is also disclosed, in which the polarization of the primary beam is used in the generation of the measured-value signals.

    摘要翻译: 在包括激光二极管的系统和用于稳定由所述激光二极管发射的主光束的波长的装置中,所述装置包括控制器,用于在传感器装置的控制下控制提供给激光二极管的电流,该控制器响应于 瞬时环境条件和操作参数,分束器,其设置在所述主光束的路径中并且被布置成将部分光束从部分光束转移到测量装置,测量装置包括衍射光栅和相关联的聚焦光学装置,并且布置成 将所述部分光束直接引导到光电检测器装置上,并在所述光电检测器装置上形成具有取决于所述主光束的瞬时波长的位置和/或尺寸的光点。 光电检测器装置用于检测光点与所述主光束的额定波长相关联的期望位置的偏差。 所述光检测器装置的输出信号可选地被转换并用作控制器的控制信号。 还公开了一种激光干涉仪,其中在产生测量值信号中使用主光束的偏振。