公开(公告)号：US20160004068A1

公开(公告)日：2016-01-07

申请号：US14322272

申请日：2014-07-02

Applicant: Himax Display, Inc.

Inventor： Roland V. Gelder ,  Nan Liu

IPC: G02B26/08 ,  B81B7/00 ,  B81B5/00

CPC classification number: G02B26/0841

Abstract: A micro-mirror device and a method for driving a mirror thereof are disclosed. The micro-mirror device includes a mirror, a first and a second electrode, a memory, and a controller. The mirror is tiltable about a hinge. The first electrode and the second electrode are disposed on different sides of the hinge. The memory stores a state data indicating a first electrode state for the first electrode and a second electrode state for the second electrode corresponding to the mirror. The controller is operable to receive the state data of the first and second electrodes from the memory, and in response to a crossover operation request, the controller inverts the states of the first and second electrodes. The controller sends a reset signal to the mirror according to the modified states of the first and second electrodes.

Abstract translation: 公开了一种微镜装置及其反射镜的驱动方法。 微镜装置包括反射镜，第一和第二电极，存储器和控制器。 镜子可绕铰链倾斜。 第一电极和第二电极设置在铰链的不同侧。 存储器存储表示第一电极的第一电极状态的状态数据和对应于反射镜的第二电极的第二电极状态。 控制器可操作以从存储器接收第一和第二电极的状态数据，并且响应于交叉操作请求，控制器反转第一和第二电极的状态。 控制器根据第一和第二电极的修改状态向镜子发送复位信号。

公开(公告)号：US20160033759A1

公开(公告)日：2016-02-04

申请号：US14449940

申请日：2014-08-01

Applicant: Himax Display, Inc.

Inventor： Hui-Lun Chen ,  Wei-Hsiao Chen ,  Chien-Tang Wang ,  Nan Liu ,  Roland V. Gelder ,  Chun-Hao Su

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0013 ,  B81B3/0021 ,  B81B2201/045

Abstract: A microelectromechanical system (MEMS) device includes a substrate and at least one MEMS unit disposed on the substrate. The MEMS unit includes at least one first electrode, at least one second electrode, at least one landing element, and a hinge layer. The first electrode is disposed on the substrate. The second electrode is disposed on the substrate. The landing element is disposed on the substrate. The hinge layer includes a hinge portion and at least one cantilever portion. The hinge portion is connected to the second electrode. The cantilever portion is connected to the hinge portion. The cantilever portion has a first opening and at least one spring disposed in the first opening and connected to at least one side of the first opening. When a voltage difference exists between the first electrode and the second electrode, the hinge portion is distorted and the spring thus touches the landing element.

Abstract translation: 微机电系统（MEMS）装置包括衬底和设置在衬底上的至少一个MEMS单元。 MEMS单元包括至少一个第一电极，至少一个第二电极，至少一个着陆元件和铰链层。 第一电极设置在基板上。 第二电极设置在基板上。 着陆元件设置在基板上。 铰链层包括铰链部分和至少一个悬臂部分。 铰链部分连接到第二电极。 悬臂部分连接到铰链部分。 悬臂部分具有第一开口和设置在第一开口中并连接到第一开口的至少一侧的至少一个弹簧。 当在第一电极和第二电极之间存在电压差时，铰链部分变形，弹簧因此接触着陆部件。

公开(公告)号：US09500857B2

公开(公告)日：2016-11-22

申请号：US14449940

申请日：2014-08-01

Applicant: Himax Display, Inc.

Inventor： Hui-Lun Chen ,  Wei-Hsiao Chen ,  Chien-Tang Wang ,  Nan Liu ,  Roland V. Gelder ,  Chun-Hao Su

IPC: G02B26/00 ,  G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0013 ,  B81B3/0021 ,  B81B2201/045

Abstract: A microelectromechanical system (MEMS) device includes a substrate and at least one MEMS unit disposed on the substrate. The MEMS unit includes at least one first electrode, at least one second electrode, at least one landing element, and a hinge layer. The first electrode is disposed on the substrate. The second electrode is disposed on the substrate. The landing element is disposed on the substrate. The hinge layer includes a hinge portion and at least one cantilever portion. The hinge portion is connected to the second electrode. The cantilever portion is connected to the hinge portion. The cantilever portion has a first opening and at least one spring disposed in the first opening and connected to at least one side of the first opening. When a voltage difference exists between the first electrode and the second electrode, the hinge portion is distorted and the spring thus touches the landing element.

Abstract translation: 微机电系统（MEMS）装置包括衬底和设置在衬底上的至少一个MEMS单元。 MEMS单元包括至少一个第一电极，至少一个第二电极，至少一个着陆元件和铰链层。 第一电极设置在基板上。 第二电极设置在基板上。 着陆元件设置在基板上。 铰链层包括铰链部分和至少一个悬臂部分。 铰链部分连接到第二电极。 悬臂部分连接到铰链部分。 悬臂部分具有第一开口和设置在第一开口中并连接到第一开口的至少一侧的至少一个弹簧。 当在第一电极和第二电极之间存在电压差时，铰链部分变形，弹簧因此接触着陆部件。