公开(公告)号：US20250022678A1

公开(公告)日：2025-01-16

申请号：US18765493

申请日：2024-07-08

Applicant: Hitachi, Ltd.

Inventor： Fumiaki ICHIHASHI ,  Toshiaki TANIGAKI

IPC: H01J37/20 ,  H01J37/26

Abstract: In liquid environment observation or gas environment observation using an environmental cell, highly accurate measurement is possible without being affected by deflection of a membrane. A environmental cell for holding a sample to be observed by an electron microscope includes: a first chip including a first membrane and a frame supporting the first membrane and having a first opening portion; a second chip including a second membrane and a frame supporting the second membrane and having a second opening portion; and a sample holding member. The first chip and the second chip are disposed such that the first membrane and the second membrane face each other and the first opening portion and the second opening portion overlap each other in a top view. The sample holding member is disposed on the second membrane in a manner of straddling a contour of the second opening portion in the top view. The sample is attached to a region located in the second opening portion in the top view of the sample holding member.

公开(公告)号：US20230207258A1

公开(公告)日：2023-06-29

申请号：US17991415

申请日：2022-11-21

Applicant: Hitachi, Ltd.

Inventor： Toshiaki TANIGAKI ,  Fumiaki ICHIHASHI

IPC: H01J37/28 ,  G01N23/20091 ,  H01J37/22

CPC classification number: H01J37/28 ,  G01N23/20091 ,  H01J37/226 ,  H01J2237/2802

Abstract: An interference scanning transmission electron microscope includes an electron source configured to emit an electron beam, a lens configured to irradiate a sample with a converged electron beam, an electron beam bi-prism configured to divide an electron wave through the sample and to superimpose a first electron wave and a second electron wave divided to form an interference fringe, a camera which is a detector configured to detect the interference fringe, and a computer configured to calculate a phase difference between the first electron wave and the second electron wave based on the interference fringe, wherein the electron beam bi-prism is provided between the sample and the detector.

公开(公告)号：US20190027338A1

公开(公告)日：2019-01-24

申请号：US16029751

申请日：2018-07-09

Applicant: HITACHI, LTD.

Inventor： Akira SUGAWARA ,  Yoshio TAKAHASHI ,  Tetsuya AKASHI ,  Toshiaki TANIGAKI

IPC: H01J37/20 ,  H01J37/244 ,  H01J37/22 ,  H01J37/04 ,  G03H5/00

Abstract: Continuous and automatic acquisition of electron beam holograms is made possible by using a sample holding mechanism that includes a sample end region that has a linear shape that is suited for electron beam holography, separates a thin-film rectangular window with an extreme-thin support film that supports a sample being disposed and a rectangular hole that has a linear-shaped edge and through which a reference wave is transmitted from each other, and configures a part of a layer that is thicker than the support film.

公开(公告)号：US20250157786A1

公开(公告)日：2025-05-15

申请号：US18940959

申请日：2024-11-08

Applicant: Hitachi, Ltd.

Inventor： Fumiaki ICHIHASHI ,  Toshiaki TANIGAKI

IPC: H01J37/22 ,  H01J37/26

Abstract: A charged particle beam apparatus includes: an electron source that irradiates a membrane-type holder with an electron beam; a deflector that changes an angle of incidence of the electron beam; a camera that is exposed to the electron beam transmitted through the membrane-type holder; and a control unit that controls the electron source, the deflector, and the camera. The control unit obtains an exposure image by continuously exposing the camera to the electron beam while changing the angle of incidence of the electron beam focused on any one of a first layer, a second layer, and a third layer included in the membrane-type holder.

公开(公告)号：US20240404781A1

公开(公告)日：2024-12-05

申请号：US18588347

申请日：2024-02-27

Applicant: Hitachi. Ltd.

Inventor： Toshiaki TANIGAKI ,  Akira Sugawara ,  Fumiaki Ichihashi

IPC: H01J37/20 ,  H01J37/26

Abstract: There are provided a sample holder that allows in-situ observation of a sample such as a gas or liquid under light irradiation and an electron microscope. An environment cell is formed in combination of two silicon chips, each including a membrane and a frame supporting the membrane, the frame being provided on the opening. The environment cell is accommodated in a main body of the sample holder, and fixed by a lid. The openings of the lid, the two silicon chips, and the main body are placed so as to overlap with each other along the optical axis of an electron beam of an electron microscope. A light emitting element is placed at a position where any one of the openings of the two silicon chips is allowed to be irradiated with light.

公开(公告)号：US20190295817A1

公开(公告)日：2019-09-26

申请号：US16302854

申请日：2017-03-13

Applicant: HITACHI, LTD.

Inventor： Toshiaki TANIGAKI ,  Akira SUGAWARA ,  Tetsuya AKASHI

IPC: H01J37/26 ,  H01J37/295

Abstract: An electron microscope that measures electromagnetic field information separates an electric field distribution and a magnetic field distribution of a specimen with high precision to measure the electromagnetic field information. The electron microscope is configured with an electron source 1, an electron gun deflection coil 3, converging lenses 4a and 4b, an irradiation system astigmatic compensation coil 5, irradiation system deflection coils 6a and 6b, a magnetic field application coil 8, an objective lens 11, an imaging system astigmatic compensation coil 12, imaging system deflection coils 13a and 13b, a magnifying lens 17, an electron detector 18, a control analysis apparatus 20, and the like, and the control analysis apparatus 20 repeats a plurality of times measurement of first electromagnetic field information with an output signal from the electron detector by exercising first electron beam control after a first magnetic field is applied to the specimen 10 and then measurement of second electromagnetic field information similarly by exercising second electron beam control after a second magnetic field is applied to the specimen, and separates and measures an electric field distribution and a magnetic field distribution with high precision from the obtained first and second electromagnetic field information.

公开(公告)号：US20240192152A1

公开(公告)日：2024-06-13

申请号：US18521168

申请日：2023-11-28

Applicant: Hitachi, Ltd.

Inventor： Toshiaki TANIGAKI

IPC: G01N23/203 ,  G01N23/02

CPC classification number: G01N23/203 ,  G01N23/02 ,  G01N2223/045 ,  G01N2223/306

Abstract: An information processing system includes an input unit that receives a structure distribution of a sample and a first phase distribution of an electron beam, X-ray, light or neutron beam transmitted through the sample, a processing unit that computes a second phase distribution based on the structure distribution and computes an electromagnetic field component of the sample based on the first phase distribution and the second phase distribution, and an output unit that outputs the electromagnetic field component.

公开(公告)号：US20240021406A1

公开(公告)日：2024-01-18

申请号：US18107150

申请日：2023-02-08

Applicant: Hitachi, Ltd.

Inventor： Yoshio TAKAHASHI ,  Tetsuya AKASHI ,  Toshiaki TANIGAKI

IPC: H01J37/26 ,  H01J37/22

CPC classification number: H01J37/26 ,  H01J37/222 ,  H01J2237/2614

Abstract: There is provided a phase-image processing apparatus and a phase-image processing method capable of highly accurately correcting a phase singularity included in a phase image. A phase-image processing apparatus that applies image processing to a phase image includes: a fringe pattern-creating unit that creates a plurality of fringe patterns based on a first interference fringe image corresponding to a first phase image including a phase singularity; a patch image-creating unit that creates a patch image based on the fringe pattern; an interference fringe image correcting unit that pastes the patch image to an area of the first interference fringe image corresponding to the phase singularity, corrects the first interference fringe image, and creates a second interference fringe image; and a phase image correcting unit that creates a second phase image from the second interference fringe image.

公开(公告)号：US20130313432A1

公开(公告)日：2013-11-28

申请号：US13900589

申请日：2013-05-23

Applicant: Hitachi, Ltd. ,  RIKEN

Inventor： Toshiaki TANIGAKI ,  Shinji AIZAWA ,  Tsuyoshi MATSUDA ,  Ken HARADA ,  Yoshio TAKAHASHI

IPC: H01J37/26

CPC classification number: H01J37/261 ,  H01J37/295 ,  H01J2237/026 ,  H01J2237/1514 ,  H01J2237/2614

Abstract: In an interference electron microscope, a first electron biprism is disposed between an acceleration tube and an illumination-lens system, a mask is disposed between the acceleration tube and the first electron biprism, and the first electron biprism is arranged in a shadow that the mask forms. Current densities of first and second electron beams on a parabolic surface of an objective lens system where a sample is positioned are controlled by a control system by an optical action of the illumination-lens system, the mask is imaged on the parabolic surface of the objective lens system, and an electro-optical length between the first electron biprism and the parabolic surface of the objective lens where the sample is positioned is controlled without generating Fresnel fringes on a sample surface from the mask and the first electron biprism.

Abstract translation: 在干涉电子显微镜中，第一电子双棱镜设置在加速管与照明透镜系统之间，掩模设置在加速管与第一电子双棱镜之间，第一电子双棱镜被布置成荫罩 形式。 通过照明透镜系统的光学作用由控制系统控制样品所在的物镜系统的抛物面上的第一和第二电子束的电流密度，掩模被成像在物镜的抛物面上 透镜系统，并且控制样品所在的第一电子双棱镜和物镜的抛物线表面之间的电光长度，而不在掩模和第一电子双棱镜的样品表面上产生菲涅尔条纹。

公开(公告)号：US20240429020A1

公开(公告)日：2024-12-26

申请号：US18603269

申请日：2024-03-13

Applicant: Hitachi, Ltd.

Inventor： Akira SUGAWARA ,  Fumiaki ICHIHASHI ,  Toshiaki TANIGAKI

IPC: H01J37/20 ,  H01J37/26

Abstract: A sample holder enables easy control of a progress rate of a chemical reaction of a sample to be observed and facilitates observation of the chemical reaction. A sample holder includes a cylindrical holder outer cylinder, a sample holding section that is connected to one end of the holder outer cylinder and holds a sample, a gas reservoir tank that is connected to another end of the holder outer cylinder and stores gas, an orifice for ejecting the gas stored in the gas reservoir tank into the holder outer cylinder, and a valve for controlling a flow of the gas stored in the gas reservoir tank into the orifice. The sample holding section has an open end for discharging the gas supplied from the gas reservoir tank and having passed through the sample.