公开(公告)号：US20050232744A1

公开(公告)日：2005-10-20

申请号：US11095649

申请日：2005-04-01

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J13/00 ,  B25J17/00 ,  B65G49/07 ,  B66C23/00 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10T74/20305

摘要： A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

摘要翻译： 输送装置包括第一和第二连杆。 第一连杆机构包括第一和第三臂，其可以围绕同轴布置的第一至第三驱动轴的同轴旋转轴旋转，并且运送第一行星架。 第二连杆机构包括可绕第一至第三驱动轴的同轴旋转轴旋转的第二臂和第三臂，并且运送第二行星架。 第一和第二连杆被布置成允许第一和第二托架移动超过第一至第三驱动轴的同轴旋转轴而不会彼此干涉。

公开(公告)号：US20050286993A1

公开(公告)日：2005-12-29

申请号：US11167584

申请日：2005-06-28

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J9/06 ,  B25J9/10

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

摘要翻译： 一种能够将旋转马达的旋转驱动力适当地传递到运送臂并能够正确地检测旋转驱动轴的旋转角度的输送装置，由此将运送单元中运送的物体运送到正确的位置。 输送装置包括：具有气密结构的壳体; 第一至第三驱动轴，其设置在所述壳体中以能够围绕预定同轴旋转轴独立地旋转; 永磁体分别设置在第一至第三驱动轴的预定位置; 以及设置在壳体中以对应于各个永磁体的电磁线圈。 基于规定的信息，向电磁线圈提供驱动电流，以使第一至第三驱动轴移动。 要被运送的物体被固定在第一至第三驱动轴上的第一和第二连杆传送。

公开(公告)号：US07645112B2

公开(公告)日：2010-01-12

申请号：US11167584

申请日：2005-06-28

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B66C23/00

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

摘要翻译： 一种能够将旋转马达的旋转驱动力适当地传递到运送臂并能够正确地检测旋转驱动轴的旋转角度的输送装置，由此将运送单元中运送的物体运送到正确的位置。 输送装置包括：具有气密结构的壳体; 第一至第三驱动轴，其设置在所述壳体中以能够围绕预定同轴旋转轴独立地旋转; 永磁体分别设置在第一至第三驱动轴的预定位置; 以及设置在壳体中以对应于各个永磁体的电磁线圈。 基于规定的信息，向电磁线圈提供驱动电流，以使第一至第三驱动轴移动。 要被运送的物体被固定在第一至第三驱动轴上的第一和第二连杆传送。

公开(公告)号：US07572093B2

公开(公告)日：2009-08-11

申请号：US11095649

申请日：2005-04-01

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J18/02

CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10T74/20305

摘要： A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

摘要翻译： 输送装置包括第一和第二连杆。 第一连杆机构包括第一和第三臂，其可以围绕同轴布置的第一至第三驱动轴的同轴旋转轴旋转，并且运送第一行星架。 第二连杆机构包括可绕第一至第三驱动轴的同轴旋转轴旋转的第二臂和第三臂，并且运送第二行星架。 第一和第二连杆被布置成允许第一和第二托架移动超过第一至第三驱动轴的同轴旋转轴而不彼此干涉。

公开(公告)号：US20100121487A1

公开(公告)日：2010-05-13

申请号：US12528703

申请日：2008-02-27

申请人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

发明人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

IPC分类号： H01L21/677 ,  G06F7/00

CPC分类号： H01L21/67742 ,  H01L21/67265 ,  H01L21/68707

摘要： A substrate transfer apparatus that reduces the quantity of sensors used to detect the position of a substrate so as to simplify the structure and lower costs. The substrate transfer apparatus transfers a substrate (S) between a core chamber (11) and a peripheral chamber (12 or 13). A transfer robot (15) is arranged in the core chamber. The transfer robot includes a hand (17) for carrying the substrate and is capable of extending/drawing and pivoting the hand. A sensor (19) detects an edge surface of the substrate. The sensor is arranged at a position that the edge surface of the substrate passes by when the hand is extended/drawn between the core chamber and the peripheral chamber and that the edge surface of the substrate passes by when the hand is pivoted in the core chamber.

摘要翻译： 一种减少用于检测基板位置的传感器的数量以便简化结构并降低成本的基板传送装置。 基板转印装置在核心室（11）和周边室（12或13）之间传送基板（S）。 传送机器人（15）布置在核心室中。 传送机器人包括用于承载基底的手（17），并且能够延伸/拉伸和枢转手。 传感器（19）检测基板的边缘表面。 传感器设置在当手在芯室和周边室之间延伸/拉伸时基板的边缘表面通过的位置，并且当手在芯室中枢转时基板的边缘表面通过 。

公开(公告)号：US08571704B2

公开(公告)日：2013-10-29

申请号：US12528703

申请日：2008-02-27

申请人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

发明人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

IPC分类号： H01L21/677

CPC分类号： H01L21/67742 ,  H01L21/67265 ,  H01L21/68707

摘要： A substrate transfer apparatus that reduces the quantity of sensors used to detect the position of a substrate so as to simplify the structure and lower costs. The substrate transfer apparatus transfers a substrate (S) between a core chamber (11) and a peripheral chamber (12 or 13). A transfer robot (15) is arranged in the core chamber. The transfer robot includes a hand (17) for carrying the substrate and is capable of extending/drawing and pivoting the hand. A sensor (19) detects an edge surface of the substrate. The sensor is arranged at a position that the edge surface of the substrate passes by when the hand is extended/drawn between the core chamber and the peripheral chamber and that the edge surface of the substrate passes by when the hand is pivoted in the core chamber.

摘要翻译： 一种减少用于检测基板位置的传感器的数量以便简化结构并降低成本的基板传送装置。 基板转印装置在核心室（11）和周边室（12或13）之间传送基板（S）。 传送机器人（15）布置在核心室中。 传送机器人包括用于承载基底的手（17），并且能够延伸/拉伸和枢转手。 传感器（19）检测基板的边缘表面。 传感器设置在当手在芯室和周边室之间延伸/拉伸时基板的边缘表面通过的位置，并且当手在芯室中枢转时基板的边缘表面通过 。

公开(公告)号：US20100135751A1

公开(公告)日：2010-06-03

申请号：US12513873

申请日：2007-11-13

申请人： Kazuhiro Musha ,  Hirofumi Minami ,  Takafumi Kawaguchi

发明人： Kazuhiro Musha ,  Hirofumi Minami ,  Takafumi Kawaguchi

IPC分类号： H01L21/677 ,  F16J15/32 ,  G05G11/00

CPC分类号： F16J15/54 ,  B25J9/1065 ,  B25J18/04 ,  F16J15/324 ,  F16J15/40 ,  H01L21/67742 ,  Y10T74/20207

摘要： There are provided a rotation introduction mechanism which transmits a rotating motion on the atmosphere side into vacuum, is arranged simply, has a low sliding resistance, and has a long life, a substrate transfer apparatus, a substrate transfer apparatus having a small pivot radius and generating a smaller amount of dusts, and a vacuum processing apparatus. A lubricant holding member is attached to a vacuum seal mechanism. The substrate transfer apparatus is arranged such that a first link mechanism includes a first arm and a fourth arm, a second link mechanism includes a second arm and a third arm, the first arm is fixedly attached to a first drive shaft, the first arm is fixedly attached to a second drive shaft, the third arm is rotatably attached to the first drive shaft, and the fourth arm is rotatably attached to the second drive shaft. The vacuum processing apparatus includes the substrate transfer apparatus.

摘要翻译： 提供一种旋转引导机构，其将气氛侧的旋转运动变为真空，简单地设置，具有低滑动阻力，寿命长，旋转半径小的基板输送装置，基板输送装置， 产生较少量的灰尘，以及真空处理设备。 润滑剂保持构件附接到真空密封机构。 衬底传送装置被布置成使得第一连杆机构包括第一臂和第四臂，第二连杆机构包括第二臂和第三臂，第一臂固定地附接到第一驱动轴，第一臂是 固定地连接到第二驱动轴上，第三臂可转动地安装在第一驱动轴上，第四臂可转动地安装在第二驱动轴上。 真空处理装置包括基板输送装置。

公开(公告)号：US20100109220A1

公开(公告)日：2010-05-06

申请号：US12596455

申请日：2008-04-15

申请人： Kazuhiro Musha ,  Hirofumi Minami ,  Takafumi Kawaguchi

发明人： Kazuhiro Musha ,  Hirofumi Minami ,  Takafumi Kawaguchi

IPC分类号： B25B1/00

CPC分类号： H01L21/6833 ,  B65G49/061 ,  B65G49/067 ,  B65G2249/02 ,  B65G2249/045 ,  G02F1/1303 ,  H01L21/67092 ,  H01L21/6838

摘要： Object To provide a substrate assembly apparatus capable of simplifying a structure of the apparatus and performing appropriate detachment of a substrate constantly.Solving Means A substrate assembly apparatus according to the present invention includes a support base and a holding mechanism. The support base is for supporting a lower substrate. The holding mechanism includes a holding surface and a functional element. The holding surface is for holding an upper surface of an upper substrate. The functional element is provided on the holding surface and has a holding force variable in accordance with a magnitude of a voltage. The holding mechanism causes a lower surface of the upper substrate to face an upper surface of the lower substrate supported by the support base. With this structure, it becomes possible to electrically control the holding force with respect to the substrate and simplify the structure of the holding mechanism. Further, since the holding force of the substrate can be changed smoothly, appropriate detachment is constantly allowed even with respect to a thin substrate.

摘要翻译： 本发明提供能够简化装置的结构并且不断地进行基板的适当脱离的基板组装装置。 解决方案根据本发明的基板组装设备包括支撑基座和保持机构。 支撑底座用于支撑下基板。 保持机构包括保持面和功能元件。 保持表面用于保持上基板的上表面。 功能元件设置在保持表面上，并且具有根据电压的大小可变的保持力。 保持机构使得上基板的下表面面对由支撑基座支撑的下基板的上表面。 利用这种结构，可以电控制相对于基板的保持力并简化保持机构的结构。 此外，由于可以平滑地改变基板的保持力，即使对于薄的基板也能够持续地进行适当的分离。

公开(公告)号：US08366375B2

公开(公告)日：2013-02-05

申请号：US12513873

申请日：2007-11-13

申请人： Kazuhiro Musha ,  Hirofumi Minami ,  Takafumi Kawaguchi

发明人： Kazuhiro Musha ,  Hirofumi Minami ,  Takafumi Kawaguchi

IPC分类号： H01L21/677

CPC分类号： F16J15/54 ,  B25J9/1065 ,  B25J18/04 ,  F16J15/324 ,  F16J15/40 ,  H01L21/67742 ,  Y10T74/20207

摘要： There are provided a rotation introduction mechanism which transmits a rotating motion on the atmosphere side into vacuum, is arranged simply, has a low sliding resistance, and has a long life, a substrate transfer apparatus, a substrate transfer apparatus having a small pivot radius and generating a smaller amount of dusts, and a vacuum processing apparatus. A lubricant holding member is attached to a vacuum seal mechanism. The substrate transfer apparatus is arranged such that a first link mechanism includes a first arm and a fourth arm, a second link mechanism includes a second arm and a third arm, the first arm is fixedly attached to a first drive shaft, the first arm is fixedly attached to a second drive shaft, the third arm is rotatably attached to the first drive shaft, and the fourth arm is rotatably attached to the second drive shaft. The vacuum processing apparatus includes the substrate transfer apparatus.

摘要翻译： 提供一种旋转引导机构，其将气氛侧的旋转运动变为真空，简单地设置，具有低滑动阻力，寿命长，旋转半径小的基板输送装置，基板输送装置， 产生较少量的灰尘，以及真空处理设备。 润滑剂保持构件附接到真空密封机构。 衬底传送装置被布置成使得第一连杆机构包括第一臂和第四臂，第二连杆机构包括第二臂和第三臂，第一臂固定地附接到第一驱动轴，第一臂是 固定地连接到第二驱动轴上，第三臂可转动地安装在第一驱动轴上，第四臂可转动地安装在第二驱动轴上。 真空处理装置包括基板输送装置。

公开(公告)号：US20060187159A1

公开(公告)日：2006-08-24

申请号：US11398939

申请日：2006-04-05

申请人： Taketoshi Nakano ,  Takafumi Kawaguchi ,  Toshihiro Yanagi ,  Keishi Nishikubo

发明人： Taketoshi Nakano ,  Takafumi Kawaguchi ,  Toshihiro Yanagi ,  Keishi Nishikubo

IPC分类号： G09G3/36

CPC分类号： G09G3/3611 ,  G09G3/20 ,  G09G3/3685 ,  G09G3/3688 ,  G09G3/3696 ,  G09G2310/0275

摘要： A display device includes a display panel including a bus line section; and at least one driver for driving the bus line section included in the display panel. Each of the at least one driver includes an amplifier for generating a non-driving signal based on an input signal, the non-driving signal not contributing to driving of the bus line section.