Analyzer/observer
    1.
    发明授权
    Analyzer/observer 失效
    分析仪/观察者

    公开(公告)号:US06762422B2

    公开(公告)日:2004-07-13

    申请号:US10148513

    申请日:2002-09-24

    IPC分类号: H01J3726

    CPC分类号: H01J37/20 H01J2237/20292

    摘要: On a sample base 1 disposed within a vacuum container is provided a scale S(1). . . S(N), where in an actual distance of the sample base is monitored by observing the scale trough an optical system for exclusive use thereof, which can catch it within a field of view. With this, it is possible to position a foreign body, as a target of analysis, which is analyzed or observed by a first analysis/observation device, so that it necessarily falls within a field of view of a second analysis/observation device, thereby realizing quick and automatic delivery of the samples when observing the foreign body on the sample by plural numbers of the devices.

    摘要翻译: 在设置在真空容器内的样品台1上设置刻度S(1)。 。 。 S(N),其中通过观察通过其专用的光学系统的尺度监视样本基座的实际距离,其可以在视场内捕获它。因此,可以定位异物 作为分析对象,由第一分析/观察装置进行分析或观察,使其必然落在第二分析/观察装置的视野内,从而在观察样品时快速自动地传送样品 异物在样品上由多个设备。