Holder for liquid phase epitaxial growth
    2.
    发明授权
    Holder for liquid phase epitaxial growth 失效
    支持液相外延生长

    公开(公告)号:US4350116A

    公开(公告)日:1982-09-21

    申请号:US219075

    申请日:1980-12-22

    IPC分类号: C30B19/06 B05C13/02

    CPC分类号: C30B19/068 Y10S269/903

    摘要: A holder for liquid phase epitaxial (LPE) growth which eliminates mesas on the surface of the film is described. The holder has two legs to which a ring is connected. The ring has holding means so that it can hold one wafer or two wafers back-to-back. One of the two legs extends vertically below the first ring. In a preferred embodiment a second ring having holding means for a pair of wafers back-to-back is attached to the elongated leg. This holder structure prevents a film from the liquid melt from forming when the holder is withdrawn from the liquid growth solution, thereby eliminating the formation of mesas which occur when the film ruptures.

    摘要翻译: 描述了用于消除膜表面上的台面的液相外延(LPE)生长的保持器。 支架具有两个连接环的支脚。 环具有保持装置,使得其可以背对背地保持一个晶片或两个晶片。 两条腿中的一条垂直于第一环的下方延伸。 在优选实施例中,具有用于一对背板背对的保持装置的第二环连接到细长的腿上。 当保持器从液体生长溶液中取出时,该保持器结构防止了液体熔融物的形成,从而消除了当膜破裂时出现的台面的形成。