TARGETS AND PROCESSES FOR FABRICATING SAME
    7.
    发明申请
    TARGETS AND PROCESSES FOR FABRICATING SAME 有权
    用于制造它们的目标和工艺

    公开(公告)号:US20140030542A1

    公开(公告)日:2014-01-30

    申请号:US13839973

    申请日:2013-03-15

    IPC分类号: H05H1/02

    摘要: In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 μm. In particular examples, the distance is less than about 1 μm. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.

    摘要翻译: 在具体实施方案中,本公开提供了包括金属层并限定中空内表面的靶。 中空的内表面具有内部顶点。 内部顶点的至少两个相对的点之间的距离小于约15μm。 在具体示例中,距离小于约1um。 目标的具体实现是独立的。 目标具有许多公开的形状,包括锥体,金字塔,半球和封盖结构。 本公开还提供了这样的靶的阵列。 还提供了使用光刻技术(诸如光刻技术)形成靶的方法,例如所公开的靶。 在具体实例中,目标模具由硅晶片形成,然后模具的一侧或多侧涂覆有目标材料,例如一种或多种金属。