摘要:
The method of manufacturing rare earth thick film magnet comprising a step of forming an alloy layer of 30-100 μm thick having a general formula RXBYTMZ on a substrate by a physical deposition process, and a step of heat-treating the alloy layer to form a thick film magnetic layer having R2TM14B phase as a main phase. In the general formula, R is at least one of rare earth elements, B is boron, TM is iron or its alloy partly substituted by cobalt. X is 0.1-0.2, Y is 0.05-0.2 and Z=1-X-Y. Further, the method of the present invention includes a step of laminating a plurality of alloy layers formed on a substrate together with the substrate. A motor comprising rare earth thick film magnet of the present invention is extremely small while obtaining high output.
摘要翻译:制造稀土厚膜磁体的方法包括以下步骤:形成30-100μm厚的合金层,其具有通式为R 1,Y,Y,Z Z 通过物理沉积工艺在衬底上进行热处理,以及对合金层进行热处理以形成具有R 2 N 14 B的厚膜磁性层的步骤 相为主相。 在通式中,R是稀土元素中的至少一种,B是硼,TM是铁或其部分被钴取代的合金。 X为0.1-0.2,Y为0.05-0.2,Z = 1-X-Y。 此外,本发明的方法包括将与基板一起形成在基板上的多个合金层层叠的步骤。 包含本发明的稀土类厚膜磁体的马达极小,同时获得高输出。