公开(公告)号：US08997141B2

公开(公告)日：2015-03-31

申请号：US14117755

申请日：2012-05-18

Applicant: Shigeaki Mitsuya ,  Kinji Matsumura ,  Akitsugu Baba ,  Hiroshi Fujisawa ,  Masaru Takechi ,  Yasuaki Kanatsugu ,  Hiroyuki Hamada

Inventor： Shigeaki Mitsuya ,  Kinji Matsumura ,  Akitsugu Baba ,  Hiroshi Fujisawa ,  Masaru Takechi ,  Yasuaki Kanatsugu ,  Hiroyuki Hamada

IPC: H04N7/10 ,  H04N21/81 ,  G06F21/10 ,  H04H60/13 ,  H04N21/435 ,  G05B19/042 ,  H04N21/41 ,  H04N21/434 ,  H04N21/443 ,  H04N21/462 ,  H04N21/6543 ,  H04H60/76

CPC classification number: H04N21/8126 ,  G05B19/0428 ,  G05B2219/23043 ,  G05B2219/24159 ,  G05B2219/24168 ,  G05B2219/36163 ,  G05B2219/36542 ,  G06F21/10 ,  G06F2221/0775 ,  G06F2221/2101 ,  G06F2221/2117 ,  H04H60/13 ,  H04H60/76 ,  H04N21/4126 ,  H04N21/4345 ,  H04N21/435 ,  H04N21/4433 ,  H04N21/4622 ,  H04N21/6543

Abstract: An application management server includes: a terminal management table storage unit configured to store terminal device identification data for identifying a terminal device and information indicating whether or not transmission of notification data is necessary while correlating the terminal device identification data with the information; a registration request reception unit configured to receive from the terminal device, a registration request for registering transmission of notification data, and update the terminal management table storage unit based on the registration request; a release request reception unit configured to receive from the terminal device, a release request for releasing transmission of notification data, and update the terminal management table storage unit based on the release request; a via-broadcasting notification transmission unit configured to perform a process of including notification data in a broadcasting signal and transmitting the notification data; and a via-communication notification transmission unit configured to perform a process of referring to the terminal management table storage unit and transmitting the notification data to the terminal device.

Abstract translation: 应用管理服务器包括：终端管理表存储单元，被配置为存储用于识别终端设备的终端设备识别数据和指示在终端设备识别数据与该信息相关的情况下是否需要发送通知数据的信息; 注册请求接收单元，被配置为从终端设备接收注册通知数据的发送的注册请求，并且基于注册请求来更新终端管理表存储单元; 释放请求接收单元，被配置为从所述终端装置接收用于发布通知数据的释放请求，并且基于所述释放请求来更新所述终端管理表存储单元; 通过广播通知发送单元，被配置为执行在广播信号中包括通知数据的处理，并发送通知数据; 以及通信通知发送单元，被配置为执行参照终端管理表存储单元的处理，并将通知数据发送到终端设备。

公开(公告)号：US08730644B2

公开(公告)日：2014-05-20

申请号：US12997826

申请日：2009-06-30

Applicant: Hiroshi Fujisawa ,  Yoshiaki Tatsumi

Inventor： Hiroshi Fujisawa ,  Yoshiaki Tatsumi

IPC: H01L21/683 ,  H01T23/00

CPC classification number: H02N13/00 ,  H01L21/6833

Abstract: Provided is a bipolar electrostatic chuck, which has excellent substrate attracting/holding performance when a voltage is applied, and excellent residual charges reducing performance when voltage application is stopped. The bipolar electrostatic chuck includes at least an electrode layer including a first electrode and a second electrode, and an upper insulating layer which forms a substrate attracting surface for attracting a substrate. In a case where a surface of the electrode layer is regarded to be divided into a plurality of virtual cells having a predetermined width (L) in an x direction and a y direction, first electrode sections forming the first electrode and second electrode sections forming the second electrode are alternately arranged in the plurality of virtual cells in the x direction, and are alternately arranged in the plurality of virtual cells in the y direction.

Abstract translation: 提供一种双极性静电卡盘，其在施加电压时具有优异的基板吸附/保持性能，并且在施加电压时停止优异的残留电荷降低性能。 双极性静电卡盘至少包括具有第一电极和第二电极的电极层，以及形成用于吸引基板的基板吸附面的上部绝缘层。 在电极层的表面被认为在x方向和ay方向上被划分为具有预定宽度（L）的多个虚拟单元的情况下，形成第一电极的第一电极部分和形成第二电极部分的第二电极部分 电极在x方向上交替排列在多个虚拟单元中，并且在y方向上交替配置在多个虚拟单元中。

公开(公告)号：US20140075472A1

公开(公告)日：2014-03-13

申请号：US14117755

申请日：2012-05-18

Applicant: Shigeaki Mitsuya ,  Kinji Matsumura ,  Akitsugu Baba ,  Hiroshi Fujisawa ,  Masaru Takechi ,  Yasuaki Kanatsugu ,  Hiroyuki Hamada

Inventor： Shigeaki Mitsuya ,  Kinji Matsumura ,  Akitsugu Baba ,  Hiroshi Fujisawa ,  Masaru Takechi ,  Yasuaki Kanatsugu ,  Hiroyuki Hamada

IPC: H04N21/81 ,  H04N21/435

CPC classification number: H04N21/8126 ,  G05B19/0428 ,  G05B2219/23043 ,  G05B2219/24159 ,  G05B2219/24168 ,  G05B2219/36163 ,  G05B2219/36542 ,  G06F21/10 ,  G06F2221/0775 ,  G06F2221/2101 ,  G06F2221/2117 ,  H04H60/13 ,  H04H60/76 ,  H04N21/4126 ,  H04N21/4345 ,  H04N21/435 ,  H04N21/4433 ,  H04N21/4622 ,  H04N21/6543

Abstract: An application management server includes: a terminal management table storage unit configured to store terminal device identification data for identifying a terminal device and information indicating whether or not transmission of notification data is necessary while correlating the terminal device identification data with the information; a registration request reception unit configured to receive from the terminal device, a registration request for registering transmission of notification data, and update the terminal management table storage unit based on the registration request; a release request reception unit configured to receive from the terminal device, a release request for releasing transmission of notification data, and update the terminal management table storage unit based on the release request; a via-broadcasting notification transmission unit configured to perform a process of including notification data in a broadcasting signal and transmitting the notification data; and a via-communication notification transmission unit configured to perform a process of referring to the terminal management table storage unit and transmitting the notification data to the terminal device.

Abstract translation: 应用管理服务器包括：终端管理表存储单元，被配置为存储用于识别终端设备的终端设备识别数据和指示在终端设备识别数据与该信息相关的情况下是否需要发送通知数据的信息; 注册请求接收单元，被配置为从终端设备接收注册通知数据的发送的注册请求，并且基于注册请求来更新终端管理表存储单元; 释放请求接收单元，被配置为从所述终端装置接收用于发布通知数据的释放请求，并且基于所述释放请求来更新所述终端管理表存储单元; 通过广播通知发送单元，被配置为执行在广播信号中包括通知数据的处理，并发送通知数据; 以及通信通知发送单元，被配置为执行参照终端管理表存储单元的处理，并将通知数据发送到终端设备。

公开(公告)号：US08196594B2

公开(公告)日：2012-06-12

申请号：US11988514

申请日：2006-07-11

Applicant: Riichiro Harano ,  Yoshiaki Tatsumi ,  Kinya Miyashita ,  Hiroshi Fujisawa

Inventor： Riichiro Harano ,  Yoshiaki Tatsumi ,  Kinya Miyashita ,  Hiroshi Fujisawa

IPC: B08B3/00

CPC classification number: H02N13/00 ,  B08B6/00 ,  B08B7/0014 ,  H01L21/02046 ,  H01L21/02096 ,  H01L21/67132 ,  H01L21/683

Abstract: Provided are an apparatus for and a method of removing foreign materials from a substrate which reliably remove the foreign materials, eliminate a chance of redeposition of the foreign materials, and are applicable even to large-size substrates. The apparatus for removing foreign materials includes electrostatic chucks (2, 3) forming a substrate chucking surface (4) to which the substrate (1) is attracted; a resin sheet supplying means (9) for supplying a resin sheet (5) to the substrate chucking surface (4); resin sheet collecting means (13) for collecting the supplied resin sheet (5); and a substrate transfer means for transferring the substrate (1). The substrate (1) supplied to the electrostatic chucks (2, 3) by the substrate transfer means is attracted to the substrate chucking surface (4) through the resin sheet (5), and a foreign material (22) deposited on a side of the substrate chucking surface (4) of the substrate (1) is transferred onto the resin sheet (5) and removed.

Abstract translation: 提供了从基材中除去异物的装置和方法，其可靠地除去异物，消除异物再沉积的可能性，并且甚至可应用于大尺寸基板。 用于除去异物的设备包括形成衬底（1）被吸引到其上的衬底夹持表面（4）的静电吸盘（2,3） 用于将树脂片（5）供给到基板夹持表面（4）的树脂片材供应装置（9）; 用于收集供应的树脂片（5）的树脂片收集装置（13）; 以及用于转移基板（1）的基板转印装置。 通过基板传送装置供给到静电卡盘（2,3）的基板（1）通过树脂片（5）被吸引到基板夹持表面（4），并且异物（22）沉积在 将基板（1）的基板夹持面（4）转印到树脂片（5）上并除去。

公开(公告)号：US20120120545A1

公开(公告)日：2012-05-17

申请号：US13381868

申请日：2010-06-29

Applicant: Hiroshi Fujisawa ,  Megumu Kawae ,  Yoshiaki Tatsumi

Inventor： Hiroshi Fujisawa ,  Megumu Kawae ,  Yoshiaki Tatsumi

IPC: H02N13/00 ,  H01L21/64

CPC classification number: H01L21/6833 ,  H02N13/00 ,  Y10T29/49117

Abstract: Provided are an electrostatic attracting structure which allows a strongly integrated structure to be maintained when used, and also allows the structure to be changed freely in configuration after the use, and a method of fabricating the same. The electrostatic attracting structure includes: a plurality of sheet members each having an electrode which is sandwiched between two dielectric materials; and at least one attraction power source, in which the plurality of sheet members are stacked, and by applying a voltage between the electrodes of facing sheet members, the facing sheet members are electrically attracted and fixed, when the electrostatic attracting structure is used, the dielectric material of any one of or both of outermost sheet members attracts the object to be attracted, and after the use, the stacked plurality of sheet members are made separable from one another by canceling the application of the voltage.

Abstract translation: 提供一种静电吸引结构，其在使用时能够维持强的一体化结构，并且还允许结构在使用后的结构中自由变化，及其制造方法。 静电吸引结构包括：多个片状构件，每个片状构件具有夹在两个电介质材料之间的电极; 以及至少一个吸引力源，其中多个片状构件被堆叠，并且通过在相对的片构件的电极之间施加电压，所述面层片构件被电吸引并固定，当使用静电吸引结构时， 最外面的片状构件中的任何一个或两个的电介质材料吸引待吸引的物体，并且在使用之后，堆叠的多个片状构件通过取消施加电压而彼此分离。

公开(公告)号：US20100149720A1

公开(公告)日：2010-06-17

申请号：US12691613

申请日：2010-01-21

Applicant: Hiroshi Fujisawa ,  Kinya Miyashita

Inventor： Hiroshi Fujisawa ,  Kinya Miyashita

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H02N13/00

Abstract: A bipolar electrostatic chuck which has excellent dielectric breakdown strength and provides excellent attracting performance. The bipolar electrostatic chuck eliminates difficulty in dismounting a sample from a sample attracting plane as much as possible after application of a voltage to electrodes is finished. The bipolar electrostatic chuck is provided with a first electrode and a second electrode in an insulator and permits a surface of the insulator to be the sample attracting plane. The insulator has the first electrode, an interelectrode insulating layer and the second electrode in this order from the sample attracting plane in the depth direction. The second electrode has a region not overlapping with the first electrode in a normal line direction of the sample attracting plane.

Abstract translation: 一种双极性静电卡盘，具有优良的介电击穿强度，并具有优良的吸引性能。 双极静电卡盘消除了在对电极施加电压完成之后尽可能多地从样品吸附面上拆下样品的困难。 双极静电卡盘在绝缘体中设置有第一电极和第二电极，并且允许绝缘体的表面成为样品吸引平面。 绝缘体在深度方向上从样品吸引面起依次具有第一电极，电极间绝缘层和第二电极。 第二电极在样品吸引面的法线方向上具有与第一电极不重叠的区域。

公开(公告)号：US20090250077A1

公开(公告)日：2009-10-08

申请号：US11988514

申请日：2006-07-11

Applicant: Riichiro Harano ,  Yoshiaki Tatsumi ,  Kinya Miyashita ,  Hiroshi Fujisawa

Inventor： Riichiro Harano ,  Yoshiaki Tatsumi ,  Kinya Miyashita ,  Hiroshi Fujisawa

IPC: B08B6/00 ,  A47L13/40

CPC classification number: H02N13/00 ,  B08B6/00 ,  B08B7/0014 ,  H01L21/02046 ,  H01L21/02096 ,  H01L21/67132 ,  H01L21/683

Abstract: Provided are an apparatus for and a method of removing foreign materials from a substrate which reliably remove the foreign materials, eliminate a chance of redeposition of the foreign materials, and are applicable even to large-size substrates. The apparatus for removing foreign materials includes electrostatic chucks (2, 3) forming a substrate chucking surface (4) to which the substrate (1) is attracted; a resin sheet supplying means (9) for supplying a resin sheet (5) to the substrate chucking surface (4); resin sheet collecting means (13) for collecting the supplied resin sheet (5); and a substrate transfer means for transferring the substrate (1). The substrate (1) supplied to the electrostatic chucks (2, 3) by the substrate transfer means is attracted to the substrate chucking surface (4) through the resin sheet (5), and a foreign material (22) deposited on a side of the substrate chucking surface (4) of the substrate (1) is transferred onto the resin sheet (5) and removed.

Abstract translation: 提供了从基材中除去异物的装置和方法，其可靠地除去异物，消除异物再沉积的可能性，并且甚至可应用于大尺寸基板。 用于除去异物的设备包括形成衬底（1）被吸引到其上的衬底夹持表面（4）的静电吸盘（2,3） 用于将树脂片（5）供给到基板夹持表面（4）的树脂片材供应装置（9）; 用于收集供应的树脂片（5）的树脂片收集装置（13）; 以及用于转移基板（1）的基板转印装置。 通过基板传送装置供给到静电卡盘（2,3）的基板（1）通过树脂片（5）被吸引到基板夹持表面（4），并且异物（22）沉积在 将基板（1）的基板夹持面（4）转印到树脂片（5）上并除去。

公开(公告)号：US20090040681A1

公开(公告)日：2009-02-12

申请号：US12085349

申请日：2006-11-30

Applicant: Hiroshi Fujisawa ,  Kinya Miyashita

Inventor： Hiroshi Fujisawa ,  Kinya Miyashita

IPC: H01L21/683

CPC classification number: H02N13/00 ,  H01L21/68 ,  H01L21/6833 ,  Y10T279/23

Abstract: An electrostatic chuck electrode sheet which allows the difference in capacitance between electrodes due to the presence or absence of a substrate to be increased to a level which can be accurately detected using a known substrate detection device, and allows an electrostatic chuck to exhibit an excellent attraction force, and an electrostatic chuck using the electrode sheet, are disclosed. The electrode sheet has a layered structure in which a first insulating layer, a first electrode layer, an inter-electrode insulating layer, a second electrode layer, and a second insulating layer are stacked and attracts a substrate on the first insulating layer, the first electrode layer having a plurality of openings in a specific planar area, and the second electrode layer having opening equivalent portions provided at positions at which the openings in the first electrode layer are projected onto the second electrode layer in a depth direction of the electrode sheet and having almost the same area as the projected openings, and connection portions that connect the opening equivalent portions. The electrostatic chuck is formed using the electrode sheet.

Abstract translation: 能够将由于基板的存在或不存在而导致的电极间的电容差增大到能够使用公知的基板检测装置能够精确检测的水平的静电卡盘电极片，并且允许静电卡盘显示出优异的吸引力 并且公开了使用该电极片的静电卡盘。 电极片具有堆叠第一绝缘层，第一电极层，电极间绝缘层，第二电极层和第二绝缘层的层叠结构，并且在第一绝缘层上吸引衬底，第一绝缘层 电极层，其具有在特定平面区域中的多个开口，并且所述第二电极层具有设置在所述第一电极层中的开口沿着所述电极片的深度方向突出到所述第二电极层上的位置处的开口等效部分，以及 具有与投影开口几乎相同的面积，以及连接开口等效部分的连接部分。 使用电极片形成静电卡盘。

公开(公告)号：US6114284A

公开(公告)日：2000-09-05

申请号：US125789

申请日：1999-02-25

Applicant: Hiroshi Fujisawa ,  Nada Morishige ,  Yasuo Kamuro

Inventor： Hiroshi Fujisawa ,  Nada Morishige ,  Yasuo Kamuro

IPC: A01N37/42 ,  A01N43/12

CPC classification number: A01N37/42

Abstract: A plant growth regulator comprising as the active ingredients gibberellin and a jasmonic acid ester represented by the following formula (1): ##STR1## wherein R.sup.1 and R.sup.2 represent hydrocarbon groups. Gibberellin and the jasmonic acid ester are applied as a mixture, or as single agents each containing one of the two compounds, which are applied concurrently, or separately by a procedure wherein, while the earlier applied one is still in force, the other is applied.

Abstract translation: PCT No.PCT / JP97 / 00616 Sec。 一九九九年二月二十五日 102（e）1999年2月25日PCT提交1997年2月28日PCT公布。 公开号WO97 / 31536 日本公报1997年9月4日，含有作为活性成分的赤霉素和下述式（1）表示的茉莉酸酯的植物生长调节剂：其中R1和R2表示烃基。 赤霉素和茉莉酸酯作为混合物施用，或作为单一试剂，每种试剂均含有两种化合物之一，它们同时施用或分开地通过其中先前施用的化合物仍然有效的方法施用，另一种施用 。

公开(公告)号：US5777037A

公开(公告)日：1998-07-07

申请号：US585515

申请日：1996-01-16

Applicant: Yoshimichi Yamanaka ,  Hiroshi Fujisawa ,  Takeshi Chiba ,  Yoshikuni Deguchi ,  Kazuya Yonezawa

Inventor： Yoshimichi Yamanaka ,  Hiroshi Fujisawa ,  Takeshi Chiba ,  Yoshikuni Deguchi ,  Kazuya Yonezawa

IPC: C08F2/06 ,  C08F2/38 ,  C08F4/06 ,  C08F4/14 ,  C08F8/00 ,  C08F10/00 ,  C08F10/10 ,  C08F110/10 ,  C08F290/00 ,  C08F299/00 ,  C08F4/16

CPC classification number: C08F10/00 ,  C08F10/10 ,  C08F110/10 ,  Y10S525/918

Abstract: The present invention provides a novel solvent which is capable of providing an excellent isobutylene polymer, little affects the environment, has a lower solubility in water than those of halogenated hydrocarbons having 1 or 2 carbon atoms and can be decomposed relatively easily. Namely, the present invention relates to: a process for producing an isobutylene polymer, which comprises performing a cationic polymerization reaction in a solvent containing primary and/or secondary monohalogenated hydrocarbon(s) having 3 to 8 carbon atoms, and an isobutylene polymer thus obtained; and a process for producing an isobutylene polymer having a vinyl group introduced into the terminal thereof, which comprises reacting the isobutylene polymer produced above with 1,9-decadiene or allyltrimethylsilane, and an isobutylene polymer thus obtained.

Abstract translation: 本发明提供能够提供优异的异丁烯聚合物的新型溶剂，对环境影响小，在水中的溶解度低于具有1或2个碳原子的卤代烃的溶解度，并且可以相对容易地分解。 即，本发明涉及：异丁烯系聚合物的制造方法，其包括在含有碳原子数为3〜8的一次和/或仲一卤化烃的溶剂中进行阳离子聚合反应，得到异丁烯系聚合物 ; 以及制造其末端具有乙烯基的异丁烯聚合物的方法，其包括使上述制备的异丁烯聚合物与1,9-癸二烯或烯丙基三甲基硅烷和由此获得的异丁烯聚合物反应。