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公开(公告)号：US20090058268A1
公开(公告)日：2009-03-05
申请号：US11914840
申请日：2006-09-29
CPC分类号： B82Y30/00 , B82Y20/00 , H01L51/5253 , H01L2251/5315 , H01L2251/5369
摘要： Provided is a top emission type organic EL display, more specifically, an organic EL display having a specific sealing film and improved light extracting efficiency. The organic EL display provided with a top emission type organic EL element having the sealing film including a transparent inorganic material is characterized in that the density of a transparent inorganic material for an inner layer of the sealing film is lower than the density of a transparent inorganic material for an outer layer of the sealing film. The transparent inorganic material is silicon oxide, silicon nitride, silicon oxynitride, aluminum nitride or the like. Thus, the low power consumption organic EL display is provided.
摘要翻译： 提供了顶部发射型有机EL显示器，更具体地，具有特定密封膜的有机EL显示器和改进的光提取效率。 具有包括透明无机材料的密封膜的顶部发射型有机EL元件的有机EL显示器的特征在于，密封膜内层的透明无机材料的密度低于透明无机材料的密度 用于密封膜外层的材料。 透明无机材料是氧化硅，氮化硅，氮氧化硅，氮化铝等。 因此，提供了低功耗有机EL显示器。
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公开(公告)号：US08080935B2
公开(公告)日：2011-12-20
申请号：US11914840
申请日：2006-09-29
CPC分类号： B82Y30/00 , B82Y20/00 , H01L51/5253 , H01L2251/5315 , H01L2251/5369
摘要： Provided is a top emission type organic EL display, more specifically, an organic EL display having a specific sealing film and improved light extracting efficiency. The organic EL display provided with a top emission type organic EL element having the sealing film including a transparent inorganic material is characterized in that the density of a transparent inorganic material for an inner layer of the sealing film is lower than the density of a transparent inorganic material for an outer layer of the sealing film. The transparent inorganic material is silicon oxide, silicon nitride, silicon oxynitride, aluminum nitride or the like. Thus, the low power consumption organic EL display is provided.
摘要翻译： 提供了顶部发射型有机EL显示器，更具体地，具有特定密封膜的有机EL显示器和改进的光提取效率。 具有包括透明无机材料的密封膜的顶部发射型有机EL元件的有机EL显示器的特征在于，密封膜内层的透明无机材料的密度低于透明无机材料的密度 用于密封膜外层的材料。 透明无机材料是氧化硅，氮化硅，氮氧化硅，氮化铝等。 因此，提供了低功耗有机EL显示器。
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公开(公告)号：US06635330B2
公开(公告)日：2003-10-21
申请号：US10238087
申请日：2002-09-09
IPC分类号： B05B100
CPC分类号： C23C14/505 , H01J9/20 , H01K3/005 , Y10T428/131 , Y10T428/2991 , Y10T428/8305
摘要： The present invention provides a method for forming thin films, wherein thin films with a uniform thickness can be formed on substrates as objects such as spheroids, even when the films are formed by conventional film-formation methods using an incident particle beam coming from a specific direction (e.g., evaporation and sputtering). In the method, thin films are formed on substrates such as spheroids with an incident particle beam coming from a particle source located in a specific direction by performing a spin motion together with a swing motion. The spin motion is a rotation of the substrate at a constant angular velocity about the spheroidal axis. The swing motion is a rotational oscillation of the same substrate for rotationally oscillating the axis at a constant cycle in one surface, where the center of the rotational oscillation is in the vicinity of the midpoint between two focal points on the axis of the spheroid. As a result, thin films with a uniform thickness in both the peripheral direction of the substrate and in the rotational axis direction of the spin motion can be formed even on substrates including spheroids.
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4.发明授权Method for forming thin film, spheroid coated with thin film, light bulb using the spheroid and equipment for film formation 失效薄膜形成方法，涂有薄膜的球体，使用球体的灯泡和用于成膜的设备公开(公告)号：US06472022B1
公开(公告)日：2002-10-29
申请号：US09537622
申请日：2000-03-29
IPC分类号： B05B100
CPC分类号： C23C14/505 , H01J9/20 , H01K3/005 , Y10T428/131 , Y10T428/2991 , Y10T428/8305
摘要： The present invention provides a method for forming thin films, wherein thin films with a uniform thickness can be formed on substrates as objects such as spheroids, even when the films are formed by conventional film-formation methods using an incident particle beam coming from a specific direction (e.g., evaporation and sputtering). In the method, thin films are formed on substrates such as spheroids with an incident particle beam coming from a particle source located in a specific direction by performing a spin motion together with a swing motion. The spin motion is a rotation of the substrate at a constant angular velocity about the spheroidal axis. The swing motion is a rotational oscillation of the same substrate for rotationally oscillating the axis at a constant cycle in one surface, where the center of the rotational oscillation is in the vicinity of the midpoint between two focal points on the axis of the spheroid. As a result, thin films with a uniform thickness in both the peripheral direction of the substrate and in the rotational axis direction of the spin motion can be formed even on substrates including spheroids.
摘要翻译： 本发明提供了一种形成薄膜的方法，其中，即使当使用来自特定的粒子束的入射粒子束的常规成膜方法形成膜时，也可以在诸如球体的物体的基板上形成具有均匀厚度的薄膜 方向（如蒸发和溅射）。 在该方法中，通过与摆动运动一起执行旋转运动，在具有来自位于特定方向的粒子源的入射粒子束的基底上形成薄膜，例如球体。 旋转运动是围绕球球轴以恒定角速度旋转基底。 摆动是同一基板的旋转振动，用于在一个表面中以恒定周期旋转轴的旋转振动，其中旋转振荡的中心在球体的轴线上的两个焦点之间的中点附近。 结果，即使在包括球体的基板上也可以形成在基板的圆周方向上和旋转轴的旋转轴方向上具有均匀厚度的薄膜。
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公开(公告)号：US5865961A
公开(公告)日：1999-02-02
申请号：US578030
申请日：1995-12-26
IPC分类号： C23C14/35
CPC分类号： C23C14/35
摘要： A magnetron sputtering apparatus has a plurality of ring-shaped flat targets with different diameters disposed about one center axis. The apparatus includes magnets having the same polarity as each other and placed on both front surface side and rear surface side of each of the targets along an inner circumferential edge thereof, and magnets having the same polarity as each other and placed on both front surface side and rear surface side of each of the targets along an outer circumferential edge thereof. The magnets placed along the inner and outer circumferential edges are placed in such a way that the magnets along the inner circumferential edge and the magnets along the outer circumferential edge become opposite in polarity to each other.
摘要翻译： 磁控溅射装置具有围绕一个中心轴设置的多个具有不同直径的环形平板靶。 该装置包括彼此极性相同并且沿着其内圆周边缘放置在每个靶的前表面侧和后表面侧上的磁体，以及彼此具有相同极性的磁体并且放置在两个前表面侧 并且每个靶的后表面侧沿着其外圆周边缘。 沿着内周缘和外周边缘放置的磁体以这样的方式放置，使得沿着内圆周边缘的磁体和沿着外圆周边缘的磁体彼此极性相反。
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公开(公告)号：US5403457A
公开(公告)日：1995-04-04
申请号：US111055
申请日：1993-08-24
申请人： Kumio Nago , Isamu Aokura , Hitoshi Yamanishi , Koichi Osano , Hiroshi Sakakima , Toshiyuki Suemitsu
发明人： Kumio Nago , Isamu Aokura , Hitoshi Yamanishi , Koichi Osano , Hiroshi Sakakima , Toshiyuki Suemitsu
CPC分类号： B82Y25/00 , B82Y40/00 , G11B5/147 , H01F41/18 , H01F41/302 , Y10T29/49034
摘要： The method of the invention provides a soft magnetic film having a high saturation magnetic flux density and an anisotropy of high magnetic permeability suitable for use in various types of magnetic heads at a high production yield by use of a sputtering apparatus provided with a sputtering electrode, which has permanent magnets arranged above a target 1 mainly of Fe or Co in such a way that lines of magnetic force 3 generated by said permanent magnets are in parallel to the surface of said target 1 and to the center line of said target 1 and have a magnetic strength pattern symmetric with respect to said center line while the lines of magnetic force to the right of said center line are of a reverse direction to those to the left of said center line.
摘要翻译： 本发明的方法通过使用具有溅射电极的溅射装置，提供了一种具有高饱和磁通密度和高磁导率的各向异性的软磁性膜，其适用于各种类型的磁头，以高产率生产， 其具有主要以Fe或Co布置在目标1上方的永磁体，使得由所述永磁体产生的磁力线3平行于所述目标1的表面和所述目标1的中心线并且具有 相对于所述中心线对称的磁强度图案，而所述中心线右侧的磁力线与所述中心线左侧的磁力线相反。
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7.发明授权Method for forming thin film, spheroid coated with thin film, light bulb using the spheroid and equipment for film formation 失效薄膜形成方法，涂有薄膜的球体，使用球体的灯泡和用于成膜的设备公开(公告)号：US06726816B2
公开(公告)日：2004-04-27
申请号：US10238092
申请日：2002-09-09
IPC分类号： C25D1728
CPC分类号： C23C14/505 , H01J9/20 , H01K3/005 , Y10T428/131 , Y10T428/2991 , Y10T428/8305
摘要： The present invention provides a method for forming thin films, wherein thin films with a uniform thickness can be formed on substrates as objects such as spheroids, even when the films are formed by conventional film-formation methods using an incident particle beam coming from a specific direction (e.g., evaporation and sputtering). In the method, thin films are formed on substrates such as spheroids with an incident particle beam coming from a particle source located in a specific direction by performing a spin motion together with a swing motion. The spin motion is a rotation of the substrate at a constant angular velocity about the spheroidal axis. The swing motion is a rotational oscillation of the same substrate for rotationally oscillating the axis at a constant cycle in one surface, where the center of the rotational oscillation is in the vicinity of the midpoint between two focal points on the axis of the spheroid. As a result, thin films with a uniform thickness in both the peripheral direction of the substrate and in the rotational axis direction of the spin motion can be formed even on substrates including spheroids.
摘要翻译： 本发明提供了一种形成薄膜的方法，其中，即使当使用来自特定的粒子束的入射粒子束的常规成膜方法形成膜时，也可以在诸如球体的物体的基板上形成具有均匀厚度的薄膜 方向（如蒸发和溅射）。 在该方法中，通过与摆动运动一起执行旋转运动，在具有来自位于特定方向的粒子源的入射粒子束的基底上形成薄膜，例如球体。 旋转运动是围绕球球轴以恒定角速度旋转基底。 摆动是同一基板的旋转振动，用于在一个表面中以恒定周期旋转轴的旋转振动，其中旋转振荡的中心在球体的轴线上的两个焦点之间的中点附近。 结果，即使在包括球体的基板上也可以形成在基板的圆周方向上和旋转轴的旋转轴方向上具有均匀厚度的薄膜。
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公开(公告)号：US06231726B1
公开(公告)日：2001-05-15
申请号：US09471512
申请日：1999-12-23
IPC分类号： C23C1434
CPC分类号： H01L21/67109 , C23C14/505 , C23C14/541 , H01J37/34 , H01J2237/20214
摘要： The plasma processing apparatus includes a substrate table 10 that extends from a wall of the vacuum chamber 1 toward the inside of the vacuum chamber 1. A rotary holder 8, to which the substrate 5 is mounted, is arranged in a concave portion 10a that is provided in the substrate table 10. The rotary holder 8 is rotatably supported with its periphery being sealed with a sealing member 10b. Blades 9 are provided inside the rotary holder 8. A supply port 11 and a drainage port 12, for supplying and draining a fluid such that a rotation force is exerted on the blades 9, are formed in the substrate table 10. Supplying a fluid through the supply port 11 cools the substrate 5 while causing it to rotate.
摘要翻译： 等离子体处理装置包括从真空室1的壁朝向真空室1的内部延伸的基板台10.安装有基板5的旋转保持器8配置在凹部10a中 设置在基板台10中。旋转保持器8被可旋转地支撑，其周边被密封构件10b密封。 叶片9设置在旋转保持器8的内部。在基板台10中形成有用于在叶片9上施加旋转力而供给和排出流体的供给口11和排出口12.供给流体 供给口11在使基板5旋转的同时冷却基板5。
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公开(公告)号：US5512156A
公开(公告)日：1996-04-30
申请号：US265019
申请日：1994-06-24
CPC分类号： H01J37/3455 , C23C14/35 , H01J37/3408
摘要： A magnetron sputtering electrode assembly which is used in a sputtering system having a rectangular flat-plate target, includes permanent magnets arranged along the longitudinal edges of the target to pass lines of magnetic forces in parallel to the surface of the rectangular flat-plate target, and a driving device for reversing polarity of the magnets to change by 180 degrees the direction of the lines of magnetic force caused by the permanent magnets passing in parallel to the surface of the rectangular flat-plate target.
摘要翻译： 在具有矩形平板靶的溅射系统中使用的磁控溅射电极组件包括沿着靶的纵向边缘布置的永磁体，以平行于矩形平板靶的表面传递磁力线， 以及驱动装置，用于使磁铁的极性反转，使永磁体平行于矩形平板靶的表面产生的磁力线的方向变化180度。
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