公开(公告)号：US20100121487A1

公开(公告)日：2010-05-13

申请号：US12528703

申请日：2008-02-27

申请人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

发明人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

IPC分类号： H01L21/677 ,  G06F7/00

CPC分类号： H01L21/67742 ,  H01L21/67265 ,  H01L21/68707

摘要： A substrate transfer apparatus that reduces the quantity of sensors used to detect the position of a substrate so as to simplify the structure and lower costs. The substrate transfer apparatus transfers a substrate (S) between a core chamber (11) and a peripheral chamber (12 or 13). A transfer robot (15) is arranged in the core chamber. The transfer robot includes a hand (17) for carrying the substrate and is capable of extending/drawing and pivoting the hand. A sensor (19) detects an edge surface of the substrate. The sensor is arranged at a position that the edge surface of the substrate passes by when the hand is extended/drawn between the core chamber and the peripheral chamber and that the edge surface of the substrate passes by when the hand is pivoted in the core chamber.

摘要翻译： 一种减少用于检测基板位置的传感器的数量以便简化结构并降低成本的基板传送装置。 基板转印装置在核心室（11）和周边室（12或13）之间传送基板（S）。 传送机器人（15）布置在核心室中。 传送机器人包括用于承载基底的手（17），并且能够延伸/拉伸和枢转手。 传感器（19）检测基板的边缘表面。 传感器设置在当手在芯室和周边室之间延伸/拉伸时基板的边缘表面通过的位置，并且当手在芯室中枢转时基板的边缘表面通过 。

公开(公告)号：US20050232744A1

公开(公告)日：2005-10-20

申请号：US11095649

申请日：2005-04-01

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J13/00 ,  B25J17/00 ,  B65G49/07 ,  B66C23/00 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10T74/20305

摘要： A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

摘要翻译： 输送装置包括第一和第二连杆。 第一连杆机构包括第一和第三臂，其可以围绕同轴布置的第一至第三驱动轴的同轴旋转轴旋转，并且运送第一行星架。 第二连杆机构包括可绕第一至第三驱动轴的同轴旋转轴旋转的第二臂和第三臂，并且运送第二行星架。 第一和第二连杆被布置成允许第一和第二托架移动超过第一至第三驱动轴的同轴旋转轴而不会彼此干涉。

公开(公告)号：US07645112B2

公开(公告)日：2010-01-12

申请号：US11167584

申请日：2005-06-28

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B66C23/00

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

摘要翻译： 一种能够将旋转马达的旋转驱动力适当地传递到运送臂并能够正确地检测旋转驱动轴的旋转角度的输送装置，由此将运送单元中运送的物体运送到正确的位置。 输送装置包括：具有气密结构的壳体; 第一至第三驱动轴，其设置在所述壳体中以能够围绕预定同轴旋转轴独立地旋转; 永磁体分别设置在第一至第三驱动轴的预定位置; 以及设置在壳体中以对应于各个永磁体的电磁线圈。 基于规定的信息，向电磁线圈提供驱动电流，以使第一至第三驱动轴移动。 要被运送的物体被固定在第一至第三驱动轴上的第一和第二连杆传送。

公开(公告)号：US07572093B2

公开(公告)日：2009-08-11

申请号：US11095649

申请日：2005-04-01

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J18/02

CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10T74/20305

摘要： A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

摘要翻译： 输送装置包括第一和第二连杆。 第一连杆机构包括第一和第三臂，其可以围绕同轴布置的第一至第三驱动轴的同轴旋转轴旋转，并且运送第一行星架。 第二连杆机构包括可绕第一至第三驱动轴的同轴旋转轴旋转的第二臂和第三臂，并且运送第二行星架。 第一和第二连杆被布置成允许第一和第二托架移动超过第一至第三驱动轴的同轴旋转轴而不彼此干涉。

公开(公告)号：US08571704B2

公开(公告)日：2013-10-29

申请号：US12528703

申请日：2008-02-27

申请人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

发明人： Takafumi Kawaguchi ,  Kenji Ago ,  Toshio Koike

IPC分类号： H01L21/677

CPC分类号： H01L21/67742 ,  H01L21/67265 ,  H01L21/68707

摘要： A substrate transfer apparatus that reduces the quantity of sensors used to detect the position of a substrate so as to simplify the structure and lower costs. The substrate transfer apparatus transfers a substrate (S) between a core chamber (11) and a peripheral chamber (12 or 13). A transfer robot (15) is arranged in the core chamber. The transfer robot includes a hand (17) for carrying the substrate and is capable of extending/drawing and pivoting the hand. A sensor (19) detects an edge surface of the substrate. The sensor is arranged at a position that the edge surface of the substrate passes by when the hand is extended/drawn between the core chamber and the peripheral chamber and that the edge surface of the substrate passes by when the hand is pivoted in the core chamber.

摘要翻译： 一种减少用于检测基板位置的传感器的数量以便简化结构并降低成本的基板传送装置。 基板转印装置在核心室（11）和周边室（12或13）之间传送基板（S）。 传送机器人（15）布置在核心室中。 传送机器人包括用于承载基底的手（17），并且能够延伸/拉伸和枢转手。 传感器（19）检测基板的边缘表面。 传感器设置在当手在芯室和周边室之间延伸/拉伸时基板的边缘表面通过的位置，并且当手在芯室中枢转时基板的边缘表面通过 。

公开(公告)号：US20050286993A1

公开(公告)日：2005-12-29

申请号：US11167584

申请日：2005-06-28

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J9/06 ,  B25J9/10

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

摘要翻译： 一种能够将旋转马达的旋转驱动力适当地传递到运送臂并能够正确地检测旋转驱动轴的旋转角度的输送装置，由此将运送单元中运送的物体运送到正确的位置。 输送装置包括：具有气密结构的壳体; 第一至第三驱动轴，其设置在所述壳体中以能够围绕预定同轴旋转轴独立地旋转; 永磁体分别设置在第一至第三驱动轴的预定位置; 以及设置在壳体中以对应于各个永磁体的电磁线圈。 基于规定的信息，向电磁线圈提供驱动电流，以使第一至第三驱动轴移动。 要被运送的物体被固定在第一至第三驱动轴上的第一和第二连杆传送。

公开(公告)号：US20100040447A1

公开(公告)日：2010-02-18

申请号：US12564572

申请日：2009-09-22

申请人： Kazuhiro MUSHA ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

发明人： Kazuhiro MUSHA ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

IPC分类号： H01L21/68 ,  B25J9/00 ,  B25J18/02

CPC分类号： B25J9/107 ,  B25J9/042 ,  B25J9/102 ,  B25J9/104 ,  H01L21/67742 ,  Y10T74/20305

摘要： A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus. Although the lengths of first arms provided at rotating shafts may differ from the lengths of second arms provided between the first arms and a substrate supporting portion, the apparatus is free from malfunction even when the lengths thereof differ because the transmission of a rotative force of a dead center escaping mechanism is released at a position except at a dead center in the present invention.

摘要翻译： 提供一种不会对其环境造成污染的紧凑型运输装置。 在本发明的第一方面的输送装置中，由于第一旋转轴和第二旋转轴同心地配置，所以装置的安装面积小，死角逸出机构的结构简单。 由于可以使手部的连接部分变薄，所以可以减少插入手部的闸阀的开口。 结果，传送室内的灰尘难以进入处理室。 本发明的第二方面涉及一种间隔开的双轴型输送装置。 虽然设置在旋转轴上的第一臂的长度可以不同于设置在第一臂和基板支撑部之间的第二臂的长度，但是即使其长度不同，该装置也不会发生故障，因为它的传播力 在本发明的除死点以外的位置释放死点移除机构。

公开(公告)号：US08382421B2

公开(公告)日：2013-02-26

申请号：US12564572

申请日：2009-09-22

申请人： Kazuhiro Musha ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

发明人： Kazuhiro Musha ,  Hirofumi Minami ,  Kenji Ago ,  Takashi Asaishi ,  Toshio Koike

IPC分类号： B25J18/00

CPC分类号： B25J9/107 ,  B25J9/042 ,  B25J9/102 ,  B25J9/104 ,  H01L21/67742 ,  Y10T74/20305

摘要： A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus. Although the lengths of first arms provided at rotating shafts may differ from the lengths of second arms provided between the first arms and a substrate supporting portion, the apparatus is free from malfunction even when the lengths thereof differ because the transmission of a rotative force of a dead center escaping mechanism is released at a position except at a dead center in the present invention.

摘要翻译： 提供一种不会对其环境造成污染的紧凑型运输装置。 在本发明的第一方面的输送装置中，由于第一旋转轴和第二旋转轴同心地配置，所以装置的安装面积小，死角逸出机构的结构简单。 由于可以使手部的连接部分变薄，所以可以减少插入手部的闸阀的开口。 结果，传送室内的灰尘难以进入处理室。 本发明的第二方面涉及一种间隔开的双轴型输送装置。 虽然设置在旋转轴上的第一臂的长度可以不同于设置在第一臂和基板支撑部之间的第二臂的长度，但是即使其长度不同，该装置也不会发生故障，因为它的传播力 在本发明的除死点以外的位置释放死点移除机构。

公开(公告)号：US5798011A

公开(公告)日：1998-08-25

申请号：US694629

申请日：1996-08-09

申请人： Tatsuo Suenaga ,  Hiroaki Nakagawa ,  Shin Terauchi ,  Takeo Kikuchi ,  Shinnosuke Aiba ,  Mikio Kobayashi ,  Yutaka Katsuta ,  Kenji Ago ,  Katsumi Kosuge ,  Yasuyuki Matsubara ,  Masato Tanaami ,  Shunichi Sugishita ,  Hideki Ikeda ,  Toshio Furuya ,  Shigeyuki Akihama ,  Takahiro Arai

发明人： Tatsuo Suenaga ,  Hiroaki Nakagawa ,  Shin Terauchi ,  Takeo Kikuchi ,  Shinnosuke Aiba ,  Mikio Kobayashi ,  Yutaka Katsuta ,  Kenji Ago ,  Katsumi Kosuge ,  Yasuyuki Matsubara ,  Masato Tanaami ,  Shunichi Sugishita ,  Hideki Ikeda ,  Toshio Furuya ,  Shigeyuki Akihama ,  Takahiro Arai

IPC分类号： E04B2/94 ,  E06B1/24 ,  E06B1/58 ,  E06B3/18 ,  E06B3/00 ,  E06B7/12

CPC分类号： E06B3/18 ,  E06B1/24 ,  Y10T428/232 ,  Y10T428/24298

摘要： A method of making a combination concrete panel wall, concrete window frame, and concrete sash glazing frame. The sill, lintel, and jambs of the window frame are fiber-reinforced concrete extrusions which are cut to length and cemented together. The hardened frame is placed in a concrete panel molding frame to locate and define a window opening. The concrete panel wall grout is then poured and dovetail-type mortise and tenon joints are precast in the exterior faces of the window frame which abut the poured concrete wall panel plastic grout, to permanently mold and interlock the window frame to the panel wall. The sash members are fitted about a window pane which is located in interior grooves in the sash members and then glazed. Sealing means interconnect the sash to the window frame to provide a condensation-resistant, water-tight, air-tight, heat and fire-resistant concrete wall closure.

公开(公告)号：US5591286A

公开(公告)日：1997-01-07

申请号：US277608

申请日：1994-07-20

申请人： Tatsuo Suenaga ,  Hiroaki Nakagawa ,  Shin Terauchi ,  Takeo Kikuchi ,  Shinnosuke Aiba ,  Mikio Kobayashi ,  Yutaka Katsuta ,  Kenji Ago ,  Katsumi Kosuge ,  Yasuyuki Matsubara ,  Masato Tanaami ,  Shunichi Sugishita ,  Hideki Ikeda ,  Toshio Furuya ,  Shigeyuki Akihama ,  Takahiro Arai

发明人： Tatsuo Suenaga ,  Hiroaki Nakagawa ,  Shin Terauchi ,  Takeo Kikuchi ,  Shinnosuke Aiba ,  Mikio Kobayashi ,  Yutaka Katsuta ,  Kenji Ago ,  Katsumi Kosuge ,  Yasuyuki Matsubara ,  Masato Tanaami ,  Shunichi Sugishita ,  Hideki Ikeda ,  Toshio Furuya ,  Shigeyuki Akihama ,  Takahiro Arai

IPC分类号： E04B2/94 ,  E06B1/24 ,  E06B1/58 ,  E06B3/18 ,  E06B3/00 ,  E06B7/12

CPC分类号： E06B3/18 ,  E06B1/24 ,  Y10T428/232 ,  Y10T428/24298

摘要： A method of making a combination concrete panel wall, concrete window frame, and concrete sash glazing frame. The sill, lintel, and jambs of the window frame are fiber-reinforced concrete extrusions. The hardened frame is placed in a concrete panel molding frame to locate and define a window opening. The concrete panel wall grout is then poured and dovetail-type mortise and tenon joints are precast in the exterior faces of the window frame which abut the poured concrete wall panel plastic grout, to permanently mold and interlock the window frame to the panel wall. The sash members are fitted about a window pane which is located in interior grooves in the sash members and then glazed. Sealing means interconnects the sash to the window frame to provide a condensation-resistant, water-tight, air-tight, heat and fire-resistant concrete wall closure.

摘要翻译： 混凝土墙壁，混凝土窗框和混凝土窗框玻璃框架的组合方法。 窗框的门槛，门楣和边框是纤维增强混凝土挤压件。 将硬化的框架放置在混凝土板模制框架中以定位和限定窗口。 然后浇筑混凝土墙壁灌浆，并在窗框的外表面预先安置燕尾型榫眼和榫头接缝，该窗框抵靠浇注的混凝土墙板塑料灌浆，永久地将窗框模制并锁定在墙壁上。 窗扇构件安装在位于窗扇构件内部凹槽中的窗玻璃上，然后上釉。 密封装置将窗框连接到窗框，以提供防水，防水，气密，耐热和耐火的混凝土墙盖。