公开(公告)号：US09223318B2

公开(公告)日：2015-12-29

申请号：US13519115

申请日：2010-12-22

申请人： Hiroyuki Takeuchi ,  Yutaka Yoneda ,  Yasuhiro Isobe

发明人： Hiroyuki Takeuchi ,  Yutaka Yoneda ,  Yasuhiro Isobe

IPC分类号： G05D7/06

CPC分类号： G05D7/0652 ,  Y10T137/7784

摘要： A mass flow controller with high accuracy flow rate output control is disclosed. In the mass flow controller, relation data that indicates a corresponding relation between a flow rate of a reference gas and a CF value of a sample gas is stored, a target flow rate is converted into a reference gas flow rate by the use of a predetermined CF value, a sample gas flow rate is calculated from the converted reference gas flow rate and a CF value corresponding to the reference gas flow rate, the sample gas flow rate is compared with the target flow rate, and the CF value that is used for conversion of the reference gas flow rate or calculation of the sample gas flow rate is updated by the use of the corresponding relation based on the error between the sample gas flow rate and the target flow rate.

摘要翻译： 公开了一种具有高精度流量输出控制的质量流量控制器。 在质量流量控制器中，存储指示参考气体的流量与样品气体的CF值之间的对应关系的关系数据，通过使用预定的流量将目标流量转换为参考气体流量 CF值，根据转换的参考气体流量和与参考气体流量对应的CF值计算样品气体流量，将样品气体流量与目标流量进行比较，将用于 通过使用基于样品气体流量与目标流量之间的误差的对应关系来更新参考气体流量的转换或样品气体流量的计算。

公开(公告)号：US20120298221A1

公开(公告)日：2012-11-29

申请号：US13519115

申请日：2010-12-22

申请人： Hiroyuki Takeuchi ,  Yutaka Yoneda ,  Yasuhiro Isobe

发明人： Hiroyuki Takeuchi ,  Yutaka Yoneda ,  Yasuhiro Isobe

IPC分类号： F16K31/12

CPC分类号： G05D7/0652 ,  Y10T137/7784

摘要： A mass flow controller with high accuracy flow rate output control is disclosed. In the mass flow controller, relation data that indicates a corresponding relation between a flow rate of a reference gas and a CF value of a sample gas is stored, a target flow rate is converted into a reference gas flow rate by the use of a predetermined CF value, a sample gas flow rate is calculated from the converted reference gas flow rate and a CF value corresponding to the reference gas flow rate, the sample gas flow rate is compared with the target flow rate, and the CF value that is used for conversion of the reference gas flow rate or calculation of the sample gas flow rate is updated by the use of the corresponding relation based on the error between the sample gas flow rate and the target flow rate.

摘要翻译： 公开了一种具有高精度流量输出控制的质量流量控制器。 在质量流量控制器中，存储指示参考气体的流量与样品气体的CF值之间的对应关系的关系数据，通过使用预定的流量将目标流量转换为参考气体流量 CF值，根据转换的参考气体流量和与参考气体流量对应的CF值计算样品气体流量，将样品气体流量与目标流量进行比较，将用于 通过使用基于样品气体流量与目标流量之间的误差的对应关系来更新参考气体流量的转换或样品气体流量的计算。

公开(公告)号：US08851105B2

公开(公告)日：2014-10-07

申请号：US12722570

申请日：2010-03-12

申请人： Toshihiro Kashima ,  Yutaka Yoneda ,  Yasuhiro Isobe

发明人： Toshihiro Kashima ,  Yutaka Yoneda ,  Yasuhiro Isobe

IPC分类号： G01F5/00 ,  G05D7/06 ,  G01F1/684 ,  G01F25/00

CPC分类号： G01F1/6847 ,  G01F5/00 ,  G01F25/0007 ,  G05D7/0635 ,  Y10T137/7722 ,  Y10T137/7759 ,  Y10T137/7761

摘要： An object of this invention is to provide a superior mass flow meter or the like that can flexibly cope with a change of a sample fluid such as a gas kind without requiring a special troublesome labor and that can measure a flow rate with high accuracy. The mass flow meter comprises a sensor section that detects a flow rate of a sample fluid flowing in a flow channel, a setting section that sets a flow rate characteristic function that is intrinsic to each fluid to determine a flow rate based on a flow rate detected value output by the sensor section and an instrumental error correction parameter that is independent from the flow rate characteristic function and common to multiple sample fluids to correct an instrumental error of each mass flow meter, and a flow rate calculating section that calculates a flow rate measurement value of the sample fluid by applying the flow rate characteristic function and the instrumental error correction parameter to the flow rate detected value.

摘要翻译： 本发明的一个目的是提供一种能够灵活应对气体样品流体变化的优质的质量流量计等，而不需要特别麻烦的劳动，并可以高精度地测量流量。 质量流量计包括检测在流路中流动的样品流体的流量的传感器部分，设定部分，其设定每个流体固有的流量特性函数，以基于检测到的流量来确定流量 由传感器部分输出的值和与流量特性函数无关并且与多个样本流体共同以校正每个质量流量计的仪器误差的仪器误差校正参数;以及流量计算部分，其计算流量测量 通过将流量特性函数和仪器误差校正参数应用于流量检测值来获得样品流体的值。

公开(公告)号：US08356623B2

公开(公告)日：2013-01-22

申请号：US12625366

申请日：2009-11-24

申请人： Yasuhiro Isobe ,  Osamu Horinouchi ,  Yuki Tanaka ,  Masao Yamaguchi ,  Yukimasa Furukawa

发明人： Yasuhiro Isobe ,  Osamu Horinouchi ,  Yuki Tanaka ,  Masao Yamaguchi ,  Yukimasa Furukawa

IPC分类号： F16K31/00

CPC分类号： G01F1/6842 ,  G01F1/6847 ,  G01F5/00 ,  G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： In order to improve a measurement accuracy of a mass flow meter, the mass flow meter comprises a flow rate calculating section that obtains an output signal from a sensor section having a thermosensitive resistive element arranged in a flow channel where a sample gas flows and that calculates a flow rate of the sample gas, a pressure measuring section that measures a primary side pressure in the flow channel, and a flow rate correcting section that corrects the measured flow rate obtained by the flow rate calculating section by the use of the primary side pressure obtained by the pressure measuring section and a gas coefficient determined by an isobaric specific heat of the sample gas.

摘要翻译： 为了提高质量流量计的测量精度，质量流量计包括流量计算部，其从具有布置在样本气体流动的流路中的热敏电阻元件的传感器部获取输出信号，并计算 样本气体的流量，测量流路中的一次侧压力的压力测量部，以及流量校正部，其通过使用一次侧压力来校正由流量计算部获得的测量流量 通过压力测量部获得的气体系数和由样品气体的等压比热确定的气体系数。

公开(公告)号：US20100163119A1

公开(公告)日：2010-07-01

申请号：US12625366

申请日：2009-11-24

申请人： Yasuhiro Isobe ,  Osamu Horinouchi ,  Yuki Tanaka ,  Masao Yamaguchi ,  Yukimasa Furukawa

发明人： Yasuhiro Isobe ,  Osamu Horinouchi ,  Yuki Tanaka ,  Masao Yamaguchi ,  Yukimasa Furukawa

IPC分类号： G05D7/06 ,  G01F1/80

CPC分类号： G01F1/6842 ,  G01F1/6847 ,  G01F5/00 ,  G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： In order to improve a measurement accuracy of a mass flow meter, the mass flow meter comprises a flow rate calculating section that obtains an output signal from a sensor section having a thermosensitive resistive element arranged in a flow channel where a sample gas flows and that calculates a flow rate of the sample gas, a pressure measuring section that measures a primary side pressure in the flow channel, and a flow rate correcting section that corrects the measured flow rate obtained by the flow rate calculating section by the use of the primary side pressure obtained by the pressure measuring section and a gas coefficient determined by an isobaric specific heat of the sample gas.

摘要翻译： 为了提高质量流量计的测量精度，质量流量计包括流量计算部，其从具有布置在样本气体流动的流路中的热敏电阻元件的传感器部获取输出信号，并计算 样本气体的流量，测量流路中的一次侧压力的压力测量部，以及流量校正部，其通过使用一次侧压力来校正由流量计算部获得的测量流量 通过压力测量部获得的气体系数和由样品气体的等压比热确定的气体系数。