公开(公告)号：US09500857B2

公开(公告)日：2016-11-22

申请号：US14449940

申请日：2014-08-01

Applicant: Himax Display, Inc.

Inventor： Hui-Lun Chen ,  Wei-Hsiao Chen ,  Chien-Tang Wang ,  Nan Liu ,  Roland V. Gelder ,  Chun-Hao Su

IPC: G02B26/00 ,  G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0013 ,  B81B3/0021 ,  B81B2201/045

Abstract: A microelectromechanical system (MEMS) device includes a substrate and at least one MEMS unit disposed on the substrate. The MEMS unit includes at least one first electrode, at least one second electrode, at least one landing element, and a hinge layer. The first electrode is disposed on the substrate. The second electrode is disposed on the substrate. The landing element is disposed on the substrate. The hinge layer includes a hinge portion and at least one cantilever portion. The hinge portion is connected to the second electrode. The cantilever portion is connected to the hinge portion. The cantilever portion has a first opening and at least one spring disposed in the first opening and connected to at least one side of the first opening. When a voltage difference exists between the first electrode and the second electrode, the hinge portion is distorted and the spring thus touches the landing element.

Abstract translation: 微机电系统（MEMS）装置包括衬底和设置在衬底上的至少一个MEMS单元。 MEMS单元包括至少一个第一电极，至少一个第二电极，至少一个着陆元件和铰链层。 第一电极设置在基板上。 第二电极设置在基板上。 着陆元件设置在基板上。 铰链层包括铰链部分和至少一个悬臂部分。 铰链部分连接到第二电极。 悬臂部分连接到铰链部分。 悬臂部分具有第一开口和设置在第一开口中并连接到第一开口的至少一侧的至少一个弹簧。 当在第一电极和第二电极之间存在电压差时，铰链部分变形，弹簧因此接触着陆部件。

公开(公告)号：US20160033759A1

公开(公告)日：2016-02-04

申请号：US14449940

申请日：2014-08-01

Applicant: Himax Display, Inc.

Inventor： Hui-Lun Chen ,  Wei-Hsiao Chen ,  Chien-Tang Wang ,  Nan Liu ,  Roland V. Gelder ,  Chun-Hao Su

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0013 ,  B81B3/0021 ,  B81B2201/045

Abstract: A microelectromechanical system (MEMS) device includes a substrate and at least one MEMS unit disposed on the substrate. The MEMS unit includes at least one first electrode, at least one second electrode, at least one landing element, and a hinge layer. The first electrode is disposed on the substrate. The second electrode is disposed on the substrate. The landing element is disposed on the substrate. The hinge layer includes a hinge portion and at least one cantilever portion. The hinge portion is connected to the second electrode. The cantilever portion is connected to the hinge portion. The cantilever portion has a first opening and at least one spring disposed in the first opening and connected to at least one side of the first opening. When a voltage difference exists between the first electrode and the second electrode, the hinge portion is distorted and the spring thus touches the landing element.

Abstract translation: 微机电系统（MEMS）装置包括衬底和设置在衬底上的至少一个MEMS单元。 MEMS单元包括至少一个第一电极，至少一个第二电极，至少一个着陆元件和铰链层。 第一电极设置在基板上。 第二电极设置在基板上。 着陆元件设置在基板上。 铰链层包括铰链部分和至少一个悬臂部分。 铰链部分连接到第二电极。 悬臂部分连接到铰链部分。 悬臂部分具有第一开口和设置在第一开口中并连接到第一开口的至少一侧的至少一个弹簧。 当在第一电极和第二电极之间存在电压差时，铰链部分变形，弹簧因此接触着陆部件。