公开(公告)号：US20130062307A1

公开(公告)日：2013-03-14

申请号：US13230261

申请日：2011-09-12

申请人： Hisayoshi WATANABE ,  Hideyuki Yatsu ,  Takayuki Nishizawa ,  Masashi Sano ,  Hiromichi Umehara ,  Takayasu Kanaya ,  Tetsuji Hori

发明人： Hisayoshi WATANABE ,  Hideyuki Yatsu ,  Takayuki Nishizawa ,  Masashi Sano ,  Hiromichi Umehara ,  Takayasu Kanaya ,  Tetsuji Hori

IPC分类号： C23F1/04 ,  G11B5/31 ,  G03F7/20

CPC分类号： G11B5/3163

摘要： The present invention relates to a method of making a mask for patterning a thin film The method includes a step of forming an inorganic material, which is resolvable into alkali solution, on a substrate; a step of forming the inorganic material in a predetermined pattern; and a step of narrowing the inorganic material with the alkali solution to form the mask.

摘要翻译： 本发明涉及一种制备用于图案化薄膜的掩模的方法。该方法包括在基板上形成可分解成碱溶液的无机材料的步骤; 以预定图案形成无机材料的步骤; 以及用碱溶液使无机材料变窄以形成掩模的步骤。

公开(公告)号：US20130027810A1

公开(公告)日：2013-01-31

申请号：US13194789

申请日：2011-07-29

申请人： Hisayoshi WATANABE ,  Yuji MATSUURA ,  Takayuki NISHIZAWA ,  Masashi SANO ,  Tetsuji HORI

发明人： Hisayoshi WATANABE ,  Yuji MATSUURA ,  Takayuki NISHIZAWA ,  Masashi SANO ,  Tetsuji HORI

IPC分类号： G11B5/17 ,  B23P17/04 ,  G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49 ,  Y10T29/49021

摘要： The present invention relates to a method of forming a metal in a concave portion of a substrate. The method includes a step of preparing a substrate having a concave portion; a step of applying a liquid coating member on the substrate and filling in and solidifying the concave portion with the coating member; a step of covering the coating member with a resist; a step of forming a penetrating hole that penetrates the resist in a position of the concave portion of the substrate; a step of removing the coating member within the concave portion; and a step of filling a metal into a portion where the coating member has been removed.

摘要翻译： 本发明涉及在基板的凹部中形成金属的方法。 该方法包括制备具有凹部的基板的步骤; 将液体涂布部件涂覆在基板上并用涂布部件填充和固化凹部的步骤; 用抗蚀剂覆盖涂层部件的步骤; 在所述基板的凹部的位置形成贯通所述抗蚀剂的贯通孔的工序; 在所述凹部内除去所述涂布部件的工序; 以及将金属填充到已经去除了涂层部件的部分的步骤。

公开(公告)号：US20110240593A1

公开(公告)日：2011-10-06

申请号：US12753557

申请日：2010-04-02

申请人： Hisayoshi WATANABE ,  Hideyuki YATSU ,  Masachika HASHINO ,  Koichi OTANI

发明人： Hisayoshi WATANABE ,  Hideyuki YATSU ,  Masachika HASHINO ,  Koichi OTANI

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A method of forming a magnetic pole section of a perpendicular magnetic recording type thin-film magnetic head and a method of manufacturing a perpendicular magnetic recording type thin-film magnetic head that include forming on an under layer a resist pattern having an opening, forming a first nonmagnetic layer, forming a first magnetic layer, forming a magnetic layer pattern, removing the resist pattern and then applying a resist layer onto a first nonmagnetic layer and a magnetic layer pattern, developing or ashing partway the applied resist layer and baking the remaining resist layer, removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left, removing all of the resist layer and then forming a second nonmagnetic layer on at least the magnetic layer pattern, and forming a second magnetic layer on the formed second nonmagnetic layer.

摘要翻译： 形成垂直磁记录型薄膜磁头的磁极部分的方法和制造垂直磁记录型薄膜磁头的方法，该方法包括在下层上形成具有开口的抗蚀剂图案，形成 第一非磁性层，形成第一磁性层，形成磁性层图案，去除抗蚀剂图案，然后在第一非磁性层和磁性层图案上施加抗蚀剂层，在所施加的抗蚀剂层的中途显影或灰化，并烘烤剩余的抗蚀剂 层，通过对所述烘烤抗蚀剂层进行蚀刻而从所述磁性层图案的至少一个侧表面去除所述第一非磁性层，除去所有所述抗蚀剂层，然后在至少所述磁性层图案上形成第二非磁性层，以及 在形成的第二非磁性层上形成第二磁性层。

公开(公告)号：US20130010390A1

公开(公告)日：2013-01-10

申请号：US13176134

申请日：2011-07-05

申请人： Hisayoshi WATANABE ,  Hitoshi HATATE ,  Hideyuki YATSU ,  Koichi OTANI

发明人： Hisayoshi WATANABE ,  Hitoshi HATATE ,  Hideyuki YATSU ,  Koichi OTANI

IPC分类号： G11B5/60 ,  G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A thin-film magnetic head includes a slider substrate and a write element. The slider substrate has an air bearing surface at one side thereof. The write element has a recording magnetic pole film. The recording magnetic pole film is disposed on a plane crossing the air bearing surface over the slider substrate and has a large-width portion and a small-width portion continuously arranged in the named order toward the air bearing surface. The small-width portion has a smaller width than the large-width portion. Of the large-width portion and the small-width portion, at least the small-width portion has a first portion and a second portion. The second portion is continuous with an upper end of the first portion and has both side faces inclined in such a direction as to increase the width. An external angle of the first portion formed by a plane parallel to a bottom face and the side face is larger than an external angle of the second portion formed by a plane parallel to the bottom face and the side face.

摘要翻译： 薄膜磁头包括滑块基板和写入元件。 滑块基板在其一侧具有空气轴承表面。 写元件具有记录磁极膜。 记录磁极膜设置在与滑动基板上的空气轴承表面相交的平面上，并且具有朝向空气轴承表面依次连续排列的大宽度部分和小宽度部分。 小宽度部分的宽度比宽度大的部分小。 在大宽度部分和小宽度部分中，至少小宽度部分具有第一部分和第二部分。 第二部分与第一部分的上端连续，并且具有在增加宽度的方向上倾斜的两个侧面。 由平行于底面和侧面的平面形成的第一部分的外角比由平行于底面和侧面的平面形成的第二部分的外角大。

公开(公告)号：US20090027809A1

公开(公告)日：2009-01-29

申请号：US11781606

申请日：2007-07-23

申请人： Akifumi KAMIJIMA ,  Hideyuki YATSU ,  Hitoshi HATATE ,  Hisayoshi WATANABE ,  Atsushi YAMAGUCHI ,  Shingo MIYATA ,  Masahiro SAITO

发明人： Akifumi KAMIJIMA ,  Hideyuki YATSU ,  Hitoshi HATATE ,  Hisayoshi WATANABE ,  Atsushi YAMAGUCHI ,  Shingo MIYATA ,  Masahiro SAITO

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/3116 ,  G11B5/3912 ,  G11B5/3967 ,  G11B2005/3996

摘要： Provided is a thin-film magnetic head in which the concentration of magnetic flux in the shield layer and the magnetic pole layer is suppressed. The thin-film magnetic head comprises a plurality of magnetic layers that have front surfaces reaching a head end surface on the ABS side. Further in this head, at least one of the plurality of magnetic layers has a shape in which: each of edges corresponding to both side surfaces extends so as to spread obliquely rearward with each other from an end of a straight edge in a track width direction corresponding to the front surface; and the front surface reaching the head end surface has a shape in which upper and lower corner portions in each of both end portions in the track width direction form obtuse angles or rounded shapes.

摘要翻译： 提供了一种薄膜磁头，其中屏蔽层和磁极层中的磁通量的浓度被抑制。 薄膜磁头包括多个磁性层，其前表面到达ABS侧的头端面。 此外，在该头部中，多个磁性层中的至少一个具有以下形状：对应于两个侧表面的每个边缘沿着轨道宽度方向从直边缘的端部彼此倾斜地向后延伸 对应于前表面; 并且到达头端面的前表面具有这样的形状，其中在轨道宽度方向上的两个端部中的每一个中的上角部和下角部形成钝角或圆形。

公开(公告)号：US20100170869A1

公开(公告)日：2010-07-08

申请号：US12349732

申请日：2009-01-07

申请人： Hisayoshi WATANABE ,  Yusuke Ide

发明人： Hisayoshi WATANABE ,  Yusuke Ide

IPC分类号： B44C1/22

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

摘要： The present invention relates to a method for manufacturing a perpendicular recording magnetic head, more particularly, to a method for manufacturing a main magnetic pole film with a wrap-around structure. After the main magnetic pole film with a body portion of a large plane area and a write magnetic pole portion continuous with the body portion and elongated in a plane area is formed on one face of a non-magnetic film, the one face of the non-magnetic film is etched. Then, it also includes the step of further etching the one face of the non-magnetic film with an undercut, which is caused by the etching around the body portion and beneath the write magnetic pole portion, being at least partially filling with an organic filler.

摘要翻译： 本发明涉及一种用于制造垂直记录磁头的方法，更具体地说，涉及一种具有环绕结构的主磁极膜的制造方法。 在非磁性膜的一个面上形成具有大平面区域的主体部分的主磁极膜和与主体部分连续并在平面区域中延伸的写入磁极部分， - 磁膜蚀刻。 然后，还包括通过由身体部分周围的蚀刻和写磁极部分下方的蚀刻而引起的非切割蚀刻非磁性膜的一面的步骤，至少部分地填充有机填料 。