公开(公告)号：US07157720B2

公开(公告)日：2007-01-02

申请号：US10878659

申请日：2004-06-28

申请人： Henry Shih-Ming Chao ,  Colin Geoffrey Trevor ,  Paul Edward Mooney ,  Bernd Kraus

发明人： Henry Shih-Ming Chao ,  Colin Geoffrey Trevor ,  Paul Edward Mooney ,  Bernd Kraus

IPC分类号： G01K1/08 ,  H01J3/14 ,  H01J3/26 ,  G01N23/00 ,  G21K7/00

CPC分类号： H01J37/261 ,  H01J37/222 ,  H01J49/44 ,  H01J2237/2443 ,  H01J2237/24435 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2447 ,  H01J2237/24485 ,  H01J2237/2522

摘要： A charged particle device is provided comprising a charged particle source configured to direct charged particles in the direction of a specimen under examination and an imaging device configured to convert charged particles to an image representing the specimen. The imaging device comprises a detector defining a pixel array. The detector is configured to generate electric charges for individual pixels of the pixel array such that the electric charges collectively define the image. The imaging device is configured such that a portion of the pixel array can be transitioned between a partially masked state and a substantially unmasked state.

摘要翻译： 提供一种带电粒子装置，其包括被配置为沿被检查样本的方向引导带电粒子的带电粒子源和被配置为将带电粒子转换成代表该样本的图像的成像装置。 成像装置包括限定像素阵列的检测器。 检测器被配置为为像素阵列的各个像素产生电荷，使得电荷共同定义图像。 成像装置被配置为使得像素阵列的一部分可以在部分屏蔽状态和基本上未屏蔽状态之间转变。

公开(公告)号：US07238938B2

公开(公告)日：2007-07-03

申请号：US11155018

申请日：2005-06-16

申请人： Colin Geoffrey Trevor ,  Frank E. Dickerson ,  Matt Bjork

发明人： Colin Geoffrey Trevor ,  Frank E. Dickerson ,  Matt Bjork

IPC分类号： H01J49/48

CPC分类号： H01J37/09 ,  H01J2237/0455 ,  H01J2237/057

摘要： A device comprising an energy selecting slit assembly is provided. The slit assembly comprising a slit assembly chassis, opposing slit mechanisms, and an actuator assembly. One of the terminal ends of the actuator arm comprises a relatively fixed terminus, while the other terminal end of the arm comprises a relatively mobile terminus coupled to the rotational slit mechanism via a mechanical coupling configured to translate movement of the mobile terminus into rotational of the rotational slit mechanism. In one embodiment of the present invention, the slit assembly chassis defines a plurality of fixturing datums configured to establish alignment of respective aperture-defining edges of the opposing slit mechanisms along orthogonal X, Y, and Z axes defined by the chassis. Additional embodiments are disclosed.

摘要翻译： 提供了包括能量选择狭缝组件的装置。 狭缝组件包括狭缝组合底盘，相对的狭缝机构和致动器组件。 致动器臂的末端中的一个包括相对固定的末端，而臂的另一个末端包括相对移动的终端，该终端通过机械耦合而耦合到旋转狭缝机构，该机械耦合被配置为将移动终端的运动转换为 旋转狭缝机构。 在本发明的一个实施例中，狭缝组合底架限定了多个夹具基准，其被配置为沿着由底盘限定的正交X，Y和Z轴建立相对的狭缝机构的相应的孔限定边缘的对准。 公开了另外的实施例。