公开(公告)号：US06974979B2

公开(公告)日：2005-12-13

申请号：US10303818

申请日：2002-11-26

申请人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

发明人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

IPC分类号： G11C16/04 ,  H01L21/8247 ,  H01L27/105 ,  H01L27/115 ,  H01L29/73 ,  H01L27/103

CPC分类号： H01L27/11521 ,  G11C16/0483 ,  G11C16/10 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529

摘要： A select gate transistor has a select gate electrode composed of a first-level conductive layer and a second-level conductive layer. The first-level conductive layer has a plurality of contact areas. The second-level conductive layer has its portions removed that are located above the contact areas. Two adjacent select gate electrodes that are adjacent to each other in the column direction are arranged such that the contact areas of one select gate electrode are not opposed to the contact areas of the other select gate electrode. One select gate electrode has its first- and second-level conductive layers removed in their portions that are opposed to the contact areas of the other select gate electrode.

摘要翻译： 选择栅极晶体管具有由第一级导电层和第二级导电层构成的选择栅电极。 第一级导电层具有多个接触区域。 第二级导电层的部分被去除，位于接触区域上方。 在列方向上彼此相邻的两个相邻的选择栅电极被布置成使得一个选择栅电极的接触区域不与另一个选择栅电极的接触区域相对。 一个选择栅电极在其与另一个选择栅电极的接触区域相对的部分中移除其第一和第二级导电层。

公开(公告)号：US08350309B2

公开(公告)日：2013-01-08

申请号：US13310148

申请日：2011-12-02

申请人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

发明人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

IPC分类号： H01L27/108 ,  H01L29/73

CPC分类号： G11C16/0483 ,  G11C16/10

摘要： A select gate transistor has a select gate electrode composed of a first-level conductive layer and a second-level conductive layer. The first-level conductive layer has contact areas. The second-level conductive layer has its portions removed that are located above the contact areas. Two adjacent select gate electrodes that are adjacent to each other in the column direction are arranged such that the contact areas of one select gate electrode are not opposed to the contact areas of the other select gate electrode. One select gate electrode has its first- and second-level conductive layers removed in their portions that are opposed to the contact areas of the other select gate electrode.

摘要翻译： 选择栅极晶体管具有由第一级导电层和第二级导电层构成的选择栅电极。 第一级导电层具有接触区域。 第二级导电层的部分被去除，位于接触区域上方。 在列方向上彼此相邻的两个相邻的选择栅电极被布置成使得一个选择栅电极的接触区域不与另一个选择栅电极的接触区域相对。 一个选择栅电极在其与另一个选择栅电极的接触区域相对的部分中移除其第一和第二级导电层。

公开(公告)号：US08084802B2

公开(公告)日：2011-12-27

申请号：US13025957

申请日：2011-02-11

申请人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

发明人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

IPC分类号： H01L27/108 ,  H01L29/73

CPC分类号： H01L27/11521 ,  G11C16/0483 ,  G11C16/10 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529

摘要： A select gate transistor has a select gate electrode composed of a first-level conductive layer and a second-level conductive layer. The first-level conductive layer has contact areas. The second-level conductive layer has its portions removed that are located above the contact areas. Two adjacent select gate electrodes that are adjacent to each other in the column direction are arranged such that the contact areas of one select gate electrode are not opposed to the contact areas of the other select gate electrode. One select gate electrode has its first- and second-level conductive layers removed in their portions that are opposed to the contact areas of the other select gate electrode.

摘要翻译： 选择栅极晶体管具有由第一级导电层和第二级导电层构成的选择栅电极。 第一级导电层具有接触区域。 第二级导电层的部分被去除，位于接触区域上方。 在列方向上彼此相邻的两个相邻的选择栅电极被布置成使得一个选择栅电极的接触区域不与另一个选择栅电极的接触区域相对。 一个选择栅电极在其与另一个选择栅电极的接触区域相对的部分中移除其第一和第二级导电层。

公开(公告)号：US20110134700A1

公开(公告)日：2011-06-09

申请号：US13025957

申请日：2011-02-11

申请人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

发明人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

IPC分类号： G11C16/04

CPC分类号： H01L27/11521 ,  G11C16/0483 ,  G11C16/10 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529

摘要： A select gate transistor has a select gate electrode composed of a first-level conductive layer and a second-level conductive layer. The first-level conductive layer has contact areas. The second-level conductive layer has its portions removed that are located above the contact areas. Two adjacent select gate electrodes that are adjacent to each other in the column direction are arranged such that the contact areas of one select gate electrode are not opposed to the contact areas of the other select gate electrode. One select gate electrode has its first- and second-level conductive layers removed in their portions that are opposed to the contact areas of the other select gate electrode.

摘要翻译： 选择栅极晶体管具有由第一级导电层和第二级导电层构成的选择栅电极。 第一级导电层具有接触区域。 第二级导电层的部分被去除，位于接触区域上方。 在列方向上彼此相邻的两个相邻的选择栅电极被布置成使得一个选择栅电极的接触区域不与另一个选择栅电极的接触区域相对。 一个选择栅电极在其与另一个选择栅电极的接触区域相对的部分中移除其第一和第二级导电层。

公开(公告)号：US07332762B2

公开(公告)日：2008-02-19

申请号：US11617425

申请日：2006-12-28

申请人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

发明人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

IPC分类号： H01L27/108 ,  H01L29/73

CPC分类号： H01L27/11521 ,  G11C16/0483 ,  G11C16/10 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529

摘要： A select gate transistor has a select gate electrode composed of a first-level conductive layer and a second-level conductive layer. The first-level conductive layer has contact areas. The second-level conductive layer has its portions removed that are located above the contact areas. Two adjacent select gate electrodes that are adjacent to each other in the column direction are arranged such that the contact areas of one select gate electrode are not opposed to the contact areas of the other select gate electrode. One select gate electrode has its first- and second-level conductive layers removed in their portions that are opposed to the contact areas of the other select gate electrode.

公开(公告)号：US20050270846A1

公开(公告)日：2005-12-08

申请号：US11197552

申请日：2005-08-05

申请人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

发明人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

IPC分类号： G11C16/04 ,  H01L21/8247 ,  H01L27/105 ,  H01L27/115

CPC分类号： H01L27/11521 ,  G11C16/0483 ,  G11C16/10 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529

摘要： A select gate transistor has a select gate electrode composed of a first-level conductive layer and a second-level conductive layer. The first-level conductive layer has contact areas. The second-level conductive layer has its portions removed that are located above the contact areas. Two adjacent select gate electrodes that are adjacent to each other in the column direction are arranged such that the contact areas of one select gate electrode are not opposed to the contact areas of the other select gate electrode. One select gate electrode has its first- and second-level conductive layers removed in their portions that are opposed to the contact areas of the other select gate electrode.

摘要翻译： 选择栅极晶体管具有由第一级导电层和第二级导电层构成的选择栅电极。 第一级导电层具有接触区域。 第二级导电层的部分被去除，位于接触区域上方。 在列方向上彼此相邻的两个相邻的选择栅电极被布置成使得一个选择栅电极的接触区域不与另一个选择栅电极的接触区域相对。 一个选择栅电极在其与另一个选择栅电极的接触区域相对的部分中移除其第一和第二级导电层。

公开(公告)号：US20120075903A1

公开(公告)日：2012-03-29

申请号：US13310148

申请日：2011-12-02

申请人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

发明人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

IPC分类号： G11C5/06

CPC分类号： G11C16/0483 ,  G11C16/10

摘要： A select gate transistor has a select gate electrode composed of a first-level conductive layer and a second-level conductive layer. The first-level conductive layer has contact areas. The second-level conductive layer has its portions removed that are located above the contact areas. Two adjacent select gate electrodes that are adjacent to each other in the column direction are arranged such that the contact areas of one select gate electrode are not opposed to the contact areas of the other select gate electrode. One select gate electrode has its first- and second-level conductive layers removed in their portions that are opposed to the contact areas of the other select gate electrode.

摘要翻译： 选择栅极晶体管具有由第一级导电层和第二级导电层构成的选择栅电极。 第一级导电层具有接触区域。 第二级导电层的部分被去除，位于接触区域上方。 在列方向上彼此相邻的两个相邻的选择栅电极被布置成使得一个选择栅电极的接触区域不与另一个选择栅电极的接触区域相对。 一个选择栅电极在其与另一个选择栅电极的接触区域相对的部分中移除其第一和第二级导电层。

公开(公告)号：US06512253B2

公开(公告)日：2003-01-28

申请号：US09976317

申请日：2001-10-15

申请人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

发明人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

IPC分类号： H01L2710

CPC分类号： H01L27/11521 ,  G11C16/0483 ,  G11C16/10 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529

摘要： A select gate transistor has a select gate electrode composed of a first-level conductive layer and a second-level conductive layer. The first-level conductive layer has a plurality of contact areas. The second-level conductive layer has its portions removed that are located above the contact areas. Two adjacent select gate electrodes that are adjacent to each other in the column direction are arranged such that the contact areas of one select gate electrode are not opposed to the contact areas of the other select gate electrode. One select gate electrode has its first- and second-level conductive layers removed in their portions that are opposed to the contact areas of the other select gate electrode.

公开(公告)号：US06353242B1

公开(公告)日：2002-03-05

申请号：US09274481

申请日：1999-03-23

申请人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

发明人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

IPC分类号： G11C1604

CPC分类号： H01L27/11521 ,  G11C16/0483 ,  G11C16/10 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529

摘要： A select gate transistor has a select gate electrode composed of a first-level conductive layer and a second-level conductive layer. The first-level conductive layer has a plurality of contact areas. The second-level conductive layer has its portions removed that are located above the contact areas. Two adjacent select gate electrodes that are adjacent to each other in the column direction are arranged such that the contact areas of one select gate electrode are not opposed to the contact areas of the other select gate electrode. One select gate electrode has its first- and second-level conductive layers removed in their portions that are opposed to the contact areas of the other select gate electrode.

摘要翻译： 选择栅极晶体管具有由第一级导电层和第二级导电层构成的选择栅电极。 第一级导电层具有多个接触区域。 第二级导电层的部分被去除，位于接触区域上方。 在列方向上彼此相邻的两个相邻的选择栅电极被布置成使得一个选择栅电极的接触区域不与另一个选择栅电极的接触区域相对。 一个选择栅电极在其与另一个选择栅电极的接触区域相对的部分中移除其第一和第二级导电层。

公开(公告)号：US07893477B2

公开(公告)日：2011-02-22

申请号：US11829320

申请日：2007-07-27

申请人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

发明人： Hiroshi Watanabe ,  Hiroshi Nakamura ,  Kazuhiro Shimizu ,  Seiichi Aritome ,  Toshitake Yaegashi ,  Yuji Takeuchi ,  Kenichi Imamiya ,  Ken Takeuchi ,  Hideko Oodaira

IPC分类号： H01L27/108 ,  H01L29/73

CPC分类号： H01L27/11521 ,  G11C16/0483 ,  G11C16/10 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529

摘要： A select gate transistor has a select gate electrode composed of a first-level conductive layer and a second-level conductive layer. The first-level conductive layer has contact areas. The second-level conductive layer has its portions removed that are located above the contact areas. Two adjacent select gate electrodes that are adjacent to each other in the column direction are arranged such that the contact areas of one select gate electrode are not opposed to the contact areas of the other select gate electrode. One select gate electrode has its first- and second-level conductive layers removed in their portions that are opposed to the contact areas of the other select gate electrode.