公开(公告)号：US06618218B1

公开(公告)日：2003-09-09

申请号：US09655342

申请日：2000-09-05

申请人： Hidejiro Kadowaki ,  Ko Ishizuka ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

发明人： Hidejiro Kadowaki ,  Ko Ishizuka ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

IPC分类号： G11B5596

CPC分类号： G11B5/59633

摘要： An apparatus for detecting the relative displacement of a surface to be detected, and an apparatus and method for recording information on a hard disc of a hard disk drive using such a detecting apparatus, the detecting apparatus comprising an interference optical system for condensing a light beam on the surface to be detected, and making the reflected light from the surface to be detected interfere with the condensed light beam to thereby form an interference light beam, light receiving means for receiving the interference light beam and outputting bright and dark signals attributable to the relative displacement of the surface to be detected, and condensed light information supplying means for separating part of the reflected light from the surface to be detected from the optical path until the reflected light arrives at said light receiving means, and utilizing the separated light beam to detect the condensed state of the incident light beam onto the surface to be detected or make the condensed state observable.

摘要翻译： 一种用于检测待检测表面的相对位移的装置，以及用于使用这种检测装置在硬盘驱动器的硬盘上记录信息的装置和方法，所述检测装置包括：干涉光学系统，用于将光束 在要检测的表面上，并且使来自被检测表面的反射光与聚光光束干涉，从而形成干涉光束;光接收装置，用于接收干涉光束并输出归因于 要被检测的表面的相对位移，以及聚光信息提供装置，用于从反射光到达所述光接收装置，将从所述光路的待检测表面反射的光的一部分分离，并将所分离的光束 将入射光束的凝聚状态检测到待检测或制作的表面上 浓缩态可观察。

公开(公告)号：US06473184B1

公开(公告)日：2002-10-29

申请号：US09562434

申请日：2000-05-01

申请人： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

发明人： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

IPC分类号： G01B902

CPC分类号： G01B9/02081 ,  G01B9/02057 ,  G01B2290/30 ,  G01B2290/45 ,  G01B2290/70

摘要： An interferometer has a semiconductor laser which oscillates in multiple modes, an optical member for providing a beam from the semiconductor laser with a substantial optical path difference between optical paths partially in one beam, and an interference optical system for causing interference, using the beam having traveled via the optical member.

摘要翻译： 干涉仪具有以多个模式振荡的半导体激光器，用于提供来自半导体激光器的光束的光学部件在一个光束中部分地在光路之间具有实质光程差的光学部件和用于引起干涉的干涉光学系统，使用具有 通过光学构件行进。

公开(公告)号：US07375820B2

公开(公告)日：2008-05-20

申请号：US11335565

申请日：2006-01-20

申请人： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

发明人： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

IPC分类号： G01B11/14

CPC分类号： G01B9/02081 ,  G01B9/02057 ,  G01B2290/30 ,  G01B2290/70 ,  G01D5/344

摘要： Interference measuring apparatus having an optical system for dividing a coherent light beam into two light beams, and causing the divided two light beams to pass along discrete optical paths. The light beams are made into linearly polarized light beams orthogonal to each other and given modulation to the phase of the wave front of at least one of them. The wave fronts of the linearly polarized light beams are superposed one upon the others. A light dividing member divides the light beams superposed one upon the other by the optical system into a plurality of light beams. A polarizing plate takes out each light beam with a 45° polarized component, and a plurality of light receiving elements individually receive the light beams taken out by the polarizing plate.

摘要翻译： 干涉测量装置具有用于将相干光束分成两束光束的光学系统，并且使分离的两束光束沿分离的光路通过。 光束被制成彼此正交的线偏振光束，并且对它们中的至少一个的波前的相位进行调制。 线性偏振光束的波前与其他波
数重叠。 光分割部件通过光学系统将彼此重叠的光束分成多个光束。 偏振片以45°偏振分量取出每个光束，并且多个光接收元件分别接收由偏振片取出的光束。

公开(公告)号：US07034947B2

公开(公告)日：2006-04-25

申请号：US10425680

申请日：2003-04-30

申请人： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

发明人： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

IPC分类号： G01B9/02

CPC分类号： G01B9/02081 ,  G01B9/02057 ,  G01B2290/30 ,  G01B2290/70 ,  G01D5/344

摘要： Interference measuring apparatus for detecting a plurality of different interference phase signals. The apparatus has a light dividing member for dividing linearly polarized light beams superposed one upon another into a plurality of light beams. The apparatus also includes a light transmitting member with a plurality of light passing portions having different light transmitting properties in conformity with the incidence positions of the plurality of light beams divided by the light dividing member. In addition, the apparatus has a polarizing plate to receive the plurality of light beams that passed through the light transmitting member.

摘要翻译： 用于检测多个不同干涉相位信号的干涉测量装置。 该装置具有用于将彼此重叠的线偏振光束分成多个光束的分光部件。 该装置还包括具有多个光通过部分的透光部件，其具有与由光分割部件分割的多个光束的入射位置一致的透光性能不同。 此外，该装置具有用于接收穿过透光构件的多个光束的偏振板。

公开(公告)号：US20060114474A1

公开(公告)日：2006-06-01

申请号：US11335565

申请日：2006-01-20

申请人： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

发明人： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

IPC分类号： G01B9/02

CPC分类号： G01B9/02081 ,  G01B9/02057 ,  G01B2290/30 ,  G01B2290/70 ,  G01D5/344

摘要： An interference measuring apparatus has an optical system for dividing a coherent light beam into two light beams, causing the divided two light beams to pass along discrete optical paths and making them into linearly polarized light beams orthogonal to each other and given modulation to the phase of the wave front of at least one of them, and again superposing the wave fronts of the linearly polarized light beams one upon the other, a light dividing member for dividing the light beams superposed one upon the other by the optical system into a plurality of light beams, a rock crystal plate formed with a predetermined level difference in conformity with the incidence positions of the plurality of light beams, a polarizing plate for taking out each light beam transmitted through the rock crystal plate with a 45° polarized component, and a plurality of light receiving elements for individually receiving the light beams taken out by the polarizing plate, a plurality of different interference phase signals being provided by the reception of lights of the light receiving elements.

摘要翻译： 干涉测量装置具有用于将相干光束分成两束光束的光学系统，使得分离的两束光束沿着分离的光路通过并使它们成为彼此正交的线偏振光束，并且将相位调制到 它们中的至少一个的波前，并且一直彼此叠加线偏振光束的波阵面，用于将由光学系统彼此重叠的光束分成多个光的分光部件 梁，形成有与多个光束的入射位置一致的预定水平差的岩石晶体板，用于取出以45°偏振分量透射通过岩石晶体板的每个光束的偏振板，以及多个 的用于单独接收由偏振板取出的光束的光接收元件，具有多个不同的干涉 通过接收光接收元件的光提供nce相位信号。

公开(公告)号：US06674066B1

公开(公告)日：2004-01-06

申请号：US09550165

申请日：2000-04-14

申请人： Yasushi Kaneda ,  Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

发明人： Yasushi Kaneda ,  Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

IPC分类号： G01D534

CPC分类号： G01D5/36

摘要： An optical type encoder includes a light-emitting element, a scale, a light receiving element for detecting light from the scale when a light beam from the light-emitting element is projected onto the scale, an incremental signal resulting from displacement of the scale being obtained by detection by the light receiving element, two or more mark portions for producing an origin signal formed on the scale, and an origin detecting system for detecting the mark portions for producing the origin signal. The rising position or the falling position of at least one pulse signal indicative of the origin is determined by the detection signals of the two or more mark portions for producing the origin signal by the origin detecting system.

摘要翻译： 光学型编码器包括发光元件，刻度尺，用于当来自发光元件的光束投射到刻度上时用于检测来自刻度的光的光接收元件，由标尺的位移产生的增量信号 通过光接收元件的检测获得的两个或更多个用于产生在刻度上形成的原点信号的标记部分，以及用于检测用于产生原点信号的标记部分的原点检测系统。 指示原点的至少一个脉冲信号的上升位置或下降位置由用于由原点检测系统产生原点信号的两个或更多个标记部分的检测信号确定。

公开(公告)号：US06657181B1

公开(公告)日：2003-12-02

申请号：US09523312

申请日：2000-03-10

申请人： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

发明人： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

IPC分类号： G01J2126

CPC分类号： G01B9/02081 ,  G01B9/02057 ,  G01B2290/30 ,  G01B2290/70 ,  G01D5/344

摘要： An interference measuring apparatus has an optical system for dividing a coherent light beam into two light beams, causing the divided two light beams to pass along discrete optical paths and making them into linearly polarized light beams orthogonal to each other and given modulation to the phase of the wave front of at least one of them, and again superposing the wave fronts of the linearly polarized light beams one upon the other, a light dividing member for dividing the light beams superposed one upon the other by the optical system into a plurality of light beams, a rock crystal plate formed with a predetermined level difference in conformity with the incidence positions of the plurality of light beams, a polarizing plate for taking out each light beam transmitted through the rock crystal plate with a 45° polarized component, and a plurality of light receiving elements for individually receiving the light beams taken out by the polarizing plate, a plurality of different interference phase signals being provided by the reception of lights of the light receiving elements.

摘要翻译： 干涉测量装置具有用于将相干光束分成两束光束的光学系统，使得分离的两束光束沿着分离的光路通过并使它们成为彼此正交的线偏振光束，并且将相位调制到 它们中的至少一个的波前，并且一直彼此叠加线偏振光束的波阵面，用于将由光学系统彼此重叠的光束分成多个光的分光部件 梁，形成有与多个光束的入射位置一致的预定水平差的岩石晶体板，用于取出以45°偏振分量透射通过岩石晶体板的每个光束的偏振板，以及多个 的用于单独接收由偏振板取出的光束的光接收元件，具有多个不同的干涉 通过接收光接收元件的光提供nce相位信号。

公开(公告)号：US07554671B2

公开(公告)日：2009-06-30

申请号：US11459861

申请日：2006-07-25

申请人： Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato

发明人： Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato

IPC分类号： G01B11/02

CPC分类号： G01B9/02012 ,  G01B9/02007 ,  G01B9/02018 ,  G01B9/0209 ,  G01B2290/45 ,  G01B2290/70

摘要： A first beam having high coherence and a second beam having low coherence and having a central wavelength difference from that of the first beam are multiplexed onto the same optical axis. First and second multiplexed beams obtained by beam splitting are emitted at a measurement reflection plane and a reference plane, respectively. The reflected first and second multiplexed beams are multiplexed and interfere with each other. The interference generates a first interference signal that is obtained from the first beams at the interference unit and that relates to information on the distance to the measurement reflection plane and a second interference signal that is obtained from the second beams. The first and second interference signals are used to carry out calculations for determining the position of a measurement origin for the measurement reflection plane.

摘要翻译： 具有高相干性的第一光束和具有低相干性并且具有与第一光束的中心波长不同的第二光束被复用到同一光轴上。 通过分束获得的第一和第二多路复用波束分别在测量反射平面和参考平面处发射。 反射的第一和第二多路复用波束被多路复用并彼此干扰。 干扰产生从干扰单元的第一波束获得的第一干扰信号，其涉及到与测量反射平面的距离的信息和从第二波束获得的第二干扰信号。 第一和第二干涉信号用于执行用于确定测量反射平面的测量原点的位置的计算。

公开(公告)号：US20070024863A1

公开(公告)日：2007-02-01

申请号：US11459861

申请日：2006-07-25

申请人： Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato

发明人： Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato

IPC分类号： G01B11/02

CPC分类号： G01B9/02012 ,  G01B9/02007 ,  G01B9/02018 ,  G01B9/0209 ,  G01B2290/45 ,  G01B2290/70

摘要： A first beam having high coherence and a second beam having low coherence and having a central wavelength difference from that of the first beam are multiplexed onto the same optical axis. First and second multiplexed beams obtained by beam splitting are emitted at a measurement reflection plane and a reference plane, respectively. The reflected first and second multiplexed beams are multiplexed and interfere with each other. The interference generates a first interference signal that is obtained from the first beams at the interference unit and that relates to information on the distance to the measurement reflection plane and a second interference signal that is obtained from the second beams. The first and second interference signals are used to carry out calculations for determining the position of a measurement origin for the measurement reflection plane.

摘要翻译： 具有高相干性的第一光束和具有低相干性并且具有与第一光束的中心波长不同的第二光束被复用到同一光轴上。 通过分束获得的第一和第二多路复用波束分别在测量反射平面和参考平面处发射。 反射的第一和第二多路复用波束被多路复用并彼此干扰。 干扰产生从干扰单元的第一波束获得的第一干扰信号，其涉及到与测量反射平面的距离的信息和从第二波束获得的第二干扰信号。 第一和第二干涉信号用于执行用于确定测量反射平面的测量原点的位置的计算。

公开(公告)号：US07551290B2

公开(公告)日：2009-06-23

申请号：US11459851

申请日：2006-07-25

申请人： Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato

发明人： Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato

IPC分类号： G01B9/02

CPC分类号： G01B9/0209 ,  G01B9/02007 ,  G01B2290/45 ,  G01B2290/70

摘要： A first beam having high coherence and a second beam having low coherence are multiplexed onto the same optical axis. This multiplexed beam is split into first and second multiplexed beams. The first multiplexed beam is directed towards a measurement reflection plane of an object to be measured, and the second multiplexed beam is directed towards a reference plane. The first and second multiplexed beams that are reflected from the measurement reflection plane and the reference plane, respectively, are multiplexed to cause the first beams to interfere with each other and the second beams to interfere with each other. Calculations are carried out to determine a measurement origin on the basis of the first and second interference signals obtained from the first and second beams, respectively.

摘要翻译： 具有高相干性的第一光束和具有低相干性的第二光束被复用到相同的光轴上。 该多路复用波束被分成第一和第二多路波束。 第一多路复用波束指向待测对象的测量反射平面，并且第二多路复用波束指向参考平面。 分别从测量反射平面和参考平面反射的第一和第二多路复用波束被多路复用以使第一波束彼此干扰并且第二波束相互干扰。 基于从第一和第二光束获得的第一和第二干涉信号分别进行计算以确定测量原点。