公开(公告)号：US20220130638A1

公开(公告)日：2022-04-28

申请号：US17501249

申请日：2021-10-14

Applicant: Hitachi High-Tech Corporation

Inventor： Keiichiro HITOMI ,  Kenji TANIMOTO ,  Yusuke ABE ,  Takuma YAMAMOTO ,  Kei SAKAI ,  Satoru YAMAGUCHI ,  Yasunori GOTO ,  Shuuichirou TAKAHASHI

IPC: H01J37/22 ,  H01J37/147 ,  H01J37/21

Abstract: Provided is a charged particle beam device capable of focusing with high accuracy even when a charged particle beam has a large off-axis amount. The charged particle beam device generates an observation image of a sample by irradiating the sample with a charged particle beam, and includes: a deflection unit that inclines the charged particle beam; a focusing lens that focuses the charged particle beam; an adjustment unit that adjusts a lens strength of the focusing lens based on an evaluation value calculated from the observation image; a storage unit that stores a relationship between a visual field movement amount and the lens strength; and a filter setting unit that calculates the visual field movement amount based on an inclination angle of the charged particle beam and the relationship, and sets an image filter to be superimposed on the observation image based on the calculated visual field movement amount.

公开(公告)号：US20240240937A1

公开(公告)日：2024-07-18

申请号：US18559162

申请日：2021-05-28

Applicant: Hitachi High-Tech Corporation

Inventor： Aoi YAMAUCHI ,  Ayumi DOI ,  Makoto SUZUKI ,  Shuuichirou TAKAHASHI ,  Masaki SUGIE

IPC: G01B15/00

CPC classification number: G01B15/00

Abstract: Provided is a depth measurement system comprising a plurality of depth measurement devices which each calculate a depth index value indicating the relative depth of a pattern on a sample, wherein: the plurality of depth measurement devices are classified into one reference device 1001 and an other correction target device 1002; the depth measurement devices each execute a depth measurement recipe for measuring the depth of a predetermined pattern in a measurement subject so as to calculate the depth index value of the predetermined pattern on the basis of a measurement value extracted from an obtained electronic image; and the correction target device stores a correction coefficient associated with the depth measurement recipe and outputs the depth index value of the predetermined pattern which has been corrected using a mathematical model to which the correction coefficient is applied.