公开(公告)号：US20220028650A1

公开(公告)日：2022-01-27

申请号：US17295978

申请日：2018-11-30

Applicant: Hitachi High-Tech Corporation

Inventor： Takafumi Miwa ,  Seiichiro Kanno ,  Go Miya

IPC: H01J37/244 ,  H01J37/26 ,  H01J37/22 ,  H01J37/20

Abstract: Provided is a charged particle beam apparatus capable of analyzing foreign matters generated when a sample is transported or observed. The charged particle beam apparatus includes a sample stage on which a measurement sample is provided, a charged particle beam source that irradiates the measurement sample with a charged particle beam, and a detector that detects charged particles emitted by irradiation with the charged particle beam, and includes a foreign matter observation sample held on the sample stage together with the measurement sample and a foreign matter observation unit that causes a foreign matter to be observed on the foreign matter observation sample.

公开(公告)号：US12106930B2

公开(公告)日：2024-10-01

申请号：US17778599

申请日：2019-12-23

Applicant: Hitachi High-Tech Corporation

Inventor： Takafumi Miwa ,  Go Miya ,  Kazuma Tanii ,  Seiichiro Kanno

IPC: H01J37/12 ,  H01J37/28

CPC classification number: H01J37/12 ,  H01J37/28 ,  H01J2237/022

Abstract: Provided is a charged particle beam device capable of reducing scattering of a foreign substance collected by a foreign substance collecting unit. The charged particle beam device includes: a sample chamber in which a sample is to be disposed; and a charged particle beam source configured to irradiate the sample with a charged particle beam. The charged particle beam device further includes: a foreign substance attachment/detachment unit from or to which a foreign substance is to detach or attach; and a foreign substance collecting unit provided in the sample chamber and configured to collect a foreign substance dropped from the foreign substance attachment/detachment unit. An opening through which the foreign substance passes is provided in an upper end portion of the foreign substance collecting unit. An area of the opening is smaller than a horizontal cross-sectional area of an internal space of the foreign substance collecting unit.

公开(公告)号：US20240177963A1

公开(公告)日：2024-05-30

申请号：US18507857

申请日：2023-11-13

Applicant: Hitachi-High-Tech Corporation

Inventor： Yuki UCHIOKE ,  Masaru Matsushima ,  Masaki Mizuochi ,  Go Miya ,  Katsumi Kambe

IPC: H01J37/20 ,  H01J37/22

CPC classification number: H01J37/20 ,  H01J37/222 ,  H01J2237/2001 ,  H01J2237/20214 ,  H01J2237/221

Abstract: To provide a technique of the above charged particle beam apparatus, a technique that can prevent the lowering of apparatus performance due to the influence of vibration and noise by an air blower (fan). The charged particle beam apparatus includes a body device that is provided in a body cover, a plurality of air blowers that are provided on the body cover, and a controller that controls the plurality of air blowers. The body device has a stage on which a sample is placed, and a microscope that images the sample. The controller obtains an image obtained by imaging the sample by the microscope, obtains vibration information from the image, compares the vibration information and a specification value, and on the basis of the result of the comparison, controls the numbers of rotations of the plurality of air blowers. The controller decreases the number of rotations of at least one first air blower among the plurality of air blowers, and increases the number of rotations of at least one different second air blower among the plurality of air blowers.

公开(公告)号：US11735394B2

公开(公告)日：2023-08-22

申请号：US17295978

申请日：2018-11-30

Applicant: Hitachi High-Tech Corporation

Inventor： Takafumi Miwa ,  Seiichiro Kanno ,  Go Miya

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/22 ,  H01J37/26

Abstract: Provided is a charged particle beam apparatus capable of analyzing foreign matters generated when a sample is transported or observed. The charged particle beam apparatus includes a sample stage on which a measurement sample is provided, a charged particle beam source that irradiates the measurement sample with a charged particle beam, and a detector that detects charged particles emitted by irradiation with the charged particle beam, and includes a foreign matter observation sample held on the sample stage together with the measurement sample and a foreign matter observation unit that causes a foreign matter to be observed on the foreign matter observation sample.