公开(公告)号：US07718961B1

公开(公告)日：2010-05-18

申请号：US11623280

申请日：2007-01-15

申请人： Raymond Browning

发明人： Raymond Browning

IPC分类号： H01J29/84 ,  H01J37/26

CPC分类号： H01J37/05 ,  H01J37/285 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/2522 ,  H01J2237/2812

摘要： A photoelectron microscope with a magnetic projections lens incorporating a cyclotron orbit radius filter. The microscope can be used with a monochromatic source of photons to image surface potential and Fermi level shifts with sub micron spatial resolution.

摘要翻译： 具有结合回旋加速器轨道半径滤波器的磁性投影透镜的光电子显微镜。 显微镜可以与单色光子源一起使用以使图像表面电位和费米能级位移与亚微米空间分辨率。

公开(公告)号：US5796101A

公开(公告)日：1998-08-18

申请号：US619048

申请日：1996-03-20

申请人： Richard Allan Haight ,  Paul Fredrich Seidler

发明人： Richard Allan Haight ,  Paul Fredrich Seidler

IPC分类号： G01N23/227 ,  G01Q30/02 ,  H01J37/26

CPC分类号： G01N23/2273 ,  H01J2237/2522

摘要： A laser based tunable high resolution ESCA (Electron Spectroscopy for Chemical Analysis) system in which harmonics of a subpicosecond laser source are used to carry out core level photoemission is provided wherein photon energies tunable to 80 eV have been achieved and energies up to 150 eV or more are possible. The harmonic light is of extremely narrow bandwidth and spectrally bright which can be focussed by using reflective optics of gratings to an extremely small spot of well below one micron to permit high spatial resolution. When used in conjunction with appropriate electron objects, high resolution chemically sensitive mapping of device-size features is possible.

摘要翻译： 提供了一种基于激光的可调谐高分辨率ESCA（化学分析电子能谱）系统，其中使用亚皮秒激光源的谐波来执行核心级光电发射，其中已经实现了可调谐到80eV的光子能量，并且能量达到150eV或 更有可能。 谐波光具有非常窄的带宽和光谱亮度，可以通过将光栅的反射光学器件聚焦到远低于一微米的极小的光点，以允许高空间分辨率。 当与适当的电子对象一起使用时，可以进行器件尺寸特征的高分辨率化学敏感映射。

公开(公告)号：US5444242A

公开(公告)日：1995-08-22

申请号：US201912

申请日：1994-02-25

申请人： Paul E. Larson ,  Paul W. Palmberg

发明人： Paul E. Larson ,  Paul W. Palmberg

IPC分类号： G01N23/225 ,  G01N23/227 ,  G01Q30/02 ,  G01Q30/06 ,  G21K1/06 ,  H01J37/06 ,  H01J37/256 ,  H01J37/285 ,  H01J49/44 ,  H01J49/48

CPC分类号： G01N23/2273 ,  G01N23/227 ,  H01J37/256 ,  H01J37/285 ,  H01J49/48 ,  H01J2237/2522

摘要： An instrument for surface analysis includes rastering an electron beam across an anode to generate x-rays. A concave Bragg monochromator focuses an energy peak of the x-rays to a specimen surface, the x-rays rastering the surface to emit photoelectrons. An analyzer provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface for imaging of the specimen. Alternatively a lens formed of two concave grids transits the photoelectrons to the analyzer with selectively modified energy so that the analyzer detects either higher energy electrons characteristic of chemical species or lower electrons for the image. The monochromator is formed of platelets cut from an array of platelets in a single crystal member. For imaging of insulating specimens, the surface is flooded periodically with electrons, and the signals are omitted from the image during the flooding. For chemometric information summed over the surface of insulators, data from the edges is omitted from the summing.

摘要翻译： 用于表面分析的仪器包括在阳极上扫描电子束以产生x射线。 凹入的布拉格单色仪将x射线的能量峰值聚焦到样品表面，X射线掠过表面以发射光电子。 分析仪提供关于光电子的信息，从而提供表面上的化学物质的信息。 低能量光电子的第二检测器与扫描相配合以产生用于成像试样的表面的扫描光电子图像。 或者，由两个凹形栅格形成的透镜可以选择性地改变能量将光电子转移到分析器，使得分析仪检测化学物质的特征的较高能量电子或图像的较低电子。 单色仪由在单晶构件中的血小板阵列切割的血小板形成。 对于绝缘试样的成像，表面用电子周期性地淹没，并且在淹没期间从图像中省略信号。 对于绝缘子表面的化学计量信息，从求和中省略边缘数据。

公开(公告)号：US5315113A

公开(公告)日：1994-05-24

申请号：US953429

申请日：1992-09-29

申请人： Paul E. Larson ,  Paul W. Palmberg

发明人： Paul E. Larson ,  Paul W. Palmberg

IPC分类号： G01N23/227 ,  G01Q30/02 ,  G01Q30/06 ,  G21K1/06 ,  H01J37/06 ,  H01J37/256 ,  H01J37/285 ,  H01J49/44 ,  H01J49/48

CPC分类号： H01J49/48 ,  G01N23/227 ,  G01N23/2273 ,  H01J37/256 ,  H01J37/285 ,  H01J2237/2522

摘要： An instrument for surface analysis includes a gun for selectively focusing an electron beam on an anode spot, or rastering the beam across an array of such spots, to generate x-rays. A concave monochromator focuses an energy peak of the x-rays to a specimen surface, in a spot on a selected pixel area or across an array of pixel areas on the surface to emit photoelectrons. An analyzer with a detector provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface, for viewing of a specimen to be positioned, or for imaging an insulator surface. The monochromator is formed of platelets produced by cutting an array of platelets from a single crystal member, and bonding the platelets to a concave face of a base plate juxtaposed in crystalline alignment in a positioned array identical to that of the initial array.

摘要翻译： 用于表面分析的仪器包括用于选择性地将电子束聚焦在阳极点上的枪，或者跨过这样的点的阵列来扫描光束，以产生x射线。 凹形单色仪将X射线的能量峰值聚焦到样品表面，在选定的像素区域上的一个点或者表面上的像素区域阵列上以发射光电子。 具有检测器的分析仪提供关于光电子的信息，从而提供表面上的化学物质的信息。 低能量光电子的第二检测器与扫描相协调以产生表面的扫描光电子图像，用于观察待定位的样品或用于对绝缘体表面进行成像。 单色仪由通过从单晶构件切割血小板阵列而产生的血小板形成，并且将血小板粘合到以与初始阵列相同的定位阵列中以结晶对准并列的基板的凹面。

公开(公告)号：US08334508B1

公开(公告)日：2012-12-18

申请号：US13032273

申请日：2011-02-22

申请人： Marian Mankos

发明人： Marian Mankos

IPC分类号： G01N23/04

CPC分类号： H01J37/05 ,  H01J37/29 ,  H01J2237/0535 ,  H01J2237/057 ,  H01J2237/2511 ,  H01J2237/2522 ,  H01J2237/2538

摘要： One embodiment relates to an apparatus for forming an electron image using electrons with a narrow range of electron energies from an electron beam with a wide range of energies. An electron beam source is configured to generate an electron beam, and condenser lenses collimate the beam into an objective lens configured to illuminate the specimen. The illuminating electrons are scattered by the specimen and form an electron beam with a range of energies that enter a magnetic prism separator. After a 90 degree deflection, the prism separator introduces an angular dispersion that disperses the incoming electron beam according to its energy. A knife-edge plate removes either the high or low energy tail from the propagating beam. An electron lens is configured to focus the electron beam into an electron mirror so that after the reflection, the other energy tail is stopped on the same knife-edge plate. The remaining nearly monochromatic beam reenters the prism separator and is deflected toward the projection system and used to form a two-dimensional electron image on an electron detector. By adjusting the strength of the prism separator, the specific electron energy used for imaging is selected from the energy distribution of the scattered electrons. Other embodiments are also disclosed.

摘要翻译： 一个实施例涉及使用具有宽范围能量的电子束具有窄范围电子能的电子形成电子图像的装置。 电子束源被配置为产生电子束，并且聚光透镜将光束准直成配置为照射样本的物镜。 照射的电子被样品散射并形成一个能量范围进入磁性棱镜分离器的电子束。 在90度偏转之后，棱镜分离器引入根据其能量分散入射电子束的角度色散。 刀刃板从传播梁中去除高能量或低能量尾部。 电子透镜被配置为将电子束聚焦到电子反射镜中，使得在反射之后，另一个能量尾部停止在同一个刀刃板上。 剩下的几乎单色的光束重新进入棱镜分离器并且朝向投影系统偏转，并用于在电子检测器上形成二维电子图像。 通过调整棱镜分离器的强度，用于成像的特定电子能量从散射电子的能量分布中选择。 还公开了其他实施例。

公开(公告)号：US20080210863A1

公开(公告)日：2008-09-04

申请号：US11659354

申请日：2005-08-01

申请人： Henri Pinna ,  Marcel Tence

发明人： Henri Pinna ,  Marcel Tence

IPC分类号： H01J37/244

CPC分类号： H01J37/244 ,  H01J37/256 ,  H01J2237/2522

摘要： The inventive device for obtaining the electron energy loss image and/or spectra comprises an image sensor (17), a control (31) for at least two deflectors (48a, 48b) for alternately exposing at least two photosensitive parts of the image sensor, sensor raigmeans for generating the representative signal of an image captured by each photosensitive part of the image sensor, means (31) for synchronising the deflector and said reading means for successively controlling the exposition of said photosensitive part and the reading of the other photosensitive part for each photosensitive part and means (35) for combining the two image parts in such a way that a spectrum is formed.

摘要翻译： 用于获得电子能量损失图像和/或光谱的本发明的装置包括图像传感器（17），用于至少两个偏转器（48a，48b）的控制（31），用于交替地暴露图像的至少两个感光部分 用于产生由图像传感器的每个感光部分拍摄的图像的代表信号的传感器，传感器，用于使偏转器和所述读取装置同步的装置，用于连续地控制所述感光部分的曝光和其它光敏部件的读取 用于每个感光部分的部分和用于以形成光谱的方式组合两个图像部分的装置（35）。

公开(公告)号：US07157720B2

公开(公告)日：2007-01-02

申请号：US10878659

申请日：2004-06-28

申请人： Henry Shih-Ming Chao ,  Colin Geoffrey Trevor ,  Paul Edward Mooney ,  Bernd Kraus

发明人： Henry Shih-Ming Chao ,  Colin Geoffrey Trevor ,  Paul Edward Mooney ,  Bernd Kraus

IPC分类号： G01K1/08 ,  H01J3/14 ,  H01J3/26 ,  G01N23/00 ,  G21K7/00

CPC分类号： H01J37/261 ,  H01J37/222 ,  H01J49/44 ,  H01J2237/2443 ,  H01J2237/24435 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2447 ,  H01J2237/24485 ,  H01J2237/2522

摘要： A charged particle device is provided comprising a charged particle source configured to direct charged particles in the direction of a specimen under examination and an imaging device configured to convert charged particles to an image representing the specimen. The imaging device comprises a detector defining a pixel array. The detector is configured to generate electric charges for individual pixels of the pixel array such that the electric charges collectively define the image. The imaging device is configured such that a portion of the pixel array can be transitioned between a partially masked state and a substantially unmasked state.

摘要翻译： 提供一种带电粒子装置，其包括被配置为沿被检查样本的方向引导带电粒子的带电粒子源和被配置为将带电粒子转换成代表该样本的图像的成像装置。 成像装置包括限定像素阵列的检测器。 检测器被配置为为像素阵列的各个像素产生电荷，使得电荷共同定义图像。 成像装置被配置为使得像素阵列的一部分可以在部分屏蔽状态和基本上未屏蔽状态之间转变。

公开(公告)号：US20050242284A1

公开(公告)日：2005-11-03

申请号：US11102483

申请日：2005-04-08

申请人： Toshikatsu Kaneyama

发明人： Toshikatsu Kaneyama

IPC分类号： H01J37/05 ,  H01J37/153 ,  H01J37/26 ,  H01J47/00

CPC分类号： H01J37/26 ,  H01J2237/05 ,  H01J2237/2522

摘要： There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens located immediately behind the objective lens demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens. This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses create a crossover image and a microscope image in the entrance window plane and entrance image plane, respectively, of an energy filter. The energy filter focuses the microscope image and crossover image onto the exit image plane and exit window plane, respectively. The output image from the filter is projected onto the final image plane by first and second projector lenses.

摘要翻译： 公开了以与高倍率成像时相同的方式在物镜保持高激发的同时实现低倍率成像的电子显微镜。 位于物镜后面的物镜微缩镜使由物镜放大的样本图像缩小。 因此，尖锐聚焦的电子束进入第一中间透镜。 这大大降低了中间透镜中离轴像差的影响。 第一，第二和第三中间透镜分别在能量过滤器的入射窗平面和入射图像平面中产生交叉图像和显微镜图像。 能量过滤器将显微镜图像和交叉图像分别聚焦到出射图像平面和出射窗口平面。 来自滤波器的输出图像由第一和第二投影仪透镜投射到最终的图像平面上。

公开(公告)号：US06794648B2

公开(公告)日：2004-09-21

申请号：US10196577

申请日：2002-07-17

申请人： Kazutoshi Kaji ,  Takashi Aoyama ,  Shunroku Taya ,  Hiroyuki Tanaka ,  Shigeto Isakozawa

发明人： Kazutoshi Kaji ,  Takashi Aoyama ,  Shunroku Taya ,  Hiroyuki Tanaka ,  Shigeto Isakozawa

IPC分类号： H01J3726

CPC分类号： G01N23/04 ,  G01N23/20 ,  H01J37/05 ,  H01J37/244 ,  H01J37/256 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/24495 ,  H01J2237/2522 ,  H01J2237/2802 ,  H01J2237/2804 ,  H01J2237/2809

摘要： An object of the present invention is to provide an ultimate analyzer which can display an element distribution image of an object to be analyzed with high contrast to determine the positions of the element distribution with high accuracy, and a scanning transmission electron microscope and a method of analyzing elements using the ultimate analyzer. The present invention exists in an ultimate analyzer comprising a scattered electron beam detector for detecting an electron beam scattered by an object to be analyzed; an electron spectrometer for energy dispersing an electron beam transmitted through the object to be analyzed; an electron beam detector for detecting said dispersed electron beam; and a control unit for analyzing elements of the object to be analyzed based on an output signal of the electron beam detected by the electron beam detector and an output signal of the electron beam detected by the scattered electron beam detector. Further, the present invention exists in a scanning transmission electron microscope comprising the above ultimate analyzer; an electron beam source; an electron beam scanning coil; a scattered electron beam detector; objective lenses; a focusing lens; a magnifying magnetic field lens; and a focus adjusting electromagnetic lens. Furthermore, the ultimate analyzer or the scanning transmission electron microscope may comprises a control unit which makes it possible that both of an image of element distribution and an STEM image detected and formed by the scatted electron beam detector are observed at a time in real time, and the image of element distribution is corrected by the STEM image detected and formed by the scattered electron beam detector.

摘要翻译： 本发明的目的是提供一种能够以高对比度显示待分析物体的元素分布图像，以高精度地确定元件分布的位置的最终分析器，以及扫描透射电子显微镜和 使用最终分析仪分析元素。 本发明存在于包含用于检测由待分析物体散射的电子束的散射电子束检测器的终极分析仪中; 用于能量分散通过待分析物体的电子束的电子光谱仪; 用于检测所述分散的电子束的电子束检测器; 以及控制单元，用于基于由电子束检测器检测的电子束的输出信号和由散射电子束检测器检测的电子束的输出信号来分析待分析物体的元件。 此外，本发明存在于包含上述极限分析仪的扫描透射电子显微镜中; 电子束源; 电子束扫描线圈; 散射电子束检测器; 物镜; 聚焦镜头; 放大磁场透镜; 和聚焦调整电磁透镜。 此外，最终分析器或扫描透射电子显微镜可以包括控制单元，其使得可以实时地观察由散射电子束检测器检测和形成的元件分布的图像和STEM图像两者， 并且通过由散射电子束检测器检测和形成的STEM图像校正元件分布的图像。

公开(公告)号：US20030085356A1

公开(公告)日：2003-05-08

申请号：US10196577

申请日：2002-07-17

发明人： Kazutoshi Kaji ,  Takashi Aoyama ,  Shunroku Taya ,  Hiroyuki Tanaka ,  Shigeto Isakozawa

IPC分类号： H01J037/28 ,  G01N023/04

CPC分类号： G01N23/04 ,  G01N23/20 ,  H01J37/05 ,  H01J37/244 ,  H01J37/256 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/24495 ,  H01J2237/2522 ,  H01J2237/2802 ,  H01J2237/2804 ,  H01J2237/2809

摘要： An object of the present invention is to provide an ultimate analyzer which can display an element distribution image of an object to be analyzed with high contrast to determine the positions of the element distribution with high accuracy, and a scanning transmission electron microscope and a method of analyzing elements using the ultimate analyzer. The present invention exists in an ultimate analyzer comprising a scattered electron beam detector for detecting an electron beam scattered by an object to be analyzed; an electron spectrometer for energy dispersing an electron beam transmitted through the object to be analyzed; an electron beam detector for detecting said dispersed electron beam; and a control unit for analyzing elements of the object to be analyzed based on an output signal of the electron beam detected by the electron beam detector and an output signal of the electron beam detected by the scattered electron beam detector. Further, the present invention exists in a scanning transmission electron microscope comprising the above ultimate analyzer; an electron beam source; an electron beam scanning coil; a scattered electron beam detector; objective lenses; a focusing lens; a magnifying magnetic field lens; and a focus adjusting electromagnetic lens. Furthermore, the ultimate analyzer or the scanning transmission electron microscope may comprises a control unit which makes it possible that both of an image of element distribution and an STEM image detected and formed by the scatted electron beam detector are observed at a time in real time, and the image of element distribution is corrected by the STEM image detected and formed by the scattered electron beam detector.