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公开(公告)号：US08158238B2
公开(公告)日：2012-04-17
申请号：US11922458
申请日：2006-07-07
CPC分类号： H01L21/6833 , H01L21/6831 , H02N13/00 , Y10T428/24331 , Y10T428/24851
摘要： An electrostatic chuck having excellent chucking force and holding force is provided. The electrostatic chuck includes a laminate structure in which a first insulating layer, a first electrode layer, an interelectrode insulating layer, a second electrode layer and a second insulating layer are successively laminated on a metal base in an order of increasing distance from the metal base. The second electrode layer includes a pattern electrode having a plurality of opening portions within a flat area, and a shortest distance X between mutually opening portions and a length L of a line segment formed by feet of perpendiculars when barycenters of the adjacent opening portions are projected to a virtual line which is a straight line parallel to the shortest distance X satisfy L/X≧1.5 and L
摘要翻译： 提供了具有优异的夹持力和保持力的静电卡盘。 静电卡盘包括层叠结构，其中第一绝缘层，第一电极层，电极间绝缘层，第二电极层和第二绝缘层依次层叠在金属基底上，其距离金属基底的距离增加 。 第二电极层包括：图案电极，其在平坦区域内具有多个开口部分，并且当相邻开口部分的重心突出时，相互开口部分之间的最短距离X和由垂直脚形成的线段的长度L 到与最短距离X平行的直线的虚拟线满足L /X≥1.5且L <2.6mm。
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公开(公告)号：US20090041980A1
公开(公告)日：2009-02-12
申请号：US11922458
申请日：2006-07-07
CPC分类号： H01L21/6833 , H01L21/6831 , H02N13/00 , Y10T428/24331 , Y10T428/24851
摘要： An electrostatic chuck having excellent chucking force and holding force is provided. The electrostatic chuck includes a laminate structure in which a first insulating layer, a first electrode layer, an interelectrode insulating layer, a second electrode layer and a second insulating layer are successively laminated on a metal base in an order of increasing distance from the metal base. The second electrode layer includes a pattern electrode having a plurality of opening portions within a flat area, and a shortest distance X between mutually opening portions and a length L of a line segment formed by feet of perpendiculars when barycenters of the adjacent opening portions are projected to a virtual line which is a straight line parallel to the shortest distance X satisfy L/X≦1.5 and L
摘要翻译： 提供了具有优异的夹持力和保持力的静电卡盘。 静电卡盘包括层叠结构，其中第一绝缘层，第一电极层，电极间绝缘层，第二电极层和第二绝缘层依次层叠在金属基底上，其距离金属基底的距离增加 。 第二电极层包括：图案电极，其在平坦区域内具有多个开口部分，并且当相邻开口部分的重心突出时，相互开口部分之间的最短距离X和由垂直脚形成的线段的长度L 到与最短距离X平行的直线的虚拟线满足L / X <= 1.5且L <2.6mm。
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公开(公告)号：US07881036B2
公开(公告)日：2011-02-01
申请号：US12085349
申请日：2006-11-30
申请人： Hiroshi Fujisawa , Kinya Miyashita
发明人： Hiroshi Fujisawa , Kinya Miyashita
IPC分类号： H01L21/683 , B23B31/28
CPC分类号： H02N13/00 , H01L21/68 , H01L21/6833 , Y10T279/23
摘要： An electrostatic chuck electrode sheet which allows the difference in capacitance between electrodes due to the presence or absence of a substrate to be increased to a level which can be accurately detected using a known substrate detection device, and allows an electrostatic chuck to exhibit an excellent attraction force, and an electrostatic chuck using the electrode sheet, are disclosed. The electrode sheet has a layered structure in which a first insulating layer, a first electrode layer, an inter-electrode insulating layer, a second electrode layer, and a second insulating layer are stacked and attracts a substrate on the first insulating layer, the first electrode layer having a plurality of openings in a specific planar area, and the second electrode layer having opening equivalent portions provided at positions at which the openings in the first electrode layer are projected onto the second electrode layer in a depth direction of the electrode sheet and having almost the same area as the projected openings, and connection portions that connect the opening equivalent portions. The electrostatic chuck is formed using the electrode sheet.
摘要翻译： 能够将由于基板的存在或不存在而导致的电极间的电容差增大到能够使用公知的基板检测装置能够精确检测的水平的静电卡盘电极片，并且允许静电卡盘显示出优异的吸引力 并且公开了使用该电极片的静电卡盘。 电极片具有堆叠第一绝缘层，第一电极层，电极间绝缘层，第二电极层和第二绝缘层的层叠结构，并且在第一绝缘层上吸引衬底，第一绝缘层 电极层，其具有在特定平面区域中的多个开口，并且所述第二电极层具有设置在所述第一电极层中的开口沿着所述电极片的深度方向突出到所述第二电极层上的位置处的开口等效部分，以及 具有与投影开口几乎相同的面积，以及连接开口等效部分的连接部分。 使用电极片形成静电卡盘。
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公开(公告)号：US20070223173A1
公开(公告)日：2007-09-27
申请号：US10591945
申请日：2005-03-15
申请人： Hiroshi Fujisawa , Kinya Miyashita
发明人： Hiroshi Fujisawa , Kinya Miyashita
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , H02N13/00
摘要： A bipolar electrostatic chuck which has excellent dielectric breakdown strength and provides excellent attracting performance. The bipolar electrostatic chuck eliminates difficulty in dismounting a sample from a sample attracting plane as much as possible after application of a voltage to electrodes is finished. The bipolar electrostatic chuck is provided with a first electrode and a second electrode in an insulator and permits a surface of the insulator to be the sample attracting plane. The insulator has the first electrode, an interelectrode insulating layer and the second electrode in this order from the sample attracting plane in the depth direction. The second electrode has a region not overlapping with the first electrode in a normal line direction of the sample attracting plane.
摘要翻译： 双极静电卡盘具有优异的绝缘击穿强度，并具有优异的吸引性能。 双极静电卡盘消除了在对电极施加电压完成之后尽可能多地将样品从样品吸附面上拆下的困难。 双极静电卡盘在绝缘体中设置有第一电极和第二电极，并且允许绝缘体的表面成为样品吸引平面。 绝缘体在深度方向上从样品吸引面起依次具有第一电极，电极间绝缘层和第二电极。 第二电极在样品吸附面的法线方向上具有与第一电极不重叠的区域。
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公开(公告)号：US08238072B2
公开(公告)日：2012-08-07
申请号：US12691613
申请日：2010-01-21
申请人： Hiroshi Fujisawa , Kinya Miyashita
发明人： Hiroshi Fujisawa , Kinya Miyashita
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , H02N13/00
摘要： A bipolar electrostatic chuck which has excellent dielectric breakdown strength and provides excellent attracting performance. The bipolar electrostatic chuck eliminates difficulty in dismounting a sample from a sample attracting plane as much as possible after application of a voltage to electrodes is finished. The bipolar electrostatic chuck is provided with a first electrode and a second electrode in an insulator and permits a surface of the insulator to be the sample attracting plane. The insulator has the first electrode, an interelectrode insulating layer and the second electrode in this order from the sample attracting plane in the depth direction. The second electrode has a region not overlapping with the first electrode in a normal line direction of the sample attracting plane.
摘要翻译： 一种双极性静电卡盘，具有优良的介电击穿强度，并具有优良的吸引性能。 双极静电卡盘消除了在对电极施加电压完成之后尽可能多地从样品吸附面上拆下样品的困难。 双极静电卡盘在绝缘体中设置有第一电极和第二电极，并且允许绝缘体的表面成为样品吸引平面。 绝缘体在深度方向上从样品吸引面起依次具有第一电极，电极间绝缘层和第二电极。 第二电极在样品吸引面的法线方向上具有与第一电极不重叠的区域。
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6.发明授权公开(公告)号：US08196594B2
公开(公告)日：2012-06-12
申请号：US11988514
申请日：2006-07-11
IPC分类号： B08B3/00
CPC分类号： H02N13/00 , B08B6/00 , B08B7/0014 , H01L21/02046 , H01L21/02096 , H01L21/67132 , H01L21/683
摘要： Provided are an apparatus for and a method of removing foreign materials from a substrate which reliably remove the foreign materials, eliminate a chance of redeposition of the foreign materials, and are applicable even to large-size substrates. The apparatus for removing foreign materials includes electrostatic chucks (2, 3) forming a substrate chucking surface (4) to which the substrate (1) is attracted; a resin sheet supplying means (9) for supplying a resin sheet (5) to the substrate chucking surface (4); resin sheet collecting means (13) for collecting the supplied resin sheet (5); and a substrate transfer means for transferring the substrate (1). The substrate (1) supplied to the electrostatic chucks (2, 3) by the substrate transfer means is attracted to the substrate chucking surface (4) through the resin sheet (5), and a foreign material (22) deposited on a side of the substrate chucking surface (4) of the substrate (1) is transferred onto the resin sheet (5) and removed.
摘要翻译： 提供了从基材中除去异物的装置和方法，其可靠地除去异物，消除异物再沉积的可能性，并且甚至可应用于大尺寸基板。 用于除去异物的设备包括形成衬底（1）被吸引到其上的衬底夹持表面（4）的静电吸盘（2,3） 用于将树脂片（5）供给到基板夹持表面（4）的树脂片材供应装置（9）; 用于收集供应的树脂片（5）的树脂片收集装置（13）; 以及用于转移基板（1）的基板转印装置。 通过基板传送装置供给到静电卡盘（2,3）的基板（1）通过树脂片（5）被吸引到基板夹持表面（4），并且异物（22）沉积在 将基板（1）的基板夹持面（4）转印到树脂片（5）上并除去。
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公开(公告)号：US20100149720A1
公开(公告)日：2010-06-17
申请号：US12691613
申请日：2010-01-21
申请人： Hiroshi Fujisawa , Kinya Miyashita
发明人： Hiroshi Fujisawa , Kinya Miyashita
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , H02N13/00
摘要： A bipolar electrostatic chuck which has excellent dielectric breakdown strength and provides excellent attracting performance. The bipolar electrostatic chuck eliminates difficulty in dismounting a sample from a sample attracting plane as much as possible after application of a voltage to electrodes is finished. The bipolar electrostatic chuck is provided with a first electrode and a second electrode in an insulator and permits a surface of the insulator to be the sample attracting plane. The insulator has the first electrode, an interelectrode insulating layer and the second electrode in this order from the sample attracting plane in the depth direction. The second electrode has a region not overlapping with the first electrode in a normal line direction of the sample attracting plane.
摘要翻译： 一种双极性静电卡盘，具有优良的介电击穿强度，并具有优良的吸引性能。 双极静电卡盘消除了在对电极施加电压完成之后尽可能多地从样品吸附面上拆下样品的困难。 双极静电卡盘在绝缘体中设置有第一电极和第二电极，并且允许绝缘体的表面成为样品吸引平面。 绝缘体在深度方向上从样品吸引面起依次具有第一电极，电极间绝缘层和第二电极。 第二电极在样品吸引面的法线方向上具有与第一电极不重叠的区域。
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8.发明申请公开(公告)号：US20090250077A1
公开(公告)日：2009-10-08
申请号：US11988514
申请日：2006-07-11
CPC分类号： H02N13/00 , B08B6/00 , B08B7/0014 , H01L21/02046 , H01L21/02096 , H01L21/67132 , H01L21/683
摘要： Provided are an apparatus for and a method of removing foreign materials from a substrate which reliably remove the foreign materials, eliminate a chance of redeposition of the foreign materials, and are applicable even to large-size substrates. The apparatus for removing foreign materials includes electrostatic chucks (2, 3) forming a substrate chucking surface (4) to which the substrate (1) is attracted; a resin sheet supplying means (9) for supplying a resin sheet (5) to the substrate chucking surface (4); resin sheet collecting means (13) for collecting the supplied resin sheet (5); and a substrate transfer means for transferring the substrate (1). The substrate (1) supplied to the electrostatic chucks (2, 3) by the substrate transfer means is attracted to the substrate chucking surface (4) through the resin sheet (5), and a foreign material (22) deposited on a side of the substrate chucking surface (4) of the substrate (1) is transferred onto the resin sheet (5) and removed.
摘要翻译： 提供了从基材中除去异物的装置和方法，其可靠地除去异物，消除异物再沉积的可能性，并且甚至可应用于大尺寸基板。 用于除去异物的设备包括形成衬底（1）被吸引到其上的衬底夹持表面（4）的静电吸盘（2,3） 用于将树脂片（5）供给到基板夹持表面（4）的树脂片材供应装置（9）; 用于收集供应的树脂片（5）的树脂片收集装置（13）; 以及用于转移基板（1）的基板转印装置。 通过基板传送装置供给到静电卡盘（2,3）的基板（1）通过树脂片（5）被吸引到基板夹持表面（4），并且异物（22）沉积在 将基板（1）的基板夹持面（4）转印到树脂片（5）上并除去。
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公开(公告)号：US20090040681A1
公开(公告)日：2009-02-12
申请号：US12085349
申请日：2006-11-30
申请人： Hiroshi Fujisawa , Kinya Miyashita
发明人： Hiroshi Fujisawa , Kinya Miyashita
IPC分类号： H01L21/683
CPC分类号： H02N13/00 , H01L21/68 , H01L21/6833 , Y10T279/23
摘要： An electrostatic chuck electrode sheet which allows the difference in capacitance between electrodes due to the presence or absence of a substrate to be increased to a level which can be accurately detected using a known substrate detection device, and allows an electrostatic chuck to exhibit an excellent attraction force, and an electrostatic chuck using the electrode sheet, are disclosed. The electrode sheet has a layered structure in which a first insulating layer, a first electrode layer, an inter-electrode insulating layer, a second electrode layer, and a second insulating layer are stacked and attracts a substrate on the first insulating layer, the first electrode layer having a plurality of openings in a specific planar area, and the second electrode layer having opening equivalent portions provided at positions at which the openings in the first electrode layer are projected onto the second electrode layer in a depth direction of the electrode sheet and having almost the same area as the projected openings, and connection portions that connect the opening equivalent portions. The electrostatic chuck is formed using the electrode sheet.
摘要翻译： 能够将由于基板的存在或不存在而导致的电极间的电容差增大到能够使用公知的基板检测装置能够精确检测的水平的静电卡盘电极片，并且允许静电卡盘显示出优异的吸引力 并且公开了使用该电极片的静电卡盘。 电极片具有堆叠第一绝缘层，第一电极层，电极间绝缘层，第二电极层和第二绝缘层的层叠结构，并且在第一绝缘层上吸引衬底，第一绝缘层 电极层，其具有在特定平面区域中的多个开口，并且所述第二电极层具有设置在所述第一电极层中的开口沿着所述电极片的深度方向突出到所述第二电极层上的位置处的开口等效部分，以及 具有与投影开口几乎相同的面积，以及连接开口等效部分的连接部分。 使用电极片形成静电卡盘。
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公开(公告)号：US06813134B2
公开(公告)日：2004-11-02
申请号：US09925739
申请日：2001-08-10
申请人： Yoshiaki Tatsumi , Kinya Miyashita
发明人： Yoshiaki Tatsumi , Kinya Miyashita
IPC分类号： H02N1300
CPC分类号： H01L21/6833 , H01L21/6831 , Y10T279/23 , Y10T428/263 , Y10T428/269 , Y10T428/31721
摘要： An electrostatic chucking device having a laminated structure formed by sequentially laminating a first insulation layer, an electrode layer, and a second insulation layer on a metal substrate. The first and second insulation layers are formed from polyimide films. At least one adhesion layer is provided between the metal substrate and the first insulation layer, and, preferably, between the first insulation layer and the electrode layer, and between the electrode layer and the second insulation layer. The adhesion layer is a thermoplastic polyimide-based adhesive film having a film thickness of 5 to 50 &mgr;m. The electrostatic chucking device may be manufactured by a low-temperature compression bonding process under pressure at a temperature of 100 to 250° C. between the metal substrate and the first insulation layer, between the first insulation layer and the electrode layer, and between the electrode layer and the second insulation layer using thermoplastic polyimide-based adhesion films.
摘要翻译： 一种具有叠层结构的静电夹持装置，其通过在金属基板上依次层叠第一绝缘层，电极层和第二绝缘层而形成。 第一和第二绝缘层由聚酰亚胺膜形成。 在金属基板和第一绝缘层之间，优选地，在第一绝缘层和电极层之间以及电极层和第二绝缘层之间设置至少一个粘附层。 粘合层是膜厚为5〜50μm的热塑性聚酰亚胺系粘合膜。 静电吸附装置可以通过在金属基板和第一绝缘层之间，第一绝缘层和电极层之间以及在第一绝缘层和电极层之间的温度为100至250℃的压力下的低温压接工艺 电极层和使用热塑性聚酰亚胺基粘合膜的第二绝缘层。
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