公开(公告)号：US11276548B2

公开(公告)日：2022-03-15

申请号：US17101118

申请日：2020-11-23

Applicant: Hitachi High-Tech Corporation

Inventor： Hitomi Sakai ,  Daisuke Sato ,  Keiichiro Hitomi ,  Hiroyuki Saito ,  Kazuma Tanii

IPC: H01J37/147 ,  H01J37/10 ,  H01J37/26 ,  H01J37/22 ,  H01J37/28

Abstract: Provided are a charged particle beam device and a charged particle beam adjustment method capable of observing or inspecting a change in observation conditions in a more appropriate beam state while preventing an increase in a time required for each measurement point. The charged particle beam device includes a condenser lens 3 and an objective lens 14 configured to focus an electron beam 4 emitted from an electron source 2, a primary beam scanning deflector 5 or a secondary electron deflector 15, an adjusting element 13 configured to adjust an axis of the electron beam 4, and a control device 9 configured to supply a signal representing a control amount to the adjusting element 13 for control. The control device 9 is configured to determine the control amount by using a change amount of an intensity of the condenser lens 3, the objective lens 14, the primary beam scanning deflector 5, or the secondary electron deflector 15, and a calculation formula or a table showing a relation between the change amount of the intensity and the control amount.

公开(公告)号：US12106930B2

公开(公告)日：2024-10-01

申请号：US17778599

申请日：2019-12-23

Applicant: Hitachi High-Tech Corporation

Inventor： Takafumi Miwa ,  Go Miya ,  Kazuma Tanii ,  Seiichiro Kanno

IPC: H01J37/12 ,  H01J37/28

CPC classification number: H01J37/12 ,  H01J37/28 ,  H01J2237/022

Abstract: Provided is a charged particle beam device capable of reducing scattering of a foreign substance collected by a foreign substance collecting unit. The charged particle beam device includes: a sample chamber in which a sample is to be disposed; and a charged particle beam source configured to irradiate the sample with a charged particle beam. The charged particle beam device further includes: a foreign substance attachment/detachment unit from or to which a foreign substance is to detach or attach; and a foreign substance collecting unit provided in the sample chamber and configured to collect a foreign substance dropped from the foreign substance attachment/detachment unit. An opening through which the foreign substance passes is provided in an upper end portion of the foreign substance collecting unit. An area of the opening is smaller than a horizontal cross-sectional area of an internal space of the foreign substance collecting unit.