公开(公告)号：US08098415B2

公开(公告)日：2012-01-17

申请号：US12503511

申请日：2009-07-15

申请人： Isaku Kanno ,  Hidetoshi Kotera ,  Manabu Murayama ,  Hitoshi Fujii

发明人： Isaku Kanno ,  Hidetoshi Kotera ,  Manabu Murayama ,  Hitoshi Fujii

IPC分类号： G02B26/08

CPC分类号： G02B26/0858 ,  B81B3/004 ,  B81B2201/042 ,  B81B2203/0109 ,  G02B26/101 ,  H04N1/1017 ,  H04N1/193 ,  H04N2201/0428 ,  H04N2201/0458

摘要： A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film.

摘要翻译： 振动镜元件包括基底构件，由金属制成的基底，与镜部一体地形成，可动部分从两侧可摆动地支撑镜部分并用作下电极;以及安装部分，其支撑可移动部分并安装 在基底构件上，设置在基板的可动部分上并通过施加周期性电压振动镜部分的压电膜和设置在压电膜上的上电极。

公开(公告)号：US08917434B2

公开(公告)日：2014-12-23

申请号：US13519580

申请日：2010-12-20

申请人： Hidetoshi Kotera ,  Isaku Kanno ,  Manabu Murayama ,  Hitoshi Fujii

发明人： Hidetoshi Kotera ,  Isaku Kanno ,  Manabu Murayama ,  Hitoshi Fujii

IPC分类号： G02B26/08 ,  G02B26/10

CPC分类号： G02B26/0841 ,  G02B26/0858 ,  G02B26/101

摘要： There is provided a vibrating mirror element capable of inhibiting flexural deformation of a support portion. This vibrating mirror element (100) includes a mirror portion (10), a deformable driving portion (41, 43, 45, 51, 53, 55), and a support portion (42, 44, 46, 52, 54, 56) connected with a first connecting portion (41c, 43d, 45d, 51c, 53d, 55d) of the driving portion on the side of a first end portion (42a, 44a, 46a, 52a, 54a, 56a), while the thickness of the support portion is larger than the thickness of the driving portion.

摘要翻译： 提供了能够抑制支撑部的弯曲变形的振动镜元件。 该振动镜元件（100）包括镜部分（10），可变形驱动部分（41,43,45,51,53,55）和支撑部分（42,44,46,52,54,56） 与第一端部（42a，44a，46a，52a，54a，56a）侧的驱动部分的第一连接部分（41c，43d，45d，51c，53d，55d）连接， 支撑部分大于驱动部分的厚度。

公开(公告)号：US20120320440A1

公开(公告)日：2012-12-20

申请号：US13519580

申请日：2010-12-20

申请人： Hidetoshi Kotera ,  Isaku Kanno ,  Manabu Murayama ,  Hitoshi Fujii

发明人： Hidetoshi Kotera ,  Isaku Kanno ,  Manabu Murayama ,  Hitoshi Fujii

IPC分类号： G02B26/10 ,  B29D11/00

CPC分类号： G02B26/0841 ,  G02B26/0858 ,  G02B26/101

摘要： There is provided a vibrating mirror element capable of inhibiting flexural deformation of a support portion. This vibrating mirror element (100) includes a mirror portion (10), a deformable driving portion (41, 43, 45, 51, 53, 55), and a support portion (42, 44, 46, 52, 54, 56) connected with a first connecting portion (41c, 43d, 45d, 51c, 53d, 55d) of the driving portion on the side of a first end portion (42a, 44a, 46a, 52a, 54a, 56a), while the thickness of the support portion is larger than the thickness of the driving portion.

摘要翻译： 提供了能够抑制支撑部的弯曲变形的振动镜元件。 该振动镜元件（100）包括镜部分（10），可变形驱动部分（41,43,45,51,53,55）和支撑部分（42,44,46,52,54,56） 与第一端部（42a，44a，46a，52a，54a，56a）侧的驱动部分的第一连接部分（41c，43d，45d，51c，53d，55d）连接， 支撑部分大于驱动部分的厚度。

公开(公告)号：US20100014143A1

公开(公告)日：2010-01-21

申请号：US12503511

申请日：2009-07-15

申请人： Isaku Kanno ,  Hidetoshi Kotera ,  Manabu Murayama ,  Hitoshi Fujii

发明人： Isaku Kanno ,  Hidetoshi Kotera ,  Manabu Murayama ,  Hitoshi Fujii

IPC分类号： G02B26/08 ,  G02B26/10

CPC分类号： G02B26/0858 ,  B81B3/004 ,  B81B2201/042 ,  B81B2203/0109 ,  G02B26/101 ,  H04N1/1017 ,  H04N1/193 ,  H04N2201/0428 ,  H04N2201/0458

摘要： A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film.

摘要翻译： 振动镜元件包括基底构件，由金属制成的基底，与镜部一体地形成，可动部分从两侧可摆动地支撑镜部分并用作下电极;以及安装部分，其支撑可移动部分并安装 在基底构件上，设置在基板的可动部分上并通过施加周期性电压振动镜部分的压电膜和设置在压电膜上的上电极。

公开(公告)号：US08867114B2

公开(公告)日：2014-10-21

申请号：US13520411

申请日：2010-12-24

申请人： Isaku Kanno ,  Hidetoshi Kotera ,  Manabu Murayama ,  Naoki Inoue

发明人： Isaku Kanno ,  Hidetoshi Kotera ,  Manabu Murayama ,  Naoki Inoue

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： This vibrating mirror element (100) includes a mirror portion (10), a first driving portion (41), being cantilevered, including a first fixed end (41a) formed on a first side of a first direction and a first free end (41b) formed on a second side thereof, and linearly extending, a first mirror support portion (46) capable of supporting the mirror portion (10) in an inclined state, a second driving portion (51), being cantilevered, including a second fixed end (51a) formed on the second side of the first direction and a second free end (51b) formed on the first side thereof, being point-symmetrical to the first driving portion with respect to the center of a mirror, and linearly extending, and a second mirror support portion (56) being point-symmetrical to the first mirror support portion with respect to the center of the mirror and capable of supporting the mirror portion in an inclined state.

摘要翻译： 该振动镜元件（100）包括镜部（10），悬臂的第一驱动部（41），包括形成在第一方向的第一侧上的第一固定端（41a）和第一自由端（41b） ），其形成在其第二侧上并线性延伸，能够以倾斜状态支撑所述镜部（10）的第一反射镜支撑部（46），悬臂的第二驱动部（51），包括第二固定端 形成在第一方向的第二侧上的第一自由端（51b）和形成在第一方向上的第二自由端（51b），其相对于反射镜的中心与第一驱动部分对称并且线性延伸，并且 第二反射镜支撑部分（56）相对于反射镜的中心与第一反射镜支撑部分对称，并且能够以倾斜状态支撑反射镜部分。

公开(公告)号：US08482832B2

公开(公告)日：2013-07-09

申请号：US12614817

申请日：2009-11-09

申请人： Hidetoshi Kotera ,  Isaku Kanno ,  Manabu Murayama ,  Naoki Inoue

发明人： Hidetoshi Kotera ,  Isaku Kanno ,  Manabu Murayama ,  Naoki Inoue

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view.

摘要翻译： 该振动镜元件包括反射光的反射镜部分，连接到用于以振动方式支撑镜部分的反射镜部分的可扭转变形的光束部分，以及具有连接部分的驱动部分，用于驱动镜部分通过 扭转变形梁部分。 驱动部分的连接部分的宽度比平面图中连接部分以外的驱动部分的宽度小。

公开(公告)号：US20100149615A1

公开(公告)日：2010-06-17

申请号：US12614817

申请日：2009-11-09

申请人： Hidetoshi Kotera ,  Isaku Kanno ,  Manabu Murayama ,  Naoki Inoue

发明人： Hidetoshi Kotera ,  Isaku Kanno ,  Manabu Murayama ,  Naoki Inoue

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view.

摘要翻译： 该振动镜元件包括反射光的反射镜部分，连接到用于以振动方式支撑镜部分的反射镜部分的可扭转变形的光束部分，以及具有连接部分的驱动部分，用于驱动镜部分通过 扭转变形梁部分。 驱动部分的连接部分的宽度比平面图中连接部分以外的驱动部分的宽度小。

公开(公告)号：US08416484B2

公开(公告)日：2013-04-09

申请号：US12612947

申请日：2009-11-05

申请人： Isaku Kanno ,  Manabu Murayama ,  Hitoshi Fujii

发明人： Isaku Kanno ,  Manabu Murayama ,  Hitoshi Fujii

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： This vibrating mirror element includes a pair of first beam portions supporting a mirror portion in a vibratile manner, a pair of second beam portions connected with the pair of first beam portions respectively, and a pair of driving portions connected with the pair of second beam portions respectively. The mirror portion is arranged in a region surrounded by the pair of second beam portions and the pair of driving portions. The width of the pair of first beam portions and the width of the pair of second beam portions are rendered smaller than the width of the pair of driving portions.

摘要翻译： 该振动镜元件包括以振动方式支撑反射镜部分的一对第一光束部分，分别与一对第一光束部分连接的一对第二光束部分和与该对第二光束部分连接的一对驱动部分 分别。 镜部分布置在由一对第二光束部分和一对驱动部分围绕的区域中。 一对第一光束部分的宽度和一对第二光束部分的宽度变得比一对驱动部分的宽度小。

公开(公告)号：US20080084595A1

公开(公告)日：2008-04-10

申请号：US11907121

申请日：2007-10-09

申请人： Hideki Chouji ,  Shigeo Maeda ,  Hidetoshi Kotera ,  Isaku Kanno

发明人： Hideki Chouji ,  Shigeo Maeda ,  Hidetoshi Kotera ,  Isaku Kanno

IPC分类号： G02B26/08

CPC分类号： G11B7/13925 ,  G02B26/06 ,  G02B26/0825 ,  G11B7/1362

摘要： A variable shape mirror is composed of a substrate, a lower electrode film which is disposed on the substrate, a piezoelectric film which is disposed on the lower electrode film, an upper electrode film which is disposed on the piezoelectric film, an insulating film which is disposed on the upper electrode film, and a mirror film which is disposed on the insulating film. The lower electrode film, the piezoelectric film, and the upper electrode film function as a driving portion to deform the mirror film. The upper electrode film is divided into a plurality of divided electrodes and the driving portion includes a part which performs main deformation of the mirror film and a part which performs fine adjustment of deformation of the mirror film.

摘要翻译： 可变形状镜由基板，设置在基板上的下电极膜，设置在下电极膜上的压电膜，设置在压电膜上的上电极膜，绝缘膜， 设置在上电极膜上，镜面膜设置在绝缘膜上。 下电极膜，压电膜和上电极膜用作使镜面膜变形的驱动部。 上电极膜被分成多个分开的电极，并且驱动部分包括执行镜膜的主要变形的部分和执行镜膜的变形的微调的部分。

公开(公告)号：US20070091482A1

公开(公告)日：2007-04-26

申请号：US11585861

申请日：2006-10-25

申请人： Hideki Chouji ,  Shigeo Maeda ,  Hidetoshi Kotera ,  Isaku Kanno

发明人： Hideki Chouji ,  Shigeo Maeda ,  Hidetoshi Kotera ,  Isaku Kanno

IPC分类号： G02B5/08

CPC分类号： G11B7/13927 ,  G02B26/0825 ,  G11B7/1362

摘要： A variable-shape mirror has a substrate, a lower electrode film formed on the substrate, a piezoelectric film formed on the lower electrode film, an upper electrode film formed on the piezoelectric film, and a mirror film formed directly on the substrate and arranged to be surrounded by a driver portion constituted by the lower electrode film, the piezoelectric film, and the upper electrode film. The mirror film is arranged on a movable portion provided in the substrate, and at least part of the driver portion is arranged on the movable portion.

摘要翻译： 可变形反射镜具有基板，形成在基板上的下电极膜，形成在下电极膜上的压电膜，形成在压电膜上的上电极膜，以及直接形成在基板上的镜膜， 被由下电极膜，压电膜和上电极膜构成的驱动部分包围。 镜膜布置在设置在基板中的可移动部分上，并且驱动器部分的至少一部分布置在可动部分上。