公开(公告)号：US11894213B2

公开(公告)日：2024-02-06

申请号：US17252997

申请日：2018-06-22

Applicant: Hitachi High-Tech Corporation

Inventor： Asako Kaneko ,  Hisayuki Takasu

IPC: H01J37/20 ,  H01J37/08 ,  H01J37/09 ,  H01J37/147 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/08 ,  H01J37/09 ,  H01J37/1478 ,  H01J37/3053 ,  H01J2237/002 ,  H01J2237/1502 ,  H01J2237/20214

Abstract: An ion milling device capable of high-speed milling is realized even for a specimen containing a material having an imide bond. Therefore, the ion milling device includes: a vacuum chamber 6 configured to hold a specimen 3 in a vacuum atmosphere; an ion gun 1 configured to irradiate the specimen with a non-focused ion beam 2; a vaporization container 17 configured to store a mixed solution 13 of a water-soluble ionic liquid and water; and nozzles 11, 12 configured to supply water vapor obtained by vaporizing the mixed solution to a vicinity of a surface of the specimen processed by the ion beam.