公开(公告)号：US09052598B2

公开(公告)日：2015-06-09

申请号：US14180848

申请日：2014-02-14

申请人： Hengpeng Wu ,  Yi Cao ,  SungEun Hong ,  Jian Yin ,  Margareta Paunescu ,  Mark O Neisser ,  Guanyang Lin

发明人： Hengpeng Wu ,  Yi Cao ,  SungEun Hong ,  Jian Yin ,  Margareta Paunescu ,  Mark O Neisser ,  Guanyang Lin

IPC分类号： G03F7/20 ,  C08L53/00 ,  C08F118/02 ,  C08L33/12 ,  C08F293/00 ,  G03F7/00 ,  B82Y10/00 ,  B82Y40/00

CPC分类号： G03F7/20 ,  B82Y10/00 ,  B82Y40/00 ,  C08F212/08 ,  C08F212/32 ,  C08F220/14 ,  C08F293/00 ,  C08L53/00 ,  C09D125/14 ,  C09D125/16 ,  G03F7/0002 ,  G03F7/2037

摘要： The present invention relates to novel processes for using the neutral layer compositions for aligning microdomains of directed self-assembling block copolymers (BCP). The processes are useful for fabrication of electronic devices. The novel processes comprise a step of forming a coating of the neutral layer from the neutral layer composition, wherein the neutral layer composition comprises at least one random copolymer having at least one unit of structure (1), at least one unit of structure (2) and at least one unit of structure (3) where R1 is selected from the group consisting of a C1-C8 alkyl, C1-C8 fluoroalkyl moiety, C1-C8 partially fluorinated alkyl, C4-C8 cycloalkyl, C4-C8 cyclofluoroalkyl, C4-C8 partially fluorinated cycloalkyl, and a C2-C8 hydroxyalkyl; R2, R3 and R5 are independently selected from a group consisting of H, C1-C4 alkyl, CF3 and F; R4 is selected from the group consisting of H, C1-C8 alkyl, C1-C8 partially fluorinated alkyl and C1-C8 fluoroalkyl, n ranges from 1 to 5, R6 is selected from the group consisting of H, F, C1-C8 alkyl and a C1-C8 fluoroalkyl and m ranges from 1 to 3.

摘要翻译： 本发明涉及使用中性层组合物对准定向自组装嵌段共聚物（BCP）的微区域的新方法。 该方法对于制造电子器件是有用的。 该新方法包括从中性层组合物形成中性层的涂层的步骤，其中中性层组合物包含至少一种具有至少一个结构单元（1），至少一个结构单元（2）的无规共聚物 ）和至少一个结构单元（3），其中R 1选自C 1 -C 8烷基，C 1 -C 8氟烷基部分，C 1 -C 8部分氟化烷基，C 4 -C 8环烷基，C 4 -C 8环氟烷基，C 4 -C8部分氟化的环烷基，和C2-C8羟烷基; R2，R3和R5独立地选自H，C1-C4烷基，CF3和F; R 4选自H，C 1 -C 8烷基，C 1 -C 8部分氟化烷基和C 1 -C 8氟代烷基，n为1至5，R 6选自H，F，C 1 -C 8烷基 和C 1 -C 8氟烷基，m为1至3。