公开(公告)号：US20100330738A1

公开(公告)日：2010-12-30

申请号：US12662305

申请日：2010-04-09

申请人： Hiroyuki Uchiyama ,  Hironori Wakana ,  Tetsufumi Kawamura ,  Fumi Kurita ,  Hideko Fukushima

发明人： Hiroyuki Uchiyama ,  Hironori Wakana ,  Tetsufumi Kawamura ,  Fumi Kurita ,  Hideko Fukushima

IPC分类号： H01L21/36 ,  C23C14/35 ,  C23C14/34 ,  H01L21/365

CPC分类号： H01L29/7869 ,  C04B35/453 ,  C04B35/457 ,  C04B2235/3284 ,  C04B2235/3293 ,  C04B2235/6585 ,  C04B2235/72 ,  C04B2235/722 ,  C04B2235/727 ,  C04B2235/77 ,  C23C14/086 ,  C23C14/3414 ,  H01L21/02554 ,  H01L21/02565 ,  H01L21/02631 ,  H01L29/66969

摘要： An oxide semiconductor target of a ZTO (zinc tin complex oxide) type oxide semiconductor material of an appropriate (Zn/(Zn+Sn)) composition having high mobility and threshold potential stability and with less restriction in view of the cost and the resource and with less restriction in view of the process, and an oxide semiconductor device using the same, in which a sintered Zn tin complex oxide with a (Zn/(Zn+Sn)) composition of 0.6 to 0.8 is used as a target, the resistivity of the target itself is at a high resistance of 1 Ωcm or higher and, further, the total concentration of impurities is controlled to 100 ppm or less.

摘要翻译： ZTO（锌锡复合氧化物）型氧化物半导体材料的氧化物半导体靶，具有高迁移率和阈值电位稳定性的合适的（Zn /（Zn + Sn））组合物，考虑到成本和资源，限制少， 考虑到该方法的限制较少，并且使用其中使用具有0.6至0.8（Zn /（Zn + Sn））组成的烧结Zn锡复合氧化物作为靶的氧化物半导体器件，其电阻率 的目标本身的电阻为1Ω·cm以上的高电阻，另外将杂质的总浓度控制在100ppm以下。

公开(公告)号：US20130277601A1

公开(公告)日：2013-10-24

申请号：US13978027

申请日：2012-03-06

申请人： Fumi Kurita ,  Hisato Tokoro

发明人： Fumi Kurita ,  Hisato Tokoro

IPC分类号： H01F1/01 ,  H01F41/00

CPC分类号： H01F1/01 ,  B22F1/02 ,  C22C29/16 ,  H01F1/24 ,  H01F41/005 ,  H01F41/0246

摘要： A composite, soft-magnetic powder comprising soft-magnetic, iron-based core particles having an average particle size of 2-100 μm, and boron nitride-based coating layers each covering at least part of each soft-magnetic, iron-based core particle, said coating layers being polycrystalline layers comprising fine boron nitride crystal grains having different crystal orientations and an average crystal grain size of 3-15 nm, the average thickness of said polycrystalline layers being 6.6% or less of the average particle size of said soft-magnetic, iron-based core particles, is produced by (1) mixing iron nitride powder having an average particle size of 2-100 μm with boron powder having an average particle size of 0.1-10 μm, (2) heat-treating the resultant mixed powder at a temperature of 600-850° C. in a nitrogen atmosphere, and (3) removing non-magnetic components.

摘要翻译： 一种复合软磁粉末，其包含平均粒度为2〜100μm的软磁性铁系核心粒子，以及氮化硼系涂覆层，其各自覆盖至少部分软磁性铁基磁心 所述涂层是包含具有不同晶体取向的平均晶粒尺寸为3-15nm的精细氮化硼晶粒的多晶层，所述多晶层的平均厚度为所述软化物的平均粒径的6.6％以下 通过（1）将平均粒径为2〜100μm的氮化铁粉末与平均粒径为0.1〜10μm的硼粉末混合，制成铁磁性核心颗粒，（2）热处理 得到的混合粉末在氮气气氛中在600-850℃的温度下，和（3）去除非磁性组分。