PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
    1.
    发明申请
    PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE 审中-公开
    等离子体处理装置,等离子体处理方法和制造电子装置的方法

    公开(公告)号:US20110092073A1

    公开(公告)日:2011-04-21

    申请号:US12996878

    申请日:2009-06-03

    摘要: A plasma processing apparatus includes: a processing container capable of maintaining an atmosphere having a pressure lower than atmospheric pressure; an evacuation unit reducing a pressure of an interior of the processing container; a gas introduction unit introducing a process gas to the interior of the processing container; a microwave introduction unit introducing a microwave to the interior of the processing container; and a lifter pin ascendably and descendably inserted through a placement platform provided in the interior of the processing container, an end surface of the lifter pin supporting an object to be processed, the object to be processed being supported by the lifter pin at a first position proximal to an upper surface of the placement platform when the microwave is introduced and plasma is ignited, the object to be processed being supported by the lifter pin at a second position after the plasma ignition, the second position being more distal to the placement platform than the first position.

    摘要翻译: 等离子体处理装置包括:能够维持低于大气压的压力的气氛的处理容器; 排气单元减小处理容器内部的压力; 气体导入单元,将处理气体引入到处理容器的内部; 微波引入单元,将微波引入到处理容器的内部; 以及升降销,其通过设置在所述处理容器的内部的配置平台上升和下降地插入,所述升降销的端面支撑待处理物体,所述待处理对象被所述升降销支撑在第一位置 当引入微波并等离子体点燃时,靠近放置平台的上表面,待处理物体在等离子体点火之后的第二位置由提升销支撑,第二位置比放置平台更远 第一名。

    Color television receiver
    2.
    发明授权
    Color television receiver 失效
    彩色电视接收机

    公开(公告)号:US4232332A

    公开(公告)日:1980-11-04

    申请号:US972236

    申请日:1978-12-22

    IPC分类号: H04N9/24

    CPC分类号: H04N9/24

    摘要: A control system for a beam index cathode ray tube momentarily gates or turns off all beam current at the transition from one color modulating signal to another. The resulting dip in the electron beam density, as it scans across an index phosphor stripe located between adjacent color phosphor areas, produces a substantially corresponding dip in the index signal derived from excitation of the index phosphor stripe by the electron beam. The dip in the index signal is detectable as an indication of the phase of the index signal substantially independent of differences in the amplitude of the electron beam current.

    摘要翻译: 用于光束折射率阴极射线管的控制系统在从一个颜色调制信号到另一个颜色调制信号的转变时,瞬时地关闭或关闭所有光束电流。 当电子束密度扫描穿过位于相邻彩色荧光体区域之间的指示磷光体条纹时,所得到的电子束密度的下降产生了通过电子束从指示磷光体条纹的激发得到的指数信号中的大致相应的倾角。 索引信号中的下降可以作为索引信号的相位的指示而被检测,该信号基本上与电子束电流的幅度差异无关。

    Deflection control apparatus for a beam index color cathode ray tube
    3.
    发明授权
    Deflection control apparatus for a beam index color cathode ray tube 失效
    用于光束折射彩色阴极射线管的偏转控制装置

    公开(公告)号:US4287531A

    公开(公告)日:1981-09-01

    申请号:US95557

    申请日:1979-11-19

    IPC分类号: H04N9/24

    CPC分类号: H04N9/24

    摘要: Deflection control apparatus is disclosed for a beam index color television receiver of the type which includes a cathode ray tube adapted to display a video picture in response to a received color television signal. The beam index cathode ray tube is provided with index stripes which are scanned by the electron beam as the beam scans a raster across the display screen of the tube. A detector detects when the respective index stripes are scanned by the beam so as to produce an index signal, the frequency of which varies from a predetermined frequency value when the scanning speed of the beam varies. An oscillator generates an oscillating signal that is synchronized with the index signal, and a phase locked loop, which includes a comparator for comparing the index signal to the oscillating signal so as to produce a control signal as a function of the difference therebetween, adjusts the frequency of the oscillating signal in accordance with that control signal. The television receiver also includes a switching arrangement which is responsive to the oscillating signal to switch color information signals for the purpose of modulating the beam. The deflection control apparatus includes a deflection device for controlling the deflection of the beam; and a deflection signal generator responsive to the control signal produced by the phase-locked loop for supplying deflection control signals to the deflection device so as to vary the deflecting speed of the beam and thereby maintain a substantially constant scanning speed thereof.

    摘要翻译: 公开了一种用于波束折射彩色电视接收机的偏转控制装置,其包括适于响应于接收的彩色电视信号显示视频图像的阴极射线管。 光束折射率阴极射线管设置有索引条纹,当光束扫描穿过管的显示屏幕的光栅时,它们被电子束扫描。 检测器检测各个索引条纹何时被光束扫描,以产生当光束扫描速度变化时其频率从预定频率值变化的索引信号。 振荡器产生与索引信号同步的振荡信号,以及锁相环,其包括用于将索引信号与振荡信号进行比较的比较器,以产生作为它们之间的差的函数的控制信号, 根据该控制信号的振荡信号的频率。 电视接收机还包括开关装置,其响应于振荡信号来切换用于调制波束的目的的颜色信息信号。 偏转控制装置包括用于控制光束偏转的偏转装置; 以及响应于由锁相环产生的控制信号的偏转信号发生器,用于向偏转装置提供偏转控制信号,以便改变光束的偏转速度,从而保持其基本恒定的扫描速度。

    Deflection control apparatus for a beam index color television receiver
    4.
    发明授权
    Deflection control apparatus for a beam index color television receiver 失效
    用于光束折射彩色电视接收机的偏转控制装置

    公开(公告)号:US4636843A

    公开(公告)日:1987-01-13

    申请号:US671955

    申请日:1984-11-16

    CPC分类号: H04N9/24

    摘要: Deflection control apparatus for a beam index color television receiver includes a phase-locked loop for synchronizing an oscillating signal with an index signal generated by an electron beam scanning index stripes on the screen of the cathode ray tube of the receiver. The oscillating signal is supplied to a color switcher so that the scanning electron beam is modulated with color information corresponding to the respective color phosphor stripe being scanned. An error signal representative of the horizontal scanning speed of the beam is supplied to a deflection device to cause the generation of a compensating magnetic field to correct for non-linearities in the scanning speed. A compensation circuit delays the error signal so that the elapsed time from the detection of the scanning of one of the index stripes to the time of generation of the compensating magnetic field in accordance therewith equals one horizontal line period.

    摘要翻译: 用于光束折射彩色电视接收机的偏转控制装置包括用于使振荡信号与由接收器的阴极射线管的屏幕上的电子束扫描指数条纹产生的指标信号同步的锁相环。 将振荡信号提供给颜色切换器,使得扫描电子束被调制为与被扫描的各个彩色荧光条相对应的颜色信息。 表示波束的水平扫描速度的误差信号被提供给偏转装置,以产生补偿磁场来校正扫描速度中的非线性。 补偿电路延迟误差信号,使得从检测到索引条之一的扫描到根据其产生补偿磁场的时间的经过时间等于一个水平行周期。

    Horizontal scanning rate correction apparatus
    5.
    发明授权
    Horizontal scanning rate correction apparatus 失效
    水平扫描率校正装置

    公开(公告)号:US4314179A

    公开(公告)日:1982-02-02

    申请号:US135667

    申请日:1980-03-31

    CPC分类号: H04N3/16 H04N9/24

    摘要: A horizontal scanning rate correction apparatus for a cathode-ray tube, particularly of the beam index color cathode-ray tube type, includes a memory for storing correction values representing deviations of the horizontal scanning rate of the electron beam from a desired scanning rate; a reading circuit for reading the correction values from the memory; a correcting signal forming circuit for sensing fluctuation in the value of a high voltage supplied to an anode of the cathode-ray tube from a high voltage source and for producing a correcting signal in response thereto in accordance with the formula: .DELTA.V(t)=a(V.sub.H (t)-V.sub.HO)-b'x.sub.H .multidot.(d/dt.multidot.V.sub.H (t), where V.sub.H (t) is the instantaneous value of the high voltage, V.sub.HO is a constant value voltage, a and b are constants and X.sub.H corresponds to the amount of electron beam deflection; and a scanning rate modulating circuit supplied with the correction values read by the reading circuit and supplied with the correcting signal for substantially cancelling any deviation in the horizontal scanning rate from the desired rate.

    摘要翻译: 用于阴极射线管的水平扫描速率校正装置,特别是光束折射彩色阴极射线管型的扫描速率校正装置,包括一个用于存储表示电子束的水平扫描速率偏离所需扫描速率的校正值的存储器; 读取电路,用于从存储器读取校正值; 校正信号形成电路,用于感测从高电压源提供给阴极射线管的阳极的高电压值的波动,并根据以下公式产生响应于此的校正信号:DELTA V(t) =(VH(t)-VHO)-b'xHx(d / dtxVH(t))其中VH(t)是高电压的瞬时值,VHO是恒定值电压,a和b是常数,XH 对应于电子束偏转量;以及扫描速率调制电路,由扫描速率调制电路提供读取电路读取的校正值,并提供校正信号,用于基本上取消水平扫描速率的任何偏离所需速率。

    Beam index color television receiver apparatus
    6.
    发明授权
    Beam index color television receiver apparatus 失效
    光束指数彩色电视接收机

    公开(公告)号:US4280134A

    公开(公告)日:1981-07-21

    申请号:US54490

    申请日:1979-07-03

    IPC分类号: H01J29/34 H04N9/24

    CPC分类号: H04N9/24

    摘要: Apparatus for controlling the electron beam in a beam index color television receiver of the type having a cathode ray tube whose display screen is provided with beam-excitable color elements and index elements which are scanned by the beam. The apparatus comprises an index signal generator for generating a periodic index signal as the index elements are scanned by the beam. Color gates are provided for sequentially gating respective color control signals individually to modulate the electron beam as that beam scans the color elements. A gating signal generator generates sequential gating signals at a frequency synchronized with the frequency of the periodic index signal. These gating signals are supplied in sequence to the color gates to control the latter so as to gate the respective color control signals. A driving circuit responds to the periodic index signal to drive the gating signal generator. The driving circuit includes a time adjustment circuit for compensating the inherent time delay of the overall apparatus such that the respective color control signals are gated in time correspondence with the position of the beam at a color element that is associated with the gated color control signal.

    摘要翻译: 用于控制具有阴极射线管的类型的光束折射彩色电视接收机中的电子束的装置,其显示屏幕具有光束可激发色彩元素和由光束扫描的折射元件。 该装置包括索引信号发生器,用于当光束扫描索引元素时产生周期性索引信号。 提供彩色门以分别顺序地选通各个颜色控制信号,以便当该光束扫描色彩元素时调制电子束。 门控信号发生器以与周期性索引信号的频率同步的频率产生顺序门控信号。 这些选通信号依次提供给彩色门,以控制颜色门,以便对相应的颜色控制信号进行门控。 驱动电路响应周期性索引信号来驱动门控信号发生器。 驱动电路包括用于补偿整个装置的固有时间延迟的时间调整电路,使得各个颜色控制信号在与门控颜色控制信号相关联的色彩元素处的时间对应于光束的位置被选通。

    Beam index color cathode ray tube
    7.
    发明授权
    Beam index color cathode ray tube 失效
    光束指示彩色阴极射线管

    公开(公告)号:US4223344A

    公开(公告)日:1980-09-16

    申请号:US969975

    申请日:1978-12-15

    IPC分类号: H04N9/24

    CPC分类号: H04N9/24

    摘要: A beam index color cathode ray tube has index stripes spaced apart across a run-in area of the screen which have a pitch substantially equal to the pitch of index stripes in an image area, and a predetermined number of the index stripes in the run-in area are counted as an electron beam scans them to preset color control circuits to a predetermined condition at the commencement of scanning of the image area. A characteristic of the signal resulting from scanning of the index stripes may be used to begin the counting thereof from a specific one of the index stripes in the run-in area other than the first one encountered by the electron beam.

    摘要翻译: 光束折射彩色阴极射线管具有跨越屏幕的输入区域间隔开的索引条,其具有基本上等于图像区域中的索引条的间距的间距,以及预定数量的图像区域中的索引条, 在图像区域的扫描开始时,计数区域被计数为电子束将它们扫描到预设的颜色控制电路到预定条件。 可以使用由索引条纹扫描产生的信号的特性,从除电子束遇到的第一个以外的导入区域中的特定索引条中开始计数。

    LOCKING MECHANISM FOR COVER
    8.
    发明申请
    LOCKING MECHANISM FOR COVER 审中-公开
    封闭机构

    公开(公告)号:US20070201938A1

    公开(公告)日:2007-08-30

    申请号:US11679652

    申请日:2007-02-27

    申请人: Takashi Hosono

    发明人: Takashi Hosono

    IPC分类号: B41J29/02

    CPC分类号: B41J29/13 B41J29/54

    摘要: A locking mechanism for a cover is provided which locks the cover in a closed state. The locking mechanism includes a slider that is elastically urged in a direction perpendicular to the opening and closing direction of the cover so as to suppress movement of the slider in one direction when the cover is opened. When the cover is closed, the slider is pressed down by the protrusion to release the slider so as to allow the slider to slide, and the engaging portions engage the locking portions of first and second protrusions, respectively, so as to lock the cover.

    摘要翻译: 提供了用于盖的锁定机构,其将盖锁定在关闭状态。 锁定机构包括沿与盖的打开和关闭方向垂直的方向弹性地推动的滑块,以便当打开盖时,抑制滑块在一个方向上的移动。 当盖关闭时,滑块被突起压下以释放滑块以允许滑块滑动,并且接合部分别接合第一和第二突起的锁定部分,以便锁定盖。

    Horizontal scanning rate correction apparatus for beam index color
cathode-ray tube
    9.
    发明授权
    Horizontal scanning rate correction apparatus for beam index color cathode-ray tube 失效
    用于光束折射彩色阴极射线管的水平扫描率校正装置

    公开(公告)号:US4281340A

    公开(公告)日:1981-07-28

    申请号:US99911

    申请日:1979-12-03

    IPC分类号: H04N3/22 H04N9/24

    CPC分类号: H04N9/24

    摘要: Horizontal scanning rate correction apparatus is provided for beam index color cathode-ray tubes of the type having a screen, an electron gun for projecting an electron beam upon the screen, a plurality of index elements positioned to be struck by the electron beam as it scans across the screen, a deflection device for causing the electron beam to repeatedly scan across the screen in a vertical succession of horizontal lines, and an index signal processing circuit for producing an index signal having a frequency determined by the frequency of the incidence of the electron beam upon the index elements as it scans horizontal lines and for controlling color switching circuitry which determines which of a plurality of color signals modulates the intensity of the electron beam. The horizontal scanning rate correction apparatus includes a memory circuit for storing correction values derived from the index signal processing circuit during horizontal scanning by the electron beam and representing the deviation of the horizontal scanning rate from a desired scanning rate at each of a plurality of horizontal sampling positions along a horizontal line. The apparatus further includes circuitry for reading the correction values from the memory circuit and for producing a corresponding signal which is supplied to the electron beam deflection device to substantially cancel deviations in the horizontal scanning rate.

    摘要翻译: 水平扫描速率校正装置用于具有屏幕的类型的光束折射彩色阴极射线管,用于在屏幕上投射电子束的电子枪,多个指示元件,定位成当它扫描时被电子束撞击 横跨屏幕的偏转装置,用于使电子束以垂直方向的一连串水平线重复扫描屏幕;以及索引信号处理电路,用于产生具有由电子入射频率确定的频率的索引信号 在索引元素扫描水平线并且用于控制颜色切换电路时,对索引元素进行光束,该颜色切换电路确定多个彩色信号中的哪一个调制电子束的强度。 水平扫描速率校正装置包括存储电路,用于存储由电子束在水平扫描期间从索引信号处理电路导出的校正值,并且在多个水平采样中的每一个处表示水平扫描速率与期望扫描速率的偏差 沿水平线的位置。 该装置还包括用于从存储器电路读取校正值并产生被提供给电子束偏转装置以基本上消除水平扫描速率偏差的相应信号的电路。

    Beam index color cathode ray tube
    10.
    发明授权
    Beam index color cathode ray tube 失效
    光束指示彩色阴极射线管

    公开(公告)号:US4212030A

    公开(公告)日:1980-07-08

    申请号:US969861

    申请日:1978-12-15

    IPC分类号: H01J31/20 H01J29/34 H04N9/24

    CPC分类号: H04N9/24 H01J2231/121

    摘要: A beam index color cathode ray tube has index stripes spaced apart across a run-in area of the screen and which have a pitch substantially equal to the pitch of index stripes in an image area. A plurality of the index stripes in the run-in area generate an index signal as an electron beam scans them. An index stripe is omitted from the portion of the run-in area nearest the boundary with the image area to provide a characteristic to the index signal which permits generation of a trigger signal to preset color control circuits to a known condition as the electron beam enters the image area. A gating circuit blocks trigger signals which may be generated during scanning of the image area.

    摘要翻译: 光束折射彩色阴极射线管具有跨越屏幕的入射区域间隔开的并且具有基本上等于图像区域中的折射条的间距的间距的折射条。 随着电子束扫描,导入区域中的多个索引条纹产生索引信号。 从与图像区域的边界最接近的部分入口区域中省略索引条纹,以向索引信号提供特征,该索引信号允许在电子束进入时允许产生触发信号以将预设的色彩控制电路设置为已知条件 图像区域。 门控电路阻止在扫描图像区域期间可能产生的触发信号。