专利检索 ap:("Hong-Seub KIM" OR "Hyun-Soo PARK" OR "Soon-Bin JUNG" OR "Sung-Ho CHA" OR "Dong-Jin KIM" OR "Wook-Jung HWANG" OR "Jin-Hyuk YOO") AND inv:"Soon-Bin JUNG" 第 1 页

1.

发明申请
VACUUM PUMPING SYSTEM, DRIVING METHOD THEREOF, APPARATUS HAVING THE SAME, AND METHOD OF TRANSFERRING SUBSTRATE USING THE SAME 有权
标题翻译：真空泵系统，其驱动方法，具有该装置的装置以及使用其传送底板的方法

公开(公告)号：US20100215513A1

公开(公告)日：2010-08-26

申请号：US12713136

申请日：2010-02-25

申请人： Hong-Seub KIM , Hyun-Soo PARK , Soon-Bin JUNG , Sung-Ho CHA , Dong-Jin KIM , Wook-Jung HWANG , Jin-Hyuk YOO

发明人： Hong-Seub KIM , Hyun-Soo PARK , Soon-Bin JUNG , Sung-Ho CHA , Dong-Jin KIM , Wook-Jung HWANG , Jin-Hyuk YOO

IPC分类号： F04B49/00 , F04B23/08

CPC分类号： H01L21/67161 , H01L21/67017 , H01L21/67167 , H01L21/67173 , Y10T137/86083 , Y10T137/86139

摘要： An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.

摘要翻译： 一种装置，包括在大气条件下的转印单元，其中具有机器人; 以及至少一个处理室，其连接到转印单元的一侧，其间具有槽阀，并且交替地在真空条件下和在大气条件下。